Lei Jin, Jiaqiang Yang, Yi Zhao, Zhaoyun Wang, Siyu Chen, Anni Zheng, Tao Song, Fang Yang, Dongping Zhan
{"title":"面向集成电路产业的电子电镀研究方法","authors":"Lei Jin, Jiaqiang Yang, Yi Zhao, Zhaoyun Wang, Siyu Chen, Anni Zheng, Tao Song, Fang Yang, Dongping Zhan","doi":"10.1360/ssc-2023-0135","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":21640,"journal":{"name":"中国科学(化学)","volume":" ","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2023-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"中国科学(化学)","FirstCategoryId":"1089","ListUrlMain":"https://doi.org/10.1360/ssc-2023-0135","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"Chemistry","Score":null,"Total":0}
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