IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII KHIMIYA KHIMICHESKAYA TEKHNOLOGIYA最新文献

{"title":"FACILE SYNTHESIS OF PHENOLIC DERIVATIVES, CONTAINIG LACTAMOMETHYL SUBSTITUENTS","authors":"S. V. Vorobyev, O. V. Primerova, L. V. Ivanova, V. Ryabov, V. N. Koshelev","doi":"10.6060/ivkkt.20196210.5930","DOIUrl":"https://doi.org/10.6060/ivkkt.20196210.5930","url":null,"abstract":"In this work we suggest the new method for the synthesis of novel phenolic derivatives, containing lactamomethyl substituents. Oxidation processes of fuels and mineral oils lead to losing of their properties, so the search for new and effective inhibitors of these processes is very actuel. We suggest a facile system for lactamomethylation reaction. Heating in the water some of phenols (resorcinol, phloroglucinol, methylphloroglucinol, pyrogallol, salicylic, resorcilic and gallic acids) with N-hydroxymethyl derivatives of pyrrolidone, valerolactam, caprolactam and 4-phenylpyrrolidone in the presence of catalytic amounts of acetic acid led to the target compounds with nearly quantitative yields. Time of the reaction ranged 1.5-2 h. As the products have low solubility in water, in contrast with the reagents, filtration was used for their extraction. The advantages of this method are also that it is eco-friendly because of small amounts of wastes and low toxicity of the reagents and solvent, and cheapness of starting compounds. Eighteen novel compounds were obtained. The composition of target substances was determined by elemental analysis whereas the structures of the synthesized compounds were confirmed by FT-IR spectroscopy methods, 1H- and 13C-NMR spectroscopy. In IR spectra there are carbonyl group stretching vibrations peaks in lower frequencies (about 1600 cm-1) than expected due to the formation of inter- and intramolecular hydrogen bonds between this group and phenolic hydroxyl group.","PeriodicalId":14640,"journal":{"name":"IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII KHIMIYA KHIMICHESKAYA TEKHNOLOGIYA","volume":"75 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2019-10-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86076392","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"IONOMETRIC DETERMINATION OF ZINC IN MILK","authors":"Yulia I. Matyushkina, A. A. Shabarin","doi":"10.6060/ivkkt.20196210.5912","DOIUrl":"https://doi.org/10.6060/ivkkt.20196210.5912","url":null,"abstract":"The possibility of ionometric determination of zinc in the rhodanide complex form in milk is represented. The indicator electrode was ion-selective electrode (ISE) with solution of tetradecylammonium bromide in nitrobenzene as a membrane.  As a complexing agent the potassium thiocyanate with 1.0 mol/l optimal concentration in investigated solutions was selected. The calibration dependence E = f(pCZn(II)) were typical anionic functions. The steepness of the electrode function (29±2 mV/pC), close to the theoretical value for the doubly−charged ions, suggests that the electrochemically active anions are [Zn(NCS)4]2-. The interval of linearity of calibration curves is 1.0 to 5.7 pC, the detection limit is equal to 1∙10-6 mol/l. The selectivity of determination of zinc in the rhodanide complex form was investigated with “The mixed solutions” method in the presence of potassium, calcium, aluminum, iron (III), manganese (II), copper (II) chlorides potassium iodide and nitric acid solutions. The background concentration of extraneous (j) substances in investigated solutions was calculated with usage of published data and corresponds to their maximum content in milk. It was founded that the ionometric determination of zinc is possible in range from 1.0 to 5.0 pC for all investigated j-ions. The technique for different types of milk was developed including preliminary sample preparation, used in special certified laboratories and based on dry mineralization of sample and dissolving in nitric acid solution. The concentrations of zinc-ions in analyzed samples were determined with “limiting solutions” method. The correctness of obtained data was confirmed with “entered-found” scheme. The relative standard deviation was not higher then 0.08.","PeriodicalId":14640,"journal":{"name":"IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII KHIMIYA KHIMICHESKAYA TEKHNOLOGIYA","volume":"19 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2019-10-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84003361","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"ELECTRON STRUCTURE OF RADICALS OF SULFOXYLIC ACID ESTERS","authors":"N. P. Rusakova, A. V. Kotomin, Yu. D. Orlov, V. Turovtsev","doi":"10.6060/ivkkt.20196210.5964","DOIUrl":"https://doi.org/10.6060/ivkkt.20196210.5964","url":null,"abstract":"The density functional theory B3LYP/6-311++G(3df,3pd) has been used to optimize the geometry of homologues of a series of sulfoxylic acid ester radicals and to obtain the electron density distributions of the first nine compounds. The hydrogen