Jianjun Ma, Bowen Xing, Jiayang Sun, Bin Zhou, Qi Wei, Rong Zhang
{"title":"A novel electrodes design for in-plane measurement of single-structure multi-axis MEMS inertial devices","authors":"Jianjun Ma, Bowen Xing, Jiayang Sun, Bin Zhou, Qi Wei, Rong Zhang","doi":"10.1109/NEMS57332.2023.10190870","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190870","url":null,"abstract":"In this paper, a novel electrodes design for in-plane measurement of single-structure quadruple mass multi-axis MEMS inertial devices is proposed to achieve the closed-loop x/y-axis acceleration measurement. The designed 45 ° tilting comb electrodes combine synovial comb electrodes and laminated comb electrodes and meet the same electrostatic force coefficient on quadruple mass, with structural symmetry design ensured. Theoretical formula is analyzed in detail, which provides guidance for simulation and design.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"348 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114740683","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Influence of microstructure parameters and magnetic intensity on flexible pressure sensor with variable stiffness","authors":"Xinying Li, Tian Xie, Wenjun Xu, Wei Zhou","doi":"10.1109/NEMS57332.2023.10190894","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190894","url":null,"abstract":"This paper systematically studies the Influence of microstructure parameters and magnetic intensity on flexible pressure sensor with variable stiffness. As for the fabrication, we firstly fabricate the microstructure array with magnetic induction characteristic by 3D dynamic laser, and than sputter and pattern a pair of 80 nm thick Au electrodes on PET film. Finally, we package the microstructure array and PET film to get a variable stiffness flexible pressure sensor. The stiffness of the magnetically induced microstructure can be increased by applying a magnetic field. The performance of the sensor was tested under different magnetic intensity. The experimental results show that when the magnetic intensity is 0 mT, the sensor had higher sensitivity under low pressure load, but the linearity became worse with the continuous increase of pressure load. When the magnetic intensity is 250 mT, the sensitivity of the sensor decreases under low pressure load, but it had good linearity under both low and high pressure load.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"62 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121918260","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Masanao Taniguchi, T. Kageyama, Y. Okamoto, T. Matsunaga, Sang-Seok Lee
{"title":"A Vital Sign Monitoring System Using a MEMS Microphone for Dog","authors":"Masanao Taniguchi, T. Kageyama, Y. Okamoto, T. Matsunaga, Sang-Seok Lee","doi":"10.1109/NEMS57332.2023.10190878","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190878","url":null,"abstract":"We propose a vital sign monitoring system to use for health monitoring of the dog. To diagnose dog’s disease or to check dog’s health status, veterinarian firstly investigate the most basic vital signs such as body temperature, heart rate and respiratory rate. Remote and wireless acquisition systems of those vital signs have been paid attention at present time for animal’s continuous health monitoring. To use widely the remote and wireless vital sign monitoring system even to animal, the system have to be implemented cheaply. To achieve a cheap system, which can acquire vital signs remotely and wirelessly, we propose a vital sign monitoring system for the dog using a MEMS microphone and Raspberry pi based wireless system. To apply the vital sign monitoring system to the dog, harness has to be developed. In this paper, we demonstrate that heart rate and respiratory rate acquisition using the proposed system. Moreover, we show the harness developed for the proposed system.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130030629","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Zhiyuan Zhou, Hongze Zhang, Lingchong Xue, Yin Zhang, Kedong Bi
