{"title":"Highly sensitive structures for ultrasonic microsensors by buckling control of diaphragms through intrinsic stress of PZT films","authors":"K. Yamashita, Hikaru Tanaka, M. Noda","doi":"10.1109/ICSENS.2014.6984944","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6984944","url":null,"abstract":"Highly sensitive structures for ultrasonic microsensors have been easily achieved by controlling buckling behavior of the sensor diaphragms through intrinsic stress of sol-gel derived piezoelectric lead-zirconate-titanate (PZT) films. Upward buckled diaphragms are necessary for the high sensitivity, and were previously fabricated through two-step PZT formation process to prevent the diaphragms from being flattened due to a strong tension caused by tensile stress of PZT. In this work a new preparation process has been used for a low stress PZT in order to simplify the fabrication process to one-step PZT formation, and has yielded twice as large buckling deflection as previous sensors on the upward buckled diaphragms.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"11 1","pages":"106-109"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87007540","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Michael V. Lee, A. Baraket, N. Zine, N. Jaffrezic‐Renault, A. Errachid, M. López-Martínez, J. Esteve, J. Plaza, N. Ahmed, A. Elaissari
{"title":"Integration of PDMS microfilters and micromixers bonded onto APTES-functionalized polymeric films for size sorting and mixing of microparticles","authors":"Michael V. Lee, A. Baraket, N. Zine, N. Jaffrezic‐Renault, A. Errachid, M. López-Martínez, J. Esteve, J. Plaza, N. Ahmed, A. Elaissari","doi":"10.1109/ICSENS.2014.6985347","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985347","url":null,"abstract":"In this work, 3-(aminopropyl)triethoxysilane (APTES) was applied to functionalize flexible non-porous polymer substrates of polyimide (PI), polyethylene naphthalate (PEN), and polyethylene terephthalate (PET) that were bonded onto oxygen activated poly(dimethylsiloxane) (PDMS) microfiltering and micromixer devices. The feasibility of filtering using pillar filters was observable with poly(lactic-co-glycolic acid) (PLGA) microparticles (MPS), followed by the mixing capabilities of the micromixer with MPS in poly(vinyl alcohol) (MPS-PVA). A mixing performance of 17.6 % at 5 mm was observed. Finally, the PDMS microfilter was connected to the PDMS micromixer for filtration of MPS with dimensions of <; 11 μm. Those particles which were smaller then entered into the mixer and a mixing performance of 62.5% at 3 mm was observed. To our knowledge, we have exhibited the first complex PDMS microfilter and micromixer that has been integrated for MPS size sorting and mixing based on PI, PEN, and PET. These results demonstrate the development of microfluidic components using APTES for PDMS-thermoplastic film bonding that is based on a simple connection for lab-on-a-chip (LoC) devices where real samples require filtering and mixing of particles or suspensions.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"63 1","pages":"1691-1694"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85770503","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Eshkeiti, S. Emamian, Sai G. R. Avathu, B. B. Narakathu, Michael Joyce, M. Joyce, B. Bazuin, M. Atashbar
{"title":"Screen printed flexible capacitive pressure sensor","authors":"A. Eshkeiti, S. Emamian, Sai G. R. Avathu, B. B. Narakathu, Michael Joyce, M. Joyce, B. Bazuin, M. Atashbar","doi":"10.1109/ICSENS.2014.6985222","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985222","url":null,"abstract":"A novel flexible fully printed capacitive based pressure sensor was designed and fabricated using screen printing technique. Silver (Ag) ink and polydimethylsiloxane (PDMS) were printed on a flexible polyethylene terephthalate (PET) substrate as metallization and dielectric layers, respectively. The capacitive response of the sensor demonstrated a percentage change of 1 % and 3.6 % for compressive forces of 0.2 MPa and 2.4 MPa, respectively when compared to the base capacitance. The response of the pressure sensor is analyzed and presented in this paper.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"20 1","pages":"1192-1195"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73645730","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Farah Al-Naimi, Malcolm Spain, P. Helfenstein, Taepyeong Kim, Yong-Won Lee, Si Hoon Lee, G. Rughoobur, L. Garcia-Gancedo, A. Flewitt
{"title":"Investigation of polymer deposition techniques on a Solidly Mounted Resonator arrays for vapour sensing","authors":"Farah Al-Naimi, Malcolm Spain, P. Helfenstein, Taepyeong Kim, Yong-Won Lee, Si Hoon Lee, G. Rughoobur, L. Garcia-Gancedo, A. Flewitt","doi":"10.1109/ICSENS.2014.6984968","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6984968","url":null,"abstract":"In this work we fabricate and test arrays of Solidly Mounted Resonators (SMRs), which are normally used in RF filters, to make gravimetric vapour sensing system. Each of the SMRs in the array are made to be chemically sensitive using commercially available polymers deposited on the active areas of the resonators using three different deposition techniques, namely needle dispensing, spraying and inkjet printing. Of the three methods, it was found that inkjet printing is the most effective as it can be used with a wide variety of solutions deposited with a good degree of accuracy. Three solvent vapours were used to test chips with polymers deposited using the 3 techniques and the selectivity results are shared.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"236 1","pages":"202-205"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72563563","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Thermal method of gas separation with micro-pores","authors":"S. Nakaye, H. Sugimoto, N. Gupta, Y. Gianchandani","doi":"10.1109/ICSENS.2014.6985124","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985124","url":null,"abstract":"A method of gas separation that exploits thermal transpiration across micro-pores is proposed. The structure of the separation element is comprised simply of a porous membrane and one channel along each of the two surfaces of the membrane. A temperature and pressure difference is applied across the membrane. This paper reports the first experiments that show binary mixtures of noble gases can be separated by the proposed method. Up to 15% mole percentage variation is observed using 30×30 mm2 sized mixed cellulose ester porous membrane with 45K temperature difference and 2kPa pressure difference. The experimental results match well with numerical results reported previously. Using numerical simulations, it is also shown for the first time that a concentration variation can be induced using the same structure while providing only a temperature difference.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"232 1","pages":"815-818"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72752580","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. Baglio, L. Cantelli, F. Giusa, G. Muscato, A. Noto
