{"title":"Highly sensitive structures for ultrasonic microsensors by buckling control of diaphragms through intrinsic stress of PZT films","authors":"K. Yamashita, Hikaru Tanaka, M. Noda","doi":"10.1109/ICSENS.2014.6984944","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6984944","url":null,"abstract":"Highly sensitive structures for ultrasonic microsensors have been easily achieved by controlling buckling behavior of the sensor diaphragms through intrinsic stress of sol-gel derived piezoelectric lead-zirconate-titanate (PZT) films. Upward buckled diaphragms are necessary for the high sensitivity, and were previously fabricated through two-step PZT formation process to prevent the diaphragms from being flattened due to a strong tension caused by tensile stress of PZT. In this work a new preparation process has been used for a low stress PZT in order to simplify the fabrication process to one-step PZT formation, and has yielded twice as large buckling deflection as previous sensors on the upward buckled diaphragms.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"11 1","pages":"106-109"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87007540","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Michael V. Lee, A. Baraket, N. Zine, N. Jaffrezic‐Renault, A. Errachid, M. López-Martínez, J. Esteve, J. Plaza, N. Ahmed, A. Elaissari
{"title":"Integration of PDMS microfilters and micromixers bonded onto APTES-functionalized polymeric films for size sorting and mixing of microparticles","authors":"Michael V. Lee, A. Baraket, N. Zine, N. Jaffrezic‐Renault, A. Errachid, M. López-Martínez, J. Esteve, J. Plaza, N. Ahmed, A. Elaissari","doi":"10.1109/ICSENS.2014.6985347","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985347","url":null,"abstract":"In this work, 3-(aminopropyl)triethoxysilane (APTES) was applied to functionalize flexible non-porous polymer substrates of polyimide (PI), polyethylene naphthalate (PEN), and polyethylene terephthalate (PET) that were bonded onto oxygen activated poly(dimethylsiloxane) (PDMS) microfiltering and micromixer devices. The feasibility of filtering using pillar filters was observable with poly(lactic-co-glycolic acid) (PLGA) microparticles (MPS), followed by the mixing capabilities of the micromixer with MPS in poly(vinyl alcohol) (MPS-PVA). A mixing performance of 17.6 % at 5 mm was observed. Finally, the PDMS microfilter was connected to the PDMS micromixer for filtration of MPS with dimensions of <; 11 μm. Those particles which were smaller then entered into the mixer and a mixing performance of 62.5% at 3 mm was observed. To our knowledge, we have exhibited the first complex PDMS microfilter and micromixer that has been integrated for MPS size sorting and mixing based on PI, PEN, and PET. These results demonstrate the development of microfluidic components using APTES for PDMS-thermoplastic film bonding that is based on a simple connection for lab-on-a-chip (LoC) devices where real samples require filtering and mixing of particles or suspensions.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"63 1","pages":"1691-1694"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85770503","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
V. Bharathwaj, A. Markan, M. Atrey, H. Neumann, R. Ramalingam
{"title":"Fiber Bragg Gratings for distributed cryogenic temperature measurement in a tube in tube helically coiled heat exchanger","authors":"V. Bharathwaj, A. Markan, M. Atrey, H. Neumann, R. Ramalingam","doi":"10.1109/ICSENS.2014.6985308","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985308","url":null,"abstract":"A novel technique to measure the cryogenic temperature distribution of a helically coiled Tube-in-Tube (TIT) heat exchanger using Fiber Bragg Grating (FBG) array has been reported. The measured temperature distribution will help in estimating the heat exchanger efficiency and will be used to investigate its performance. The measurement of the temperature distribution has previously only been simulated, as using a standard temperature sensor would inadvertently hamper the flow. This issue can be solved by using a small sized FBG sensor array. In this paper, the principle, design and installation of sensors are explained and the initial experiments are carried out to demonstrate the measurement technique. The experimentally measured temperature distribution was found to be agreeable with the simulated values with minor deviations.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"12 1","pages":"1535-1538"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88830191","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Low power wireless human detector utilizing thermopile infrared array sensor","authors":"J. Tanaka, H. Imamoto, T. Seki, M. Oba","doi":"10.1109/ICSENS.2014.6985035","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985035","url":null,"abstract":"This paper describes the low power consumption wireless human detector which can monitor wide area. We have developed the S-shaped thermopile infrared sensor element by utilizing micro-electro-mechanical-systems (MEMS) technology. The developed thermopile infrared array sensor achieved high temperature resolution and fast response time. Number of human who exists in the detection area is simply detected by the human detection process using temperature outputs from the thermopile infrared array sensor.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"50 1","pages":"462-465"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89028868","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
