Journal of Micro- and Nano-Manufacturing最新文献_第2页

Error Budget of Wafer Bonding Alignment System Based On Vision 基于视觉的晶圆键合对准系统的误差预算

Journal of Micro- and Nano-Manufacturing Pub Date : 2024-04-18 DOI: 10.1115/1.4065333

Rui Wang, Sen Lu, Kaiming Yang, Yu Zhu

{"title":"Error Budget of Wafer Bonding Alignment System Based On Vision","authors":"Rui Wang, Sen Lu, Kaiming Yang, Yu Zhu","doi":"10.1115/1.4065333","DOIUrl":"https://doi.org/10.1115/1.4065333","url":null,"abstract":"\u0000 Accurate wafer alignment is the key to achieving wafer bonding accuracy. High precision wafer alignment systems typically use vision to locate the aligned Mark on two wafers, and use complex mechanisms to perform multiple composite movements to achieve functionality, making the coupling effect of multiple types of errors more complex and challenging the error budget of wafer alignment systems. This paper proposes an error budgeting method for such vision based multi body precision systems. This method takes the Homogeneous Transformation Matrix(HTM) method as the core to model the system error and establish two types of error transfer chains. For the error chain involving visual measurement, an analysis method based on geometrical optics is proposed to consider the influence of the position and orientation errors of the optical path components. Then organize the possible error sources in the system and model the parameters of each error based on actual test results. Combined with the process flow, customize the error model for each link. Finally, perform Monte Carlo simulation. Using the aforementioned method to budget errors for a certain configuration of wafer alignment system, main error sources were identified, and accuracy indicators were proposed based on the alignment accuracy requirements of ± 200nm. The rationality of the error budget conclusion in this study has been verified through experiments on the construction machine.","PeriodicalId":513355,"journal":{"name":"Journal of Micro- and Nano-Manufacturing","volume":" 15","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-04-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140690220","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Harnessing Hydrodynamic Cavitation for Surface Modification and Strengthening 利用水动力空化技术进行表面改性和强化

Journal of Micro- and Nano-Manufacturing Pub Date : 2024-04-18 DOI: 10.1115/1.4065332

Hao Pang, G. Ngaile

{"title":"Harnessing Hydrodynamic Cavitation for Surface Modification and Strengthening","authors":"Hao Pang, G. Ngaile","doi":"10.1115/1.4065332","DOIUrl":"https://doi.org/10.1115/1.4065332","url":null,"abstract":"\u0000 Hydrodynamic cavitation shows promise for surface modification and strengthening. While previous research has explored its potential for surface hardening and polishing, the application of cavitation for surface texturing remains relatively unexplored. This paper aims to investigate the feasibility of using hydrodynamic cavitation for surface texturing and hardening, as well as identify the key process parameters that influence the outcomes. Computational fluid dynamics (CFD) simulations are utilized to analyze the behavior of cavitation under various conditions, and experimental validation is conducted. The study examines the influence of different chamber insert geometries on cavitation intensity and energy release. It also investigates the effect of process parameters on surface morphology and hardness. The results demonstrate that hydrodynamic cavitation can effectively strengthen specific regions of interest when the cavitation intensity is controlled. However, the formation of surface texture through plastic deformation may be limited to ductile materials or those with low yield strength. The study highlights the significance of utilizing suitable cavitation generators capable of continuously generating cavitation for consistent and controlled intensity. Preliminary results suggest that innovative vortex-based devices have the potential to deliver controlled cavitation intensity to desired areas.","PeriodicalId":513355,"journal":{"name":"Journal of Micro- and Nano-Manufacturing","volume":" 48","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-04-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140687379","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A High Energy Density Pulsed Power Supply for Micro EDM of High Aspect Ratio Holes 用于高纵横比孔微型放电加工的高能量密度脉冲电源

Journal of Micro- and Nano-Manufacturing Pub Date : 2024-04-17 DOI: 10.1115/1.4065328

Peiyao Cao, H. Tong, Yong Li, Yulan Zhu

引用次数: 0

Micro-Channel Cutting On Glass in ECDM Process Using Different Electrolytes and Tool Polarity 使用不同电解质和工具极性在 ECDM 工艺中切割玻璃上的微通道

Journal of Micro- and Nano-Manufacturing Pub Date : 2024-04-17 DOI: 10.1115/1.4065326

Md. Niamot Ali, B. Sarkar, B. Doloi, B. Bhattacharyya

{"title":"Micro-Channel Cutting On Glass in ECDM Process Using Different Electrolytes and Tool Polarity","authors":"Md. Niamot Ali, B. Sarkar, B. Doloi, B. Bhattacharyya","doi":"10.1115/1.4065326","DOIUrl":"https://doi.org/10.1115/1.4065326","url":null,"abstract":"\u0000 Micro-channel cutting on electrically non-conducting materials with electrochemical discharge machining (ECDM) process has drawn an momentous attention in manufacturing field as compared to other existing non-traditional machining processes. In the present research work, an effort has been accomplished to investigate the effects of process parameters namely applied voltage (V), electrolyte concentration (wt%), pulse frequency and duty ratio on different performance features of ECDM viz material removal rate (MRR), overcut (OC) and heat affected zone (HAZ) area during micro-channel cutting on glass. Also, the comparative performance studies during micro-channel cutting have been done by using mixed electrolyte of NaOH & KOH and different tool polarities. Overcut is measured as lower (42.26 µm) when aqueous KOH electrolyte is used and as higher (133.44 µm) for aqueous NaOH electrolyte. HAZ enlarges with enrichment in concentration for both types of electrolyte. It is observed that polarity has a vital role on various machining characteristics. As compared to direct polarity, MRR is found very low (3.2 mg/hr) in reverse polarity of tool. Overcut is found low in KOH electrolyte for both types of tool polarity (i.e. 64.68 µm for direct polarity and 42.27 µm for reverse polarity). The process parameters influence on the surface texture of micro-channels. Micro-crack is noticed for direct polarity of tool.","PeriodicalId":513355,"journal":{"name":"Journal of Micro- and Nano-Manufacturing","volume":"50 s176","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140693810","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Effect of CoCrMo Die and Tool Surface Nano-Texture on Micro Backward Extrusion Formability of AA6063-T6 钴铬钼合金模具和工具表面纳米纹理对 AA6063-T6 微向后挤压成形性的影响

