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Integrated CMOS-MEMS Technology and Its Applications 集成CMOS-MEMS技术及其应用
Technical report of IEICE. SDM Pub Date : 2011-11-21 DOI: 10.1149/ma2014-01/37/1407
Morimura Hiroki, Shimamura Toshishige, Kuwabara Kei, Ono Kazuyoshi, Machida Katsuyuki
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引用次数: 1
Preparation of LiMn_2O_4 films by sputtering method 溅射法制备LiMn_2O_4薄膜
Technical report of IEICE. SDM Pub Date : 2007-05-17 DOI: 10.14723/tmrsj.33.1337
M. Isai, Koich Nakamura, Y. Chonan, T. Hosokawa
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引用次数: 0
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