B. Eminoglu, M. Kline, I. Izyumin, Y. Yeh, B. Boser
{"title":"Background calibrated MEMS gyroscope","authors":"B. Eminoglu, M. Kline, I. Izyumin, Y. Yeh, B. Boser","doi":"10.1109/ICSENS.2014.6985152","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985152","url":null,"abstract":"Background calibration is used to reduce three dominant error sources in MEMS gyroscopes over manufacturing variations, temperature, and aging. (1) Measuring the ratio of the change in the oscillation frequency to a calibration signal in the drive channel cancels scale factor errors and drift. (2) Tracking of the velocity-force phase relationship suppresses leakage of the quadrature error into the rate output. (3) Continuous monitoring of the drive signal is employed to reduce errors that are in-phase with the Coriolis signal including anisotropic damping and electrical feedthrough. In combination, the three error cancellation techniques reduce the Allan Variance of an experimental device from 6.6deg/hr to 1deg/hr at 400s averaging time and from 5.7deg/hr to 2deg/hr at 3200s. The temperature sensitivity of the bias decreases from 32mdeg/s/C to 8mdeg/s/C. Scale factor variations over 12 days are reduced from 547ppm p-p to 23ppm p-p, and temperature coefficient of the scale factor is reduced from 560ppm/C to 4ppm/C at room temperature.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"2016 1","pages":"922-925"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86486596","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Contact resistance, stiction force, and field-assisted growth and migration in MEMS and NEMS metals","authors":"M. Tabib-Azar, Nazmul Hassan, H. Pourzand, P. Pai","doi":"10.1109/ICSENS.2014.6985165","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985165","url":null,"abstract":"Contact resistance and its evolution are important parameters that determine the useful lifetime of MEMS switches. This work investigates the stiction force and evolution of contact resistance for five different metals (iridium, tungsten, nickel, ruthenium, and platinum). A Pt AFM probe was used as the counter electrode and the contact resistance over 100,000 cycles in nitrogen were recorded. Although this is small number of cycles compared to the desired 1 quadrillion cycles, it reveals a great deal about the contact quality provided that very small changes in the contact resistance are monitored and analyzed. Tungsten showed the largest increase in the contact resistance of 4% that was attributed to its surface anodic oxidation as imaged with AFM. We also used an infrared camera to monitor the contact temperature and noted a small flash of light when the probe touched the surface. Heating and the nano-plasma deposits carbonous materials on the metal contact area increasing contact resistance.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"69 1","pages":"974-977"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81194556","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"CMOS SC-spinning, current-feedback hall sensor for high speed and low cost applications","authors":"Tiger Chang, K. Juang","doi":"10.1109/ICSENS.2014.6985051","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985051","url":null,"abstract":"A low cost, high speed Hall sensor for motor application is presented. The Hall sensor, its signal conditioning amplifier, Hall plate and Hall biasing circuit are fully integrated in a single chip. The Hall device is a single plate configuration made by only standard mask process for low cost feature. The signal conditioning amplifier applied the noise shaping and offset filtering by chopping technique, also designed by current-feedback approach to broaden its operational speed. The Hall biasing circuit designed by proposed signal-chopped spinning current method (sc-spinning current) to combine spinning current and chopping signal into Hall biasing circuit, which ease feed-forward path design and decrease the poles in signal path. The Hall sensor has typical offset of 600 nV. The sensing speed can operate more than 400kHz operation bandwidth.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"1 1","pages":"527-530"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81234723","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Tajiri, S. Matsumoto, T. Imato, T. Okamoto, M. Haraguchi
