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引用次数: 0
摘要
1九州大学智能机械与系统系，744 Motooka, nishiku, Fukuoka, 819-0395 2东京大学先进科学技术研究中心，4-6-1 Komaba, mekuroku, Tokyo, 153-8904(接收于2005年4月20日)基于光刻技术的集成光学微传感器是在20世纪90年代初发展起来的。从那时起，利用激光二极管固有特性的传感器得到了发展。微机械加工与光电子技术的结合有望为应用创造巨大的新机会。本文介绍了各种基于激光的微传感器，这些传感器可以集成到通过微加工技术制造的小型执行器中，以及使用微结构元素(微豆、微球和微尖)的基于激光的传感器。
Renshi SAWADA1 and Eiji HIGURASHI2 1 Department of Intelligent Machinery and Systems, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395 2Research Center for Advanced Science and Technology , The University ofTokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8904 (Received April 20, 2005) Integrated optical microsensors based on photolithography were developed in the early 1990s. Since then, sensors that make the most of the intrinsic properties of laser diodes have been developed. A marriage of micromachining and opto-electronics is expected to create tremendous new opportunities for applications. This article introduces various laser-based microsensors that can be incorporated into a small actuator fabricated by micromachining technologies, and laser-based sensors using microstructural elements (microbeans , microspheres, and microtips).
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