{"title":"A novel smart prodder with sensor feedback for material recognition in Humanitarian Demining applications","authors":"S. Baglio, L. Cantelli, F. Giusa, G. Muscato, A. Noto","doi":"10.1109/ICSENS.2014.6985115","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985115","url":null,"abstract":"In this work a smart prodder, capable to give information about the material of a touched unknown object, is presented. The recognition process is based on the analysis of the interaction between a sensing unit and the object. The surface of the object is excited by a piezoelectric actuator and its response measured with another piezoelectric sensor. A prototype has been designed and built and experimental trials have been performed.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"87 1","pages":"779-782"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74542095","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Contact resistance, stiction force, and field-assisted growth and migration in MEMS and NEMS metals","authors":"M. Tabib-Azar, Nazmul Hassan, H. Pourzand, P. Pai","doi":"10.1109/ICSENS.2014.6985165","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985165","url":null,"abstract":"Contact resistance and its evolution are important parameters that determine the useful lifetime of MEMS switches. This work investigates the stiction force and evolution of contact resistance for five different metals (iridium, tungsten, nickel, ruthenium, and platinum). A Pt AFM probe was used as the counter electrode and the contact resistance over 100,000 cycles in nitrogen were recorded. Although this is small number of cycles compared to the desired 1 quadrillion cycles, it reveals a great deal about the contact quality provided that very small changes in the contact resistance are monitored and analyzed. Tungsten showed the largest increase in the contact resistance of 4% that was attributed to its surface anodic oxidation as imaged with AFM. We also used an infrared camera to monitor the contact temperature and noted a small flash of light when the probe touched the surface. Heating and the nano-plasma deposits carbonous materials on the metal contact area increasing contact resistance.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"69 1","pages":"974-977"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81194556","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
M. Mansoor, I. Haneef, S. Akhtar, M. Rafiq, S. Z. Ali, F. Udrea
{"title":"SOI CMOS multi-sensors MEMS chip for aerospace applications","authors":"M. Mansoor, I. Haneef, S. Akhtar, M. Rafiq, S. Z. Ali, F. Udrea","doi":"10.1109/ICSENS.2014.6985225","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985225","url":null,"abstract":"In this paper, we report for the first time an SOI CMOS multi-sensors MEMS chip, capable of sensing three key flow parameters i.e. pressure, temperature and flow rate simultaneously. The chip contains an array of ten silicon diode temperature sensors, a piezoresistive pressure sensor and an array of nine micro hot-film flow rate sensors. The chip has been fabricated through a commercial CMOS foundry. The sensors have been embedded in thin oxide membranes that were obtained through a single, post-CMOS DRIE (deep reactive ion etching) back-etch step at the foundry. Characterization of each type of sensor was carried out using independent calibration setups. Temperature sensors exhibited a sensitivity of 1.6 mV/ °C at 1μA constant current in forward bias mode. Pressure sensor showed a sensitivity of 0.4734 mV/V/psi whereas the flow rate sensors showed typical third order calibration curve once operated in constant current mode. The chip can be used in micro-channels for micro-fluidic applications as well as on real aerodynamic surfaces and wind tunnel models for experimental verification of CFD results.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"34 1","pages":"1204-1207"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83189233","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
C. Silvestri, P. Picciafoco, B. Morana, F. Santagata, G. Zhang, P. Sarro
{"title":"Electro-thermal simulation and characterization of vertically aligned CNTs directly grown on a suspended microhoplate for thermal management applications","authors":"C. Silvestri, P. Picciafoco, B. Morana, F. Santagata, G. Zhang, P. Sarro","doi":"10.1109/ICSENS.2014.6985127","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985127","url":null,"abstract":"Carbon related material, like carbon nanotubes (CNTs) or graphene have recently attracted significant attention for thermal management applications. The estimation of the thermal properties of nanomaterials, necessary to optimize their employment as heat exchanger material, is still a big challenge. In this paper we present a novel approach to evaluate the thermal performance of vertically aligned CNTs bundle, directly grown on top of a suspended microhotplate. The power consumption of the fabricated device has been recorded in air and in vacuum, so to determine the magnitude of each possible thermal loss path. Moreover, electro-thermal simulations (finite element modelling) have been carried out, to assess our experimental results and to generate a valuable instrument for the design of custom fit geometrical configurations for specific power dissipation constrains. Simulations are in good agreement with the experimental results over the entire temperature range. In particular, for the CNTs bundle sample, a mismatch of 14% and 7% between simulation and measurements is recorded in vacuum and air respectively.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"9 1","pages":"827-830"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89631718","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Low power wireless human detector utilizing thermopile infrared array sensor","authors":"J. Tanaka, H. Imamoto, T. Seki, M. Oba","doi":"10.1109/ICSENS.2014.6985035","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985035","url":null,"abstract":"This paper describes the low power consumption wireless human detector which can monitor wide area. We have developed the S-shaped thermopile infrared sensor element by utilizing micro-electro-mechanical-systems (MEMS) technology. The developed thermopile infrared array sensor achieved high temperature resolution and fast response time. Number of human who exists in the detection area is simply detected by the human detection process using temperature outputs from the thermopile infrared array sensor.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"50 1","pages":"462-465"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89028868","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}