P. Zhao, Y. Lim, H. Li, J. Tao, L. Guidoni, C. Tan
{"title":"Development, Testing, and Integration of Silicon and Glass Substrates for Advanced Ion Trap Design","authors":"P. Zhao, Y. Lim, H. Li, J. Tao, L. Guidoni, C. Tan","doi":"10.1109/nmdc50713.2021.9677504","DOIUrl":"https://doi.org/10.1109/nmdc50713.2021.9677504","url":null,"abstract":"","PeriodicalId":6742,"journal":{"name":"2021 IEEE 16th Nanotechnology Materials and Devices Conference (NMDC)","volume":"40 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2021-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89545962","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}