溅射法制备LiMn_2O_4薄膜

Technical report of IEICE. SDM Pub Date : 2007-05-17 DOI:10.14723/tmrsj.33.1337

M. Isai, Koich Nakamura, Y. Chonan, T. Hosokawa

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引用次数: 0

摘要

研究了锰氧化物作为锂二次电池的正极材料。采用溅射法制备了limn204薄膜。这种材料在性价比和无毒性方面都优于其他材料。经过退火处理后，晶体性能得到改善。通过本研究介绍了制备过程。关键词锂二次电池，锰氧化物膜，Li- mn -0缺陷尖晶石结构，溅射法，快速热退火

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Preparation of LiMn_2O_4 films by sputtering method

Manganese oxides have been studied as a cathode material in the Li secondary batteries. Preparation of LiMn20 4thin films were tried with a sputtering method. This material is superior to other materials in the cost performance as well as non-toxicity. The crystal properties were improved after an annealing process. The preparation procedure is introduced through this study. Keyword Li secondary batteries, Manganese oxide films, Li-Mn-0 defect-spinel-structure, Sputtering method, Rapid thermal annealing

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Technical report of IEICE. SDM

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