bond presented in the initial molecules of the unbranched esters of sulfoxylic acid between the hydrogen of the second carbon atom of the alkyl chain (from the ester bond) and the oxygen of the hydroxyl group of the sulfur-containing fragment (-C(Н)H-CH2-O-S-ОН) and the corresponding cycle are not observed in the radicals. The fragmentation of the structures into topological groups of CH3, CH2, and (-O-S-O)● has been proposed and their electron integral characteristics are presented including charges, unpaired electron density, energy, and volume. The steric effect of the fragment (-O-S-O)● has been established and its inductive effect has been considered based on the groups charge parameters changes triggered by an increase in the hydrocarbon chain. The scale of group electronegativities of the studied homologues has been constructed by comparing the charges of topological groups. The fact that the radical center corresponds to the fragment (-O-S-O)● has been demonstrated by the spin density delocalization results (having the largest fraction on the sulfur atom (0.57), slightly less fraction on the oxygen atom with a free valence (0.32) and an insignificant fraction on oxygen atom using the ether bond (0.10)). The increment value of the total energy contributed by the CH2 group of each subsequent homologue of the series under the study has been estimated. It is 103260 kJ/mol. The evaluation of the “standard” value of the groups’ total electron energy and the use of their relative energy (ΔE(R)) for comparing with ΔE(R) of molecules and radicals of other homologous series have been described. A decrease in the volumes of the two closest to the sulfur-containing fragment CH2 groups caused by an outflow of electron density from them toward the fragment (-O-S-O)● has been noted.","PeriodicalId":14640,"journal":{"name":"IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII KHIMIYA KHIMICHESKAYA TEKHNOLOGIYA","volume":"10 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2019-10-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74048107","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"STUDY OF GRANULATION PROCESS OF ILMENITE CONCENTRATE BY PELLETING METHOD","authors":"S. V. Lanovetskiy, O. Fedotova, Vladimir Z. Poiylov, V. Shein, O. G. Melkomukova","doi":"10.6060/ivkkt.20196210.5948","DOIUrl":"https://doi.org/10.6060/ivkkt.20196210.5948","url":null,"abstract":"The use of highly dispersed ilmenite ore in the titanium concentrate enrichment technology is accompanied by high dustiness at the stage of titanium charge preparation, which inevitably leads to technological losses and adversely affects the working conditions of the staff. In connection with this, the aim of the present work was to study the process of granulating ilmenite concentrate from the Malyshevsky deposit by pelletization. The size and morphology of ilmenite concentrate particles were determined using a high-resolution electron scanning microscope and a laser diffraction particle size analyzer. The granulation process was carried out in a drum granulator thermostated by assessing the effect of temperature, rotation speed granulator, process duration and a binder flow rate on particle size distribution and static strength formed granules of the title product. During the investigations it was established that the maximum yield of granules fraction of 1.0 - 5.0 mm was obtained using an aqueous solution of molasses molasses volume ratio: water = 5:1. The use as undiluted molasses binder leads to a strong increase in ductility formed mass and negatively affects the possibility of producing a granular product. It was shown that with increasing concentration of binder in the composition of the starting mixture the average yield and static strength of granules fraction of 1.0 - 5.0 mm increases, due to the uniform distribution of the solution between the ilmenite concentrate particles. At the same time when the amount of binder in the composition of the starting raw materials over 9.5% the formation of relatively large lumps is observed, which size is more than 5.0 mm. It has been experimentally proved that with increasing duration pelletization yield pellets of ilmenite concentrate fraction of 1.0 - 5.0 mm increases, passing through a maximum at 300 s.","PeriodicalId":14640,"journal":{"name":"IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII KHIMIYA KHIMICHESKAYA TEKHNOLOGIYA","volume":"81 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2019-10-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79193370","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"STRUCTURAL MODEL OF EFFICIENCY OF COVALENT FUNCTIONALIZATION OF CARBON NANOTUBES","authors":"G. Kozlov, I. Dolbin","doi":"10.6060/ivkkt.20196210.5962","DOIUrl":"https://doi.org/10.6060/ivkkt.20196210.5962","url":null,"abstract":"Functionalization of carbon nanotubes (covalent and noncovalent ones) is effective and often applied method of enhancement of their interaction