{"title":"Evaluation of Measurement Resolution for Scanning Microwave Microscopy","authors":"M. Horibe, S. Kon, I. Hirano","doi":"10.1109/ARFTG.2019.8637223","DOIUrl":"https://doi.org/10.1109/ARFTG.2019.8637223","url":null,"abstract":"Here we investigated the measurement resolution of a scanning microwave microscope (SMM) based on an atomic force microscope (AFM) for the characterization of several types of sample. Then, we proposed uncertainty/accuracy evaluation of SMM systems in laboratories. Dielectric material samples with high permittivity was able to be quantitatively evaluated by SMM measurement. The SMM has been detect the difference of permittivity with uncertainty. However, possibility of evaluation is now unknown for materials with small difference of electrical characteristics. This paper presents investigation results and consideration of SMM resolution by comparing with measurement uncertainty of vector network analyzers. Here, we show SMM measurement results with uncertainty for GaN epitaxial film, Graphene films, Si-dopant multi-later film and surface mount device (SMD). As the result, SMM has capable of quantitatively measuring SMD.","PeriodicalId":197304,"journal":{"name":"2019 92nd ARFTG Microwave Measurement Conference (ARFTG)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129673656","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
X. Shang, N. Ridler, Wenjuan Sun, P. Cooper, Alan Wilson
{"title":"Preliminary Study on WM-380 Waveguide TRL Calibration Line Standards at the UK's National Physical Laboratory","authors":"X. Shang, N. Ridler, Wenjuan Sun, P. Cooper, Alan Wilson","doi":"10.1109/ARFTG.2019.8637214","DOIUrl":"https://doi.org/10.1109/ARFTG.2019.8637214","url":null,"abstract":"NPL has launched a comprehensive study on its primary waveguide TRL calibration 3/4-wave Line standards, in order to establish traceability in S-parameter measurements at terahertz frequencies. The WM-380 band (500–750 GHz) has been chosen to demonstrate the approach that is being taken. High precision dimensional measurements have been carried out on these Line standards and the waveguide sections that are used as measuring instrument test ports. Electromagnetic modeling and simulations have been performed to quantify the impact of the dimensional errors on the electromagnetic performance of these devices. In this paper, some preliminary results are reported and discussed.","PeriodicalId":197304,"journal":{"name":"2019 92nd ARFTG Microwave Measurement Conference (ARFTG)","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129464676","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}