Lei Jin, Jiaqiang Yang, Yi Zhao, Zhaoyun Wang, Siyu Chen, Anni Zheng, Tao Song, Fang Yang, Dongping Zhan
{"title":"面向集成电路产业的电子电镀研究方法","authors":"Lei Jin, Jiaqiang Yang, Yi Zhao, Zhaoyun Wang, Siyu Chen, Anni Zheng, Tao Song, Fang Yang, Dongping Zhan","doi":"10.1360/ssc-2023-0135","DOIUrl":"https://doi.org/10.1360/ssc-2023-0135","url":null,"abstract":"","PeriodicalId":21640,"journal":{"name":"SCIENTIA SINICA Chimica","volume":" ","pages":""},"PeriodicalIF":0.0,"publicationDate":"2023-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"45819207","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0