Sensors UpdatePub Date : 1999-11-01DOI: 10.1002/1616-8984(199911)6:1<283::AID-SEUP283>3.0.CO;2-R
R. Sawada, E. Higurashi
{"title":"Laser‐based Microsensors","authors":"R. Sawada, E. Higurashi","doi":"10.1002/1616-8984(199911)6:1<283::AID-SEUP283>3.0.CO;2-R","DOIUrl":"https://doi.org/10.1002/1616-8984(199911)6:1<283::AID-SEUP283>3.0.CO;2-R","url":null,"abstract":"Renshi SAWADA1 and Eiji HIGURASHI2 1 Department of Intelligent Machinery and Systems, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395 2Research Center for Advanced Science and Technology , The University ofTokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8904 (Received April 20, 2005) Integrated optical microsensors based on photolithography were developed in the early 1990s. Since then, sensors that make the most of the intrinsic properties of laser diodes have been developed. A marriage of micromachining and opto-electronics is expected to create tremendous new opportunities for applications. This article introduces various laser-based microsensors that can be incorporated into a small actuator fabricated by micromachining technologies, and laser-based sensors using microstructural elements (microbeans , microspheres, and microtips).","PeriodicalId":154848,"journal":{"name":"Sensors Update","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133698544","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Sensors UpdatePub Date : 1999-11-01DOI: 10.1002/1616-8984(199911)6:1<41::AID-SEUP41>3.0.CO;2-4
Y. Wada, D. Kobayashi, H. Fujita
{"title":"Micromachine Scanning Tunneling Microscope Research in Japan","authors":"Y. Wada, D. Kobayashi, H. Fujita","doi":"10.1002/1616-8984(199911)6:1<41::AID-SEUP41>3.0.CO;2-4","DOIUrl":"https://doi.org/10.1002/1616-8984(199911)6:1<41::AID-SEUP41>3.0.CO;2-4","url":null,"abstract":"","PeriodicalId":154848,"journal":{"name":"Sensors Update","volume":"269 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120894693","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Sensors UpdatePub Date : 1999-11-01DOI: 10.1002/1616-8984(199911)6:1<361::AID-SEUP361>3.0.CO;2-2
K. Itao
{"title":"Micromachine Market in Information Industries","authors":"K. Itao","doi":"10.1002/1616-8984(199911)6:1<361::AID-SEUP361>3.0.CO;2-2","DOIUrl":"https://doi.org/10.1002/1616-8984(199911)6:1<361::AID-SEUP361>3.0.CO;2-2","url":null,"abstract":"","PeriodicalId":154848,"journal":{"name":"Sensors Update","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133569237","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