{"title":"Effect of Hexafluoropropylene (HFP) doping on Poly(vinylidenefluoride) (PVDF) Electrospun Nanofibers","authors":"Zhiyuan Zhou, Hongze Zhang, Lingchong Xue, Yin Zhang, Kedong Bi","doi":"10.1109/NEMS57332.2023.10190912","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190912","url":null,"abstract":"In this paper, we investigate the effects of doping on the morphology, mechanical properties, and contact angle of Polyvinylidene fluoride(PVDF) nanofibers prepared by electrospinning. The nanofibers were characterized by Scanning Electron Microscope (SEM), X-ray diffractometer analysis, Contact angle tester and a homemade Microtensile test device. The experimental results showed that by doping Hexafluoropropylene(HFP), the diameters of the electrospun nanofibers became finer and the degree of crystallinity of nanofibers became better. This improves the molecular orientation of PVDF nanofibers, resulting in enhanced Young’s modulus and elongation. XRD analysis revealed that $beta$-crystal were the main crystal form in both electrospun PVDF and PVDF-HFP nanofibers, indicating high hydrophobic performance.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"85 4","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132511971","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Sirui Liu, Rui Chen, Rui Chen, Yu Xie, Wei Zhou, Tao Luo
{"title":"Facile Fabrication of Highly Sensitive Flexible Humidity Sensors by Laser Induced Graphene","authors":"Sirui Liu, Rui Chen, Rui Chen, Yu Xie, Wei Zhou, Tao Luo","doi":"10.1109/NEMS57332.2023.10190860","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190860","url":null,"abstract":"In this paper, a facile method for the preparation of highly sensitive humidity sensor is studied. The laser induced graphene (LIG) is used as electrodes. Polyimide (PI) film is used as both the substrate and humidity sensing material of the sensor. PI film is scanned by a picosecond infrared laser with controlled laser power and frequency to induce porous graphene electrodes. The micromorphology of the blank PI film and the PI between electrodes are visualized by the scanning electron microscope, showing that the number of pore cracks on the surface of polyimide between the LIG electrodes increased significantly compared with that of blank PI film, which enhance the ionic conductivity of PI, thus increasing the sensitivity of the sensor. This work allows rapid and low-cost mass production of highly sensitive humidity sensors for applications such as smart agriculture and healthcare monitoring.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127868497","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Xinyu Liu, Chun Ho So, Yuxuan Xue, Yichen Wang, Jiawei Zhang, K. Lai, Ning Xi
{"title":"Real-time Stereoscopic Display of Atomic Force Microscopy Images for Nano Robotic Manipulation","authors":"Xinyu Liu, Chun Ho So, Yuxuan Xue, Yichen Wang, Jiawei Zhang, K. Lai, Ning Xi","doi":"10.1109/NEMS57332.2023.10190920","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190920","url":null,"abstract":"We developed a nano-operating system that features a stereoscopic display of AFM images that is updated in real time. In order to accurately judge the positional relationship between the nanoparticles and carry out operations, the operator is able to use this system to not only observe the change process of the nano-environment in real time while the AFM is operating, but also obtain depth information with the help of a real-time stereoscopic display. At the same time, we give the operator with a corresponding perspective in real time by obtaining the changes in the operator’s head posture. This helps to increase the sense of presence and improves operational efficiency.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131724396","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Detection of short peptides and dimers using silicon nitride nanopores","authors":"Peifu Bian, Lichun Zou, Haiyan Wang, Jingjie Sha","doi":"10.1109/NEMS57332.2023.10190884","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190884","url":null,"abstract":"Solid-state nanopores have previously been applied to the recognition and detection of DNA and proteins as a powerful tool for single-molecule detection. Here, we use silicon nitride nanopores to identify short peptides of six amino acids in length and their dimers. The experimental results show that the blocking current of the dimer is close to twice as large as that of the monomer. Due to the lower charge, the probability of the dimer passing through the pore at voltages below 100mV is low. In addition, the results of the mass spectrometry assay provide evidence for a translocation event of the short peptides and their dimers.