{"title":"Characteristics of whispering gallery mode in microsphere covered antigen-antibody layer at attenuated-total-reflection configuration","authors":"T. Tajiri, S. Matsumoto, T. Imato, T. Okamoto, M. Haraguchi","doi":"10.1109/ICSENS.2014.6985080","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985080","url":null,"abstract":"Microresonators have attracted attention over the past few years because label-free optical biosensors base on them have potential in pathogen virus and healthcare and pharmaceuticals and the food industry. Whispering gallery mode (WGM) microresonators have advantages of an ultra-high Q-factors and a mass production capability of a sensor chip. This work presents a variation of WGM spectra depending on each antibody and antigen bound to a polystyrene microsphere, which allowed us to evaluate optically the thickness and the refractive index of the antigen antibody layer from a shift of the WGM spectra peak. Furthermore, the split variation of the WGM spectra peak by the adsorption of the antigen antibody was evaluated by polarization and the excitation position. The split variation of the scattered light peak depended on the direction circumnavigating microsphere.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"14 1","pages":"641-644"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84839034","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
M. L. Rodriguez-Mendez, C. Medina-Plaza, C. García-Hernández, J. Saja, J. Fernández-Escudero, E. Barajas-Tola, G. Medrano
{"title":"Analysis of grapes and wines using a voltammetric bioelectronic tongue: Correlation with the phenolic and sugar content","authors":"M. L. Rodriguez-Mendez, C. Medina-Plaza, C. García-Hernández, J. Saja, J. Fernández-Escudero, E. Barajas-Tola, G. Medrano","doi":"10.1109/ICSENS.2014.6985461","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985461","url":null,"abstract":"Arrays of voltammetric sensors and biosensors based on phthalocyanines have been developed and used to analyze wines and grapes. Nanostructured sensors prepared by the Langmuir-Blodgett (LB), Layer by Layer (LbL) or electro-deposition are superior because the high number of active sites. The LB and the LbL techniques can be used to co-deposit electrocatalytic materials to obtain a synergistic electrocatalytic effect. Moreover, LB and LbL can be used to immobilize enzymes in a biomimetic structure formed by amphiphilic lipids. Such sensors show an enhanced selectivity. The presence of phthalocyanines as electron mediators improves the performance of the sensors. Combining sensors and biosensors in the same array provides the advantages of classical phthalocyanine based-sensors, with the specificity of the enzyme-substrate reaction typical of biosensors. The selectivity of the electronic tongue and its capability of discrimination are clearly improved when biosensors containing glucose oxidase or tyrosinase are included in the array.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"1 1","pages":"2139-2142"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90872645","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Renan Serra, Pascal Di Croce, Richard Peres, D. Knittel
{"title":"Human step detection from a piezoelectric polymer floor sensor using normalization algorithms","authors":"Renan Serra, Pascal Di Croce, Richard Peres, D. Knittel","doi":"10.1109/ICSENS.2014.6985216","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985216","url":null,"abstract":"Today, walking trajectory analysis or event detection gained a lot of interest in healthcare environments to prevent pathologies or gait deviations. However, to correctly study the gait of someone is difficult since it generally requires expensive systems that are difficult to implement. In the work presented herein, we propose another approach to retrieve information from a sensor area. As usual gait analysis systems comprise numerous sensors and provide spatial pressure resolution maps of footsteps over a small area; our system gives a signature generated by a single piezoelectric sensor only. The signal delivered by the sensor goes through a normalization calculation process giving a signal which can be compared to a reference signal. A Pearson product-moment correlation coefficient (PPMCC) is determined between the two signals giving a shape similarity indicator. We achieved similarity indicators greater than 95%. It is the first time that this correlation is applied in the field of human step detection.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"8 1","pages":"1169-1172"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89305428","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}