Modeling Aspects in Optical Metrology IX最新文献

Optical measurements and numerical simulations of the Mueller matrix at silicon nanowire structures 硅纳米线结构米勒矩阵的光学测量和数值模拟

Modeling Aspects in Optical Metrology IX Pub Date : 2023-08-23 DOI: 10.1117/12.2673770

J. Grundmann, T. Käseberg, B. Bodermann

引用次数: 0

Advanced in situ metrology for large aperture flat mirrors 先进的大口径平面镜原位测量技术

Modeling Aspects in Optical Metrology IX Pub Date : 2023-08-23 DOI: 10.1117/12.2673949

E. Qi, Hai Hu, Xiao Luo, Zhenyu Liu

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Realization of subsampling schemes for compressive nano-FTIR imaging 压缩纳米ftir成像的子采样方案实现

Modeling Aspects in Optical Metrology IX Pub Date : 2023-08-23 DOI: 10.1117/12.2672558

D. Siebenkotten, M. Marschall, G. Wübbeler, A. Hoehl, E. Rühl, C. Elster, B. Kästner

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On aberration retrieval for optical microscopes in length metrology 长度计量中光学显微镜像差的提取

Modeling Aspects in Optical Metrology IX Pub Date : 2023-08-23 DOI: 10.1117/12.2672294

J. Krüger, B. Bodermann, R. Köning, P. Manley, L. Zschiedrich, Philipp‐Immanuel Schneider, A. Heinrich, C. Eder, Ulrike Zeiser, Aksel Goehnermeier

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Simulating achromatic plasmonic lenses with inverted design for improved nano-optics 模拟消色差等离子体透镜的倒置设计改进纳米光学

Modeling Aspects in Optical Metrology IX Pub Date : 2023-08-23 DOI: 10.1117/12.2673769

T. Käseberg, S. Kroker, B. Bodermann

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Forward simulation of coherent beams on grating structures for coherent scatterometry 相干散射测量中光栅结构上相干光束的正演模拟

Modeling Aspects in Optical Metrology IX Pub Date : 2023-08-23 DOI: 10.1117/12.2673231

M. Hammerschmidt, L. Zschiedrich, L. Šiaudinytė, P. Manley, Philipp‐Immanuel Schneider, S. Burger

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引用次数: 0

Systematic influence of line edge roughness on the line width measured by scatterometry 线边缘粗糙度对散射法测量的线宽的系统影响

Modeling Aspects in Optical Metrology IX Pub Date : 2023-08-23 DOI: 10.1117/12.2675801

T. Siefke, S. Heidenreich

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Efficient simulation of microscopic imaging for reconstruction of nanostructures 纳米结构重建中显微成像的高效模拟

Modeling Aspects in Optical Metrology IX Pub Date : 2023-08-23 DOI: 10.1117/12.2673077

P. Manley, J. Krüger, B. Bodermann, R. Köning, A. Heinrich, C. Eder, Aksel Goehnermeier, Ulrike Zeiser, M. Hammerschmidt, L. Zschiedrich, Philipp‐Immanuel Schneider

引用次数: 0

Efficient reconstruction of model parameters using Bayesian target-vector optimization 利用贝叶斯目标向量优化高效重建模型参数

Modeling Aspects in Optical Metrology IX Pub Date : 2023-08-23 DOI: 10.1117/12.2673590

Matthias Plock, Sven Burger, Philipp‐Immanuel Schneider

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Results of uncertainty evaluation on the thickness and refractive index spectrum measurement of silicon dioxide thin film layer using a spectroscopic ellipsometer 光谱椭偏仪测量二氧化硅薄膜层厚度和折射率光谱的不确定度评定结果

Modeling Aspects in Optical Metrology IX Pub Date : 2023-08-10 DOI: 10.1117/12.2673375

Y. Cho, W. Chegal, Junho Choi

引用次数: 0