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Journal of surface analysis (Online)最新文献

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Sputtering, Cluster Primary Ions and Static SIMS 溅射，簇初级离子和静态模拟
Journal of surface analysis (Online) Pub Date : 2022-01-01 DOI: 10.1384/jsa.28.s49
M. Seah
{"title":"Sputtering, Cluster Primary Ions and Static SIMS","authors":"M. Seah","doi":"10.1384/jsa.28.s49","DOIUrl":"https://doi.org/10.1384/jsa.28.s49","url":null,"abstract":"Sputtering using cluster primary ion beams is very important for the future development of static SIMS and the SIMS depth profiling of organic layers. However, different results from different laboratories may be confusing. Analytical models have an important function for enabling the prediction of behaviour for practical analysis. Sigmund's model for sputtering, often used in surface analysis, is helpful and accurate in the linear cascade regime. However, for cluster sputtering this is no longer the case and spike effects need evaluation. Evidence will be presented of the spike model validity for clusters of up to more than 10 atoms over 3 orders of magnitude in sputtering yield. Using data from one primary ion, extremely good descrip- tions of measurements reported with other primary ions can then be achieved. This theory is then used to evaluate the molecular ion yield behaviour of interest in the static SIMS of organics. This leads to universal dependencies for the de-protonated molecular ion yields, relating all pri- mary ions, both single atom and cluster, which are illustrated by experimental data over 5 decades of emis- sion intensity. This formulation permits the prediction of the (M-H) - secondary ion yield for different, or new, primary ion sources. It is shown how further gains are predicted. For analysing materials, raising the molecular secondary ion yield is extremely helpful but it is the ratio of this yield to the disappearance cross-section (the efficiency) that is critical. The relation of the damage and disappearance cross sections is formulated. Data are evaluated and a description is given to show how these cross sections are related and to provide a further universal relation for the efficiency/yield dependence of all cluster ions.","PeriodicalId":90628,"journal":{"name":"Journal of surface analysis (Online)","volume":"1 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"66655377","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Measurement of Sputtering Rate Using the Mesh-replica Method with Reference to ISO/TR 22335 参考ISO/TR 22335，用网格复制法测量溅射速率
Journal of surface analysis (Online) Pub Date : 2022-01-01 DOI: 10.1384/jsa.28.179
H. Okumura
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引用次数: 0
Memories of Dr. Martin Seah 马丁·西亚博士的回忆
Journal of surface analysis (Online) Pub Date : 2022-01-01 DOI: 10.1384/jsa.28.221
K. Yoshihara
{"title":"Memories of Dr. Martin Seah","authors":"K. Yoshihara","doi":"10.1384/jsa.28.221","DOIUrl":"https://doi.org/10.1384/jsa.28.221","url":null,"abstract":"","PeriodicalId":90628,"journal":{"name":"Journal of surface analysis (Online)","volume":"1 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"66655693","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Analysis of AES of 2nd Period Element-containing Substances and Valence XPS of the Four Solid Ones by DFT Calculations Using the Model Molecules 用模型分子DFT计算含二周期元素物质的AES和四种固体元素的价态XPS
Journal of surface analysis (Online) Pub Date : 2022-01-01 DOI: 10.1384/jsa.29.14
K. Endo, Akira Yamaguchi, Koichi Masuya, Tsubasa Ishii, C. Takatoh
{"title":"Analysis of AES of 2nd Period Element-containing Substances and Valence XPS of the Four Solid Ones by DFT Calculations Using the Model Molecules","authors":"K. Endo, Akira Yamaguchi, Koichi Masuya, Tsubasa Ishii, C. Takatoh","doi":"10.1384/jsa.29.14","DOIUrl":"https://doi.org/10.1384/jsa.29.14","url":null,"abstract":"","PeriodicalId":90628,"journal":{"name":"Journal of surface analysis (Online)","volume":"1 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"66656177","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Work Functions and Electron Spectroscopy 功函数和电子能谱
