一种用于单结构多轴MEMS惯性器件平面内测量的新型电极设计

2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2023-05-14 DOI:10.1109/NEMS57332.2023.10190870

Jianjun Ma, Bowen Xing, Jiayang Sun, Bin Zhou, Qi Wei, Rong Zhang

{"title":"一种用于单结构多轴MEMS惯性器件平面内测量的新型电极设计","authors":"Jianjun Ma, Bowen Xing, Jiayang Sun, Bin Zhou, Qi Wei, Rong Zhang","doi":"10.1109/NEMS57332.2023.10190870","DOIUrl":null,"url":null,"abstract":"In this paper, a novel electrodes design for in-plane measurement of single-structure quadruple mass multi-axis MEMS inertial devices is proposed to achieve the closed-loop x/y-axis acceleration measurement. The designed 45 ° tilting comb electrodes combine synovial comb electrodes and laminated comb electrodes and meet the same electrostatic force coefficient on quadruple mass, with structural symmetry design ensured. Theoretical formula is analyzed in detail, which provides guidance for simulation and design.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"348 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A novel electrodes design for in-plane measurement of single-structure multi-axis MEMS inertial devices\",\"authors\":\"Jianjun Ma, Bowen Xing, Jiayang Sun, Bin Zhou, Qi Wei, Rong Zhang\",\"doi\":\"10.1109/NEMS57332.2023.10190870\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, a novel electrodes design for in-plane measurement of single-structure quadruple mass multi-axis MEMS inertial devices is proposed to achieve the closed-loop x/y-axis acceleration measurement. The designed 45 ° tilting comb electrodes combine synovial comb electrodes and laminated comb electrodes and meet the same electrostatic force coefficient on quadruple mass, with structural symmetry design ensured. Theoretical formula is analyzed in detail, which provides guidance for simulation and design.\",\"PeriodicalId\":142575,\"journal\":{\"name\":\"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)\",\"volume\":\"348 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-05-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NEMS57332.2023.10190870\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS57332.2023.10190870","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

本文提出了一种用于单结构四重质量多轴MEMS惯性器件平面内测量的新型电极设计，以实现x/y轴加速度闭环测量。所设计的45°倾斜梳状电极结合了滑膜梳状电极和层状梳状电极，在四重质量上满足相同的静电力系数，保证了结构的对称设计。对理论公式进行了详细分析，为仿真和设计提供指导。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

A novel electrodes design for in-plane measurement of single-structure multi-axis MEMS inertial devices

In this paper, a novel electrodes design for in-plane measurement of single-structure quadruple mass multi-axis MEMS inertial devices is proposed to achieve the closed-loop x/y-axis acceleration measurement. The designed 45 ° tilting comb electrodes combine synovial comb electrodes and laminated comb electrodes and meet the same electrostatic force coefficient on quadruple mass, with structural symmetry design ensured. Theoretical formula is analyzed in detail, which provides guidance for simulation and design.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

自引率

0.00%

发文量