Jae-Beom Kim, Jaehun Jeon, Kyungmin Hwang, D. Kim, K. Jeong
{"title":"Objective-lens-free confocal endomicroscope using Lissajous scanning lensed-fiber","authors":"Jae-Beom Kim, Jaehun Jeon, Kyungmin Hwang, D. Kim, K. Jeong","doi":"10.1117/1.JOM.1.3.034501","DOIUrl":"https://doi.org/10.1117/1.JOM.1.3.034501","url":null,"abstract":"Abstract. We report an objective-lens-free endomicroscopic catheter for compact Lissajous scanned confocal endomicroscopic system using a scanning lensed-fiber. The fiber scanner comprises a single-mode fiber (SMF) spliced with a coreless silica fiber segment and quadrupole piezoelectric tube. An objective lens was directly formed at the distal end of an SMF using a fusion splicer. The lensed fiber eliminates the need for conventional beam focusing elements such as a gradient index rod lens and precise optical alignment, allowing low cost and facile fabrication of an exceptionally short endomicroscopic catheter. The endomicroscopic scanner was fully packaged within a stainless tube of 2.6 mm in outer diameter and 20 mm in length, which can be easily inserted through the working channel of conventional laparoscope or colonoscope. The microscopic images of a stained kidney section and ear of a mouse were successfully obtained with the Lissajous scanning confocal endomicroscope. The compact Lissajous scanning lensed fiber can provide a new route for diverse in vivo endomicroscopic applications.","PeriodicalId":127363,"journal":{"name":"Journal of Optical Microsystems","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115632139","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
H. Schröder, J. Schwietering, G. Böttger, V. Zamora
{"title":"Hybrid photonic system integration using thin glass platform technology","authors":"H. Schröder, J. Schwietering, G. Böttger, V. Zamora","doi":"10.1117/1.JOM.1.3.033501","DOIUrl":"https://doi.org/10.1117/1.JOM.1.3.033501","url":null,"abstract":"Abstract. Demand for high integration of optoelectronic and micro-optical components into micro-electronic systems for communication, computing, medical, and sensing applications is increasing. Advanced hybrid packaging technologies are used to enhance glass-based substrates featuring electrical, thermal, and optical functionalities with laser diodes, modulators, isolators, photonic integrated circuits (PIC), beam-splitting components, and micro-lenses. Such glass-based substrates can be thin glass layers on large panels or more mini-bench-like boards that can be embedded into organic printed circuit boards (PCBs). Optical fiber interconnects, connectors, and electrical–optical integration platforms are used for higher level system integration and need to be miniaturized on module and board level to fulfill decreasing channel pitch requirements. We provide background on and discuss thin glass as a suitable base material for ion exchanged waveguide panels and interposers, precise glass structuring for posts and holders, the related high precision assembly techniques, and advanced fiber interconnects. Some examples of PCB photonic integration, micro-bench optical sub-assemblies, including PIC, and 3D optical resonator packages that combine most of these approaches will be shown.","PeriodicalId":127363,"journal":{"name":"Journal of Optical Microsystems","volume":"78 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128805605","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Heterogeneously integrated III–V-on-Si microring resonators: a building block for programmable photonic integrated circuits","authors":"Jiayang Li, B. Tan, M. Tian, A. Poon","doi":"10.1117/1.JOM.1.3.034002","DOIUrl":"https://doi.org/10.1117/1.JOM.1.3.034002","url":null,"abstract":"Abstract. Beyond various application-specific photonic integrated circuits (PICs), a programmable PIC comprising identically designed generic building blocks with multiple active functionalities under different operational conditions is an attractive design option. Here, we propose and demonstrate proof-of-concept experiments of a heterogeneously integrated III–V-on-Si microring resonator (MRR) as such a versatile building block. The MRR can function as an electro-optical channel add-drop switch with signal amplification, a directly modulated injection laser, or a microcavity photodetector under different electrical bias conditions. We discuss the fabrication process for our heterogeneous integration platform based on an atomic layer deposition-assisted molecular bonding technique.","PeriodicalId":127363,"journal":{"name":"Journal of Optical Microsystems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129971937","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Co-planar light-actuated optoelectrowetting microfluidic device for droplet manipulation","authors":"Jodi Loo, S. Pei, Ming C. Wu","doi":"10.1117/1.JOM.1.3.034001","DOIUrl":"https://doi.org/10.1117/1.JOM.1.3.034001","url":null,"abstract":"Abstract. We report on a co-planar light-actuated digital microfluidics device that features a metal mesh grid integrated on the device surface to allow droplets to be exposed from above. We discuss a theoretical circuit model for our co-planar optoelectrowetting (OEW) design that allows for the optimization of droplet actuation while maintaining reliable droplet movement. Basic droplet manipulations such as merging and parallel actuation of droplets are achieved at speeds of up to 4.5 cm / s. The co-planar OEW device design benefits from having an open top design that allows for a wider range of system integration configurations than previous generations of OEW devices. A droplet-on-demand dispensing system from above is integrated with the co-planar OEW device to demonstrate the versatility of this optofluidic platform. The ability to inject, collect, and position individual droplets to form large-scale droplet arrays of up to 20 × 20 is achieved.","PeriodicalId":127363,"journal":{"name":"Journal of Optical Microsystems","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-05-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114242719","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
F. Behague, V. Calero, A. Coste, A. Godet, M. Suarez, G. Gaborit, L. Duvillaret, F. Baida, M. Bernal, N. Courjal
{"title":"Minimally invasive optical sensors for microwave-electric-field exposure measurements","authors":"F. Behague, V. Calero, A. Coste, A. Godet, M. Suarez, G. Gaborit, L. Duvillaret, F. Baida, M. Bernal, N. Courjal","doi":"10.1117/1.JOM.1.2.020902","DOIUrl":"https://doi.org/10.1117/1.JOM.1.2.020902","url":null,"abstract":"Abstract. The measurement of microwave electric-field (E-field) exposure is an ever-evolving subject that has recently led the International Commission on Non-Ionizing Radiation Protection to change its recommendations. With frequencies increasing toward terahertz (THz), stimulated by 5G deployment, the measurement specifications reveal ever more demanding challenges in terms of bandwidth (BW) and miniaturization. We propose a focus on minimally invasive E-field sensors, which are crucial for the in situ and near-field characterization of E-fields both in harsh environments such as plasmas and in the vicinity of emitters. We browse the large varieties of measurement devices, among which the electro-optic (EO) probes stand out for their potential of high BW up to THz, minimal invasiveness, and ability of vector measurements. We describe and compare the three main categories of EO sensors, from bulk systems to nanoprobes. First, we show how bulk-sensors have evolved toward attractive fibered systems that are advantageously employed in plasmas, resonance magnetic imagings chambers or for radiation-pattern imaging up to THz frequencies. Then we describe how the integration of waveguides helps to gain robustness, lateral resolution, and sensitivity. The third part is dedicated to the ultra-miniaturization of components allowing ultimate steps toward electromagnetic invisibility. This review aims at pointing out the recent evolutions over the past 10 years, with a highlight on the specificities of each photonic architecture. It also shows the way to future multi-physics and multi-arrays smart sensing platforms.","PeriodicalId":127363,"journal":{"name":"Journal of Optical Microsystems","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124055204","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Wenjie Wang, Florian Lemke, M. Wapler, U. Wallrabe, J. Czarske, N. Koukourakis
{"title":"3D-scanning microscopy with adaptive lenses and prisms for zebrafish studies","authors":"Wenjie Wang, Florian Lemke, M. Wapler, U. Wallrabe, J. Czarske, N. Koukourakis","doi":"10.1117/1.JOM.1.2.024501","DOIUrl":"https://doi.org/10.1117/1.JOM.1.2.024501","url":null,"abstract":"Abstract. Point-scanning-based microscopy systems require combination of axial and lateral scanning to obtain three-dimensional (3D) data. Axial scanning was commonly achieved by mechanical displacement of the objective or the sample. To improve, various adaptive lens-based solutions have been reported to circumvent the need for mechanically moving parts. The lateral scanning is predominantly implemented using galvanometric mirrors. Although the performance of such devices is flawless, they require bulky, folded beam-paths that make their incorporation in compact hand-held devices challenging. Recently, we introduced an adaptive prism as a transmissive device that enables lateral scanning. We demonstrate the first all-adaptive 3D scanning in laser scanning microscopes employing a compact in-line transmission geometry without mechanically moving parts and beam folding, combining an adaptive lens and a novel adaptive prism. Characterization of the all-adaptive microscope performance shows a lateral tuning range of approximately X = Y = 130 μm and an axial tuning range of about Z = 500 μm. We successfully demonstrate 3D raster scanning of the fluorescence of a thyroid of a zebrafish embryo.","PeriodicalId":127363,"journal":{"name":"Journal of Optical Microsystems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130718389","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Sangyoon Han, J. Béguelin, Lane Ochikubo, John Jacobs, T. J. Seok, Kyoungsik Yu, N. Quack, Chang-Kyu Kim, R. Muller, Ming C. Wu