Journal of Micro- and Nano-Manufacturing Pub Date : 2024-04-17 DOI: 10.1115/1.4065330

T. Funazuka, Syunsuke Horiuchi, K. Dohda, Tomomi Shiratori

{"title":"Effect of CoCrMo Die and Tool Surface Nano-Texture on Micro Backward Extrusion Formability of AA6063-T6","authors":"T. Funazuka, Syunsuke Horiuchi, K. Dohda, Tomomi Shiratori","doi":"10.1115/1.4065330","DOIUrl":"https://doi.org/10.1115/1.4065330","url":null,"abstract":"\u0000 To manufacture micro parts used in medical and electronic devices, the machining scale must be reduced to the microscale. However, when applying existing plastic forming processes to the machining of microscale parts, the size effect caused by material properties and friction results in variations in product accuracy. To suppress the size effect, appropriate tool materials and tool surface treatments suitable for micro-scale machining must be considered. This study investigated the effects of tool surface properties such as die surface nano-texture on microextrudability such as extrusion load, product shape, and crystal structure of the product using AA6063-T6 billets as test specimens. A CoCrMO die was used as a new die material suitable for microextrusion. The extrusion load increased rapidly with the progression of the stroke for both dies. In the case of the CoCrMo die with nano-texture applied, the extrusion load was considerably lower than that of the AISI H13 die. Moreover, the extrusion length of the CoCrMo die with nano-texture applied was longer than that of the AISI H13 die. In addition, the nano-textured CoCrMo die exhibited less adhesion on the die surface. The results of material analysis using electron backscatter diffraction indicated that the nano-textured CoCrMo die improved material flowability and facilitated the application of greater strain. However, the AISI H13 die exhibited lower material flowability and non-uniform strain. Therefore, the tribology between the tool and the material was controlled by changing the surface properties of the die to improve the formability.","PeriodicalId":513355,"journal":{"name":"Journal of Micro- and Nano-Manufacturing","volume":" 22","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140692020","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Numerical Modeling, Experimental Investigation and Optimization of a Micro Hot Embossing Process 微型热压纹工艺的数值建模、实验研究与优化

Journal of Micro- and Nano-Manufacturing Pub Date : 2024-04-17 DOI: 10.1115/1.4065327

Partha Protim Mondal, Placid Ferreira, S. Kapoor, Patrick Bless

引用次数: 0

The Dissolvable Alginate Fiber Network Produced via the Immersed Microfluidic Spinning 通过浸入式微流体纺丝技术生成的可溶解藻酸盐纤维网

Journal of Micro- and Nano-Manufacturing Pub Date : 2024-04-17 DOI: 10.1115/1.4065331

Zarya Rajestari, Joseph Kalaus, L. Kulinsky

{"title":"The Dissolvable Alginate Fiber Network Produced via the Immersed Microfluidic Spinning","authors":"Zarya Rajestari, Joseph Kalaus, L. Kulinsky","doi":"10.1115/1.4065331","DOIUrl":"https://doi.org/10.1115/1.4065331","url":null,"abstract":"\u0000 Pore size and pore interconnectivity that characterize the topology of the vascular networks in tissue constructs are critical to healthy cell behavior and tissue formation. While scaffolds with hollow channel structures have gained significant attention, still creating the hollow channel networks within various cellular matrices such as cell-laden hydrogels, remain a slow process limited by the speed of material extrusion of 3D printing techniques for the deposition of sacrificial fibers. To address the issue of low throughput for sacrificial fiber production and placement, we propose to utilize the micromanufacturing technique of the immersed microfluidic spinning. Present study discusses the optimization of the topology of the sacrificial calcium alginate microfibers as a function of alginate concentration and the gauge of the needle used in the immersed fluidic spinning. An important parameter of the fabricated fiber network is the size of the loops produced via this method. We demonstrate that the loops with radii between approximately 1,600 and 3,200 microns can be produced with needle of 30 gauge for alginate concentrations between 1% and 8%. Fiber diameters are also characterized as a function of needle gauge and alginate concentration. Finally, viability of the fibroblast cells in GelMA are qualitatively studied as a function of the distance of the cells from the outside boundary of the gel (where the cell media is located). As expected, the cell viability falls as the distance from the outer boundary of the gel increases.","PeriodicalId":513355,"journal":{"name":"Journal of Micro- and Nano-Manufacturing","volume":" 20","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140691642","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Controlling Surface of Rods with Entrained Particle as Asperities 以夹带颗粒为穿透物控制棒的表面

Journal of Micro- and Nano-Manufacturing Pub Date : 2024-02-03 DOI: 10.1115/1.4064646

MD Khalil, Md. Akibul Islam, Dezhong Tong, M. Jawed, