Preparation of LiMn_2O_4 films by sputtering method

Abstract

Manganese oxides have been studied as a cathode material in the Li secondary batteries. Preparation of LiMn20 4thin films were tried with a sputtering method. This material is superior to other materials in the cost performance as well as non-toxicity. The crystal properties were improved after an annealing process. The preparation procedure is introduced through this study. Keyword Li secondary batteries, Manganese oxide films, Li-Mn-0 defect-spinel-structure, Sputtering method, Rapid thermal annealing