Journal of surface analysis (Online) Pub Date : 2022-01-01 DOI: 10.1384/jsa.28.s56
M. Seah
{"title":"Work Functions and Electron Spectroscopy","authors":"M. Seah","doi":"10.1384/jsa.28.s56","DOIUrl":"https://doi.org/10.1384/jsa.28.s56","url":null,"abstract":"","PeriodicalId":90628,"journal":{"name":"Journal of surface analysis (Online)","volume":"5 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"66655387","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Investigation of Electron Beam Damage on All-solid-state Battery Materials for AES Chemical Mapping 全固态电池材料电子束损伤的AES化学成像研究
Journal of surface analysis (Online) Pub Date : 2022-01-01 DOI: 10.1384/jsa.29.25
M. Terashima, K. Mamiya, S. Iida
{"title":"Investigation of Electron Beam Damage on All-solid-state Battery Materials for AES Chemical Mapping","authors":"M. Terashima, K. Mamiya, S. Iida","doi":"10.1384/jsa.29.25","DOIUrl":"https://doi.org/10.1384/jsa.29.25","url":null,"abstract":"","PeriodicalId":90628,"journal":{"name":"Journal of surface analysis (Online)","volume":"1 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"66655902","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fine Structure for Secondary Electron Spectra Excited by Electron Beam 电子束激发二次电子能谱的精细结构
Journal of surface analysis (Online) Pub Date : 2022-01-01 DOI: 10.1384/jsa.28.161
Satoshi Hashimoto, Tsuguo Sakurada, K. Goto
{"title":"Fine Structure for Secondary Electron Spectra Excited by Electron Beam","authors":"Satoshi Hashimoto, Tsuguo Sakurada, K. Goto","doi":"10.1384/jsa.28.161","DOIUrl":"https://doi.org/10.1384/jsa.28.161","url":null,"abstract":"","PeriodicalId":90628,"journal":{"name":"Journal of surface analysis (Online)","volume":"3 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"66655468","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Struggles in Requirements for Standard Spectra at Hakone-Sengokubara 箱根-仙谷原标准光谱要求的斗争
Journal of surface analysis (Online) Pub Date : 2022-01-01 DOI: 10.1384/jsa.28.225
Akihiro Tanaka
{"title":"Struggles in Requirements for Standard Spectra at Hakone-Sengokubara","authors":"Akihiro Tanaka","doi":"10.1384/jsa.28.225","DOIUrl":"https://doi.org/10.1384/jsa.28.225","url":null,"abstract":"","PeriodicalId":90628,"journal":{"name":"Journal of surface analysis (Online)","volume":"1 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"66655241","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Measurement of Silicon Oxide Film Thickness by X-ray Photoelectron Spectroscopy with ISO 14701 ISO 14701 - x射线光电子能谱法测定氧化硅薄膜厚度
Journal of surface analysis (Online) Pub Date : 2022-01-01 DOI: 10.1384/jsa.28.173
Y. Yamauchi, Shoya Oizumi, S. Ohnishi
{"title":"Measurement of Silicon Oxide Film Thickness by X-ray Photoelectron Spectroscopy with ISO 14701","authors":"Y. Yamauchi, Shoya Oizumi, S. Ohnishi","doi":"10.1384/jsa.28.173","DOIUrl":"https://doi.org/10.1384/jsa.28.173","url":null,"abstract":"","PeriodicalId":90628,"journal":{"name":"Journal of surface analysis (Online)","volume":"1 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"66655480","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Notable Achievements in Surface Chemical Analysis by Dr. Martin P. Seah Martin P. Seah博士在表面化学分析方面的显著成就
Journal of surface analysis (Online) Pub Date : 2022-01-01 DOI: 10.1384/jsa.28.197
D. Fujita
{"title":"Notable Achievements in Surface Chemical Analysis by Dr. Martin P. Seah","authors":"D. Fujita","doi":"10.1384/jsa.28.197","DOIUrl":"https://doi.org/10.1384/jsa.28.197","url":null,"abstract":"","PeriodicalId":90628,"journal":{"name":"Journal of surface analysis (Online)","volume":"1 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"66655563","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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