with polymer matrix of nanocomposites. In present work the treatment is proposed, for the first time allowing quantitative estimation of efficiency (quality) of this nanofiller functionalization. For this purpose proposed earlier generalized model was used, taking into consideration characteristics of matrix polymer and nanofiller and also type of the last. Application of the indicated model allows to obtain quantitative characteristic of functionalization efficiency and also elucidation of interconnection of the indicated efficiency with structure of carbon nanotubes in polymer matrix of nanocomposite, namely, with radius of their annular structures. It has been found that the same method of functionalization from the chemical point of view can be changed its efficiency in 20 times that is dependent upon structure (radius) of annular formations of carbon nanotubes. Their specific surface is the more precise characteristic of these formations. This surface serves as indicator of intensity of contact of polymer matrix and surface of nanotubes, which in the end forms mechanical and other properties of the considered nanocomposites. The equation has been obtained, showing the dependence of functionalization efficiency on two parameters: effective specific surface and content of carbon nanotubes. The sharp discrete reduction of functionalization occurs at reaching of percolation threshold of nanofiller. This means that functionalization of local structures of carbon nanotubes is more effective than functionalization of uninterrupted structures of this nanofiller. The most important mechanical property of polymer nanocomposites, namely, the reinforcement degree, is defined unequivocally by efficiency of functionalization. This approach allows making structural prediction of mechanical properties of nanocomposites polymer/carbon nanotube depending of efficiency of nanofiller functionalization.","PeriodicalId":14640,"journal":{"name":"IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII KHIMIYA KHIMICHESKAYA TEKHNOLOGIYA","volume":"52 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2019-10-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79321688","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"IDENTIFICATION AND QUANTITATIVE DETERMINATION OF ESTERS OF CITRIC ACID","authors":"S. V. Sushkova, S. V. Levanova, I. L. Glazko","doi":"10.6060/ivkkt.20196210.6036","DOIUrl":"https://doi.org/10.6060/ivkkt.20196210.6036","url":null,"abstract":"The necessity and possibility of creating a domestic technology for the production of citric acid esters - trialkyl citrates - effective and environmentally friendly plasticizing compositions based on renewable raw materials are substantiated. Trialkylcitrates a purity of 98-99% are obtained by azeotropic esterification of citric acid with aliphatic alcohols C4-C5 under conditions of homogeneous acid catalysis. Using the synthesis of triamyl citrate as an example, the esterification of a polybasic hydroxy acid has been considered. It was established that during the synthesis a complex mixture is formed consisting of unreacted citric acid, incomplete mono-, diesters and triamyl citrate. The influence of synthesis conditions (temperature, reagent ratio, catalyst amount and reaction time) on the composition of the reaction mass is shown. A method of gas chromatographic analysis of citric acid esters has been developed. Taking into account the structural features of citric acid and its partial esters containing polar carboxyl groups, the reaction mass was pre-methylated with synthesized diazomethane. The resulting mixture consists of six esters of citric acid: trimethylcitrate; 2-hydroxy-1,3-dicarboxymethyl-2-carboxyamylpropane; 2-hydroxy-1,2-dicarboxymethyl-3-carboxyamil propane; 2-hydroxy-1-carboxymethyl-2,3-dicarboxysamyl propane; 2-hydroxy-2-carboxymethyl-1,3-dicarboxyamyl propane; triamylcitrate. The analysis was performed on a chromatographic complex \"Crystal-2000M\" on a capillary column with a grafted non-polar phase OV-101, length 100 m. The analysis time ranged from 22 to 49.5 min. Empirical equations were obtained using the internal standard method (the standard is dicyclohexyl adipate) to determine the calibration coefficients of the starting (trimethyl citrate т citric acid) and final (triamyl citrate) products in a wide concentration range. The results of identification of structures of six esters of citric acid for which there is no information in existing databases are presented. The study was carried out by method of chromato-mass spectrometry on the instrument SHIMADZU GCMS – QP2010 with ionization by electron impact at ionization energy of 130 eV. The analysis of the obtained spectra made it possible to determine the most probable ways of fragmentation of organic molecules and the intensity of the peaks of the ions formed.","PeriodicalId":14640,"journal":{"name":"IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII KHIMIYA KHIMICHESKAYA