{"title":"32 × 32 silicon photonic MEMS switch with gap-adjustable directional couplers fabricated in commercial CMOS foundry","authors":"Sangyoon Han, J. Béguelin, Lane Ochikubo, John Jacobs, T. J. Seok, Kyoungsik Yu, N. Quack, Chang-Kyu Kim, R. Muller, Ming C. Wu","doi":"10.1117/1.JOM.1.2.024003","DOIUrl":"https://doi.org/10.1117/1.JOM.1.2.024003","url":null,"abstract":"Abstract. We report on a 32 × 32 silicon photonic micro-electro-mechanical-system (MEMS) switch with gap-adjustable directional couplers. The switch is fabricated on 200-mm silicon-on-insulator wafers in a commercial complementary metal-oxide-semiconductor (CMOS) foundry. The fabricated device has a maximum on-chip loss of 7.7 dB and an extinction ratio of 50.8 dB. The switching voltage is 9.45 V and the 20-dB bandwidth is 28.7 nm. Our work shows a promising path for mass production of silicon photonic MEMS switches in commercial CMOS foundries.","PeriodicalId":127363,"journal":{"name":"Journal of Optical Microsystems","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126511469","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Tellurite glass microcavity resonators integrated on a silicon photonics platform","authors":"H. Frankis, Dawson B. Bonneville, J. Bradley","doi":"10.1117/1.JOM.1.2.024002","DOIUrl":"https://doi.org/10.1117/1.JOM.1.2.024002","url":null,"abstract":"Abstract. We report on the design and measurement of tellurium oxide microcavity resonators coupled to silicon bus waveguides on silicon photonic chips. The resonators are fabricated using a standard silicon photonics foundry processing flow in which the SiO2 top-cladding is etched in a ring shape and aligned next to a silicon bus waveguide. The resulting microtrench is coated in a tellurium oxide film by reactive sputtering in a post-processing step to form the waveguiding layer of the resonator. A 100-μm radius trench with a 1115-nm-thick TeO2 film is measured to have an internal Q factor of 0.9 × 105. Smoothing the etch wall surface with a fluoropolymer coating is shown to enhance the Q factor of several devices, with a trench coated in a 630-nm-thick TeO2 film demonstrating a Q factor of 2.1 × 105 corresponding to 1.7-dB/cm waveguide loss. These results demonstrate a potential pathway toward monolithic integration of tellurite glass-based nonlinear and rare-earth-doped devices compatible with silicon photonics platforms.","PeriodicalId":127363,"journal":{"name":"Journal of Optical Microsystems","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121989387","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Review of ultrasensitive readout for micro-/nanofluidic devices by thermal lens microscopy","authors":"Chihchen Chen, H. Shimizu, T. Kitamori","doi":"10.1117/1.JOM.1.2.020901","DOIUrl":"https://doi.org/10.1117/1.JOM.1.2.020901","url":null,"abstract":"Abstract. Thermal lens microscopy (TLM) utilizes the effects, such as changes in the refractive index, caused by heat generated in the sample for the detection of nonfluorescent analytes with at least a hundred-fold enhancement in sensitivity compared with optical absorbance spectrometry. Micro-/nanofluidic devices can provide specificity and sample manipulation capabilities. The integration of these two technologies exposes the potential to attain the holy grail of continuous, real-time, label-free, specific, and ultrasensitive detection, which find applications in environmental monitoring, quality control of chemical manufacturing, single-cell analysis, and biomedicines. Here, we summarize the recent advances in the instrument development and innovative applications, and suggest future directions of research of TLM.","PeriodicalId":127363,"journal":{"name":"Journal of Optical Microsystems","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127598892","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Yahui Xiao, Zi Wang, Feifan Wang, Hwaseob Lee, T. Kananen, Tingyi Gu
{"title":"Engineering the light coupling between metalens and photonic crystal resonators for robust on-chip microsystems","authors":"Yahui Xiao, Zi Wang, Feifan Wang, Hwaseob Lee, T. Kananen, Tingyi Gu","doi":"10.1117/1.JOM.1.2.024001","DOIUrl":"https://doi.org/10.1117/1.JOM.1.2.024001","url":null,"abstract":"Abstract. We designed an on-chip transformative optic system with a broadband metalens coupler on a foundry compatible silicon photonic platform. By adjusting the on-chip metalens’ focusing length and mode dimension, the insertion loss between the metalens and the photonic crystal waveguide (PhC WG) structures is reduced to 2 dB by matching the mode on the metalens focal plane to the PhC WG mode. Alternatively, the integrated metalens allow for direct coupling from a multi-mode WG to the PhC cavity. The on-resonance transmission in a lens–cavity–lens microsystem achieves 60%. These micro-systems do not involve any single-mode silicon nanowire WG, and even a suspended PhC structure can be mechanically robust against vibrations. The proposed microsystem can be a new platform for miniaturized chemical and biosensor applications operating in air or solution environments.","PeriodicalId":127363,"journal":{"name":"Journal of Optical Microsystems","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124243057","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}