Morimura Hiroki, Shimamura Toshishige, Kuwabara Kei, Ono Kazuyoshi, Machida Katsuyuki
{"title":"Integrated CMOS-MEMS Technology and Its Applications","authors":"Morimura Hiroki, Shimamura Toshishige, Kuwabara Kei, Ono Kazuyoshi, Machida Katsuyuki","doi":"10.1149/ma2014-01/37/1407","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":111692,"journal":{"name":"Technical report of IEICE. SDM","volume":"102 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-11-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Technical report of IEICE. SDM","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1149/ma2014-01/37/1407","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
京公网安备 11010802042870号
求助内容：
应助结果提醒方式：