TEKHNOLOGIYA","volume":"1 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2019-10-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81649699","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"KINETIC AND STRUCTURAL CHARACTERISTICS OF ULTRAFILTRATIONAL MEMBRANES AT SEPARATION OF SOLUTIONS CONTAINING SODIUM LAURYLSULPHATE","authors":"S. Lazarev, Yuri V. Golovin, I. V. Khorokhorina, S. Kovalev, A. Levin","doi":"10.6060/ivkkt.20196210.6031","DOIUrl":"https://doi.org/10.6060/ivkkt.20196210.6031","url":null,"abstract":"In work the generalized analysis of literary data on a research of relative permeability ratio of various types of porous organic and inorganic membranes was submitted. Application of a method of X-ray analysis of samples of the semipermeable ultrafiltrational membranes on a diffractometer of DRON-3 and a specific output flow on a flat-chamber ultrafiltration unit is shown. In materials of work the pilot and theoretical studies on isokinetic zones and structural characteristics of polymeric semipermeable membranes in the course of ultrafiltrational separation of the technological solutions containing the anionic and fissile surface substances are conducted. It is experimentally confirmed that kinetic curves on a specific output flow have two isokinetic zones. The first zone, the stage of the ultrafiltration process, proceeds quickly, lasts only a few minutes - 7.8 min and 13.05 min, the second zone is slower with duration of about 30 min and 60 min for ultrafiltration cellulose acetate membranes of the UAM-100 and UAM-50 series, respectively. The revealed isokinetic zones differ in characteristic times, which differ by orders of magnitude, and, as a result, the final kinetic dependence has an exponential form. The comparative analysis of roentgenograms allows to note coincidence of angles of diffraction, but significant redistribution of intensity of reflexes in air-dried and working sapless in the range of scattering angles 2θ from 8°-35°. The obtained experimental data and their comparison with literary, indicate the same set of the diffraction reflexes at corners 2θ = 17°; 22°; 25° for both samples of membranes that corresponds to the crystal reflexes of membranes created from polyamide fibers (nylon).","PeriodicalId":14640,"journal":{"name":"IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII KHIMIYA KHIMICHESKAYA TEKHNOLOGIYA","volume":"69 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2019-10-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89368056","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"EVALUATION OF EFFECTIVENESS OF USE OF COMPLEX COAGULANTS FOR WASTEWATER TREATMENT PROCESSES OF MECHANICAL ENGINEERING","authors":"E. Kuzin, N. Krutchinina","doi":"10.6060/ivkkt.20196210.5939","DOIUrl":"https://doi.org/10.6060/ivkkt.20196210.5939","url":null,"abstract":"In the course of the work, the quantitative and qualitative characteristics of the wastewater of the machine-building enterprises of the Moscow and Penza regions were investigated. It was found that in most cases the most difficult to remove contaminants are oil products entering the wastewater from metal processing operations, as well as heavy metal ions. Due to the lack of separation of stormwater, industrial and domestic sewage systems, the effluent under study had high concentrations of dissolved organic compounds (Biological Oxygen Demand BOD/chemical oxygen demand COD) and suspended solids. Laboratory tests of experimental samples of complex coagulant on waste water of real production were carried out. Normal aluminum sulfate and aluminum sulfate modified with hydrolysis products of titanium tetrachloride (complex coagulant) were used as reagents. It has been established that complex titanium-containing reagents are effective in the processes of coagulation sewage treatment of machine-building enterprises. The process of flocculation and sedimentation proceeded at a high rate due to flocculation reactions on the surface of titanium hydroxo-complexes, as well as nucleation phenomena on the surface of titanium hydroxide particles. The increased efficiency of samples modified by hydrolysis products of titanium coagulant compounds with respect to traditional aluminum sulfate has been proved. The consumption of complex coagulant compared with aluminum sulfate was about 1.25 - 1.5 times lower, while its efficiency is about 5 - 10% higher. The increased efficiency of complex coagulants with respect to the indicators of oil products, COD and color (organic pollutants) was noted, which is due to the developed adsorption surface of titanium hydroxide flakes in comparison with aluminum hydroxide.","PeriodicalId":14640,"journal":{"name":"IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII KHIMIYA KHIMICHESKAYA TEKHNOLOGIYA","volume":"48 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2019-10-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80828250","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"TELOMERS