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125392285","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A Wearable Brain-Computer Interface System based on Flexible and Air-Permeable Electronic Skin","authors":"Ze-Ming Xing, Tianrui Cui, Ying-Fen Zeng, Yezhou Yang, Tian-Ling Ren","doi":"10.1109/NEMS57332.2023.10190945","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190945","url":null,"abstract":"In this paper, a wearable brain-computer interface system based on flexible and air-permeable electronic skin is implemented. Wearable brain-computer interfaces need to be expanded into more aspects of daily life. Research in these areas requires devices that are closer to life. The flexible electronic skin has the advantages of high permeability (1.904 kg $cdot mathrm{m}^{-2} cdot$ day $^{-1}$ at body temperature) and low skin contact impedance ($4.683 mathrm{k} Omega$ at 1 kHz), and can be used to expand the research of single lead brain computer interface in the field of appetite. Because the orbitofrontal cortex plays an important role in food decisions, the device placed electrodes on the forehead to collect electrical signals from people when they were presented with images of different delicacies. Watching their brain activity as they made judgments about their food choices. Found that it was possible to distinguish between delicious pictures and boring ones. To look at the brain’ s attraction and rejection decisions when faced with food cues.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123793666","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Chaoming Gu, Zhoubin Yu, Zhi Ye, Xiaojie Li, C. Jin, Yang Liu, Xin Zhu, Zhen Cao, Xiao Yu
{"title":"Identification of Different Protein Molecules Using MoS2-Graphene Heterostructure Nanopores","authors":"Chaoming Gu, Zhoubin Yu, Zhi Ye, Xiaojie Li, C. Jin, Yang Liu, Xin Zhu, Zhen Cao, Xiao Yu","doi":"10.1109/NEMS57332.2023.10190969","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190969","url":null,"abstract":"MoS2-graphene heterostructure nanopores have shown the potential of detecting single protein molecules with high spatial resolution and slow translocation speed. In this work, we use this new type of nanopore to identify different protein molecules including bovine serum albumin (BSA) and Immunoglobulin G (IgG). The heterostructure nanopores are drilled by FIB and TEM with diameter of ~12 nm. The statistical and single-signal analyses of the single protein molecules translocation are conducted. The results demonstrate that due to stronger interaction with the heterostructure, IgG molecules have much longer dwell time than BSA, while the complete translocation of IgG becomes harder, leading to obvious lower current blockage. Our analysis indicates that heterostructure nanopores are capable of identifying and distinguishing different types of proteins.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121767268","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Crystan McLymore, Hen-Wei Huang, Blake R. Smith, David Werder, James D Byrne, Giovanni Traverso
{"title":"Real-Time In Situ Radiation Detection for Mitigating Injury to the Gastrointestinal Tract","authors":"Crystan McLymore, Hen-Wei Huang, Blake R. Smith, David Werder, James D Byrne, Giovanni Traverso","doi":"10.1109/NEMS57332.2023.10190941","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190941","url":null,"abstract":"Radiation therapy is a common cancer treatment method. However, injury to the gastrointestinal (GI) tract remains an unavoidable side effect, which reduces patient quality of life and increases healthcare costs. In vivo dosimetry is a treatment adaptation tool that helps reduce geometric setup uncertainties by providing real-time feedback on the patient’s absorbed dose in the local body area where the technology is positioned. Current in vivo dosimetry technology is limited to measurements in minimally invasive areas of the body. This work demonstrates the use of PIN diode-based capsule electronics placed internal to the GI tract for increased precision radiation monitoring. The diode was first characterized in vitro for response to gamma and X-ray radiation and to varying temperatures ranging from 20 °C to 40 °C. Various sources were employed for characterization, including Cesium, Cobalt, 320 kV X-ray irradiator, a thermal neutron beam sourced by a 5.7 MW nuclear reactor, and a therapeutic linear accelerator (LINAC) with 6, 10, and 18 MV beam qualities. The diode was then placed in a swine’s stomach to observe in vivo X-ray radiation detection. The diode showed repeatability within 3% during its detection of the tested range of gamma and X-ray intensities and energies. The LINAC characterization results show the diode to be energy-independent for absorbed doses below 3.0 Gy. As expected, radiation absorption by body tissue greatly influenced the differing results between the in vitro and in vivo studies. This study demonstrates successful, first-time in situ radiation detection directly from core body areas in a non-invasive manner. Clinical relevance— A real-time dosimeter, purposed for in vivo detection, has been characterized using pre-clinical and clinically used irradiators.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130371529","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}