OF 1,3-BUTADIENE WITH WATER AND CARBON OXIDE IN DIRECTED SYNTHESIS OF INSECT’S PHEROMONES","authors":"G. Ishmuratov, M. P. Yakovleva, V. A. Vydrina, E. Nurieva, N. M. Ishmuratova, Marat G. Giniatullin","doi":"10.6060/ivkkt.20196210.5955","DOIUrl":"https://doi.org/10.6060/ivkkt.20196210.5955","url":null,"abstract":"Insect pheromones fit well into the modern concept of integrated plant protection, the main purpose of which is not the complete destruction of insect pests, but the management of their number without affecting or affecting to a minimum extent all other organisms in the biocenosis. Since pheromones are produced in insect organisms most often in nanogram quantities, the only way to obtain them for practical purposes is through multi-stage chemical synthesis. In connection with the achievements of metal complex catalysis, a number of oligomers, co-oligomers, and telomeres of lower 1,3-dienes of regular structure became available, therefore, the study of the chemo-, stereo-, and regioselective pathways for the conversion of these substrates into practically important low-molecular insect bioregulators is relevant. The author’s review presents the results of studies of the laboratory of insect bioregulators of the Ufa Institute of Chemistry of the Ufa Scientific Center of the Russian Academy of Sciences on the use of available synthetic telomeres of 1,3-butadiene with water and carbon monoxide – 2E,7-octadiene-1-ol and isopropyl-3E,8-nonadienoate, respectively, with E-stereoisomeric purity of not less than 98% in the directed synthesis of mono- and diene components of the acetogenin and macrolide structure of a number of pheromones of economically important harmful insects of the orders Lepidoptera and Coleoptera (sex pheromone of Mediterranean fruit fly Ceratitis capitata, fruit-tree leafroller moth Archips argyrospilus and meadow moth Loxostege sticticalis, Hessian fly Mayetiola destructor, beet moth Scrobipalpa ocellatella, European grapevine moth Lobesia botrana, of females lackey moth Malocosoma neustra L., silkworm Bombyx mori, currant borer moths Synanthedon tipuliformis and wood leopard moth Zeuzera pyrina, the melon fly Dacus cucurbitae, the peach twig borer moths Anarsia lineatella, the turnip moth Agrotis segetum) and 9-oxo-2E-decenoic acid – the multifunctional queen pheromone of the honeybee Apis mellifera L., using at key stages reactions of hydride reduction, hydroboration- or hydroalumination-oxidation, catalyzed cross-coupling, Wittig olefination, etc.","PeriodicalId":14640,"journal":{"name":"IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII KHIMIYA KHIMICHESKAYA TEKHNOLOGIYA","volume":"211 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2019-10-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80678385","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"ON MECHANISMS OF OXYGEN INFLUENCE ON GAS-PHASE PARAMETERS AND SILICON REACTIVE-ION ETCHING KINETICS IN HBr + Cl2 + O2 PLASMA","authors":"A. M. Efremov, V. Rybkin, V. Betelin, K. Kwon","doi":"10.6060/ivkkt.20196210.6046","DOIUrl":"https://doi.org/10.6060/ivkkt.20196210.6046","url":null,"abstract":"The effects of both HBr/O2 and Cl2/O2 mixing ratios in HBr+Cl2+O2 gas mixture on plasma parameters, steady-state densities of active species and Si etching kinetics were studied under the typical conditions of reactive ion etching process: total gas pressure (p = 10 mTorr), input power (W = 500 W), bias power (Wdc = 200 W). The data on internal plasma parameters and plasma chemistry were obtained using a combination of Langmuir probe diagnostics and 0-dimensional (global) plasma modeling. It was found that the variation in HBr/O2 mixing ratio at constant Cl2 fraction in a feed gas is characterized by the stronger impact on the steady-state plasma composition through both electron-impact and atom-molecular reaction kinetics as well as allows one to obtain the wider change in the total halogen atom density. It was shown that changes in both HBr/O2 and Cl2/O2 mixing ratios toward O2-rich plasmas lowers the Si etching rate that exhibits no evident correlations with total halogen atom flux and ion energy flux. The model-based analysis of Si etching kinetics allowed one to conclude that the effective reaction probability for Si + Cl/Br heterogeneous reaction depends on the flux of oxidative species – oxygen atoms and OH radicals. The reasons may be 1) the oxidation of silicon resulting in higher reaction threshold energy; and 2) the decreasing fraction of free adsorption sites for Cl/Br atoms due to the oxidation of reaction products into the lower volatile SiBrxOy and SiClxOy compounds.","PeriodicalId":14640,"journal":{"name":"IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII KHIMIYA KHIMICHESKAYA TEKHNOLOGIYA","volume":"114 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2019-10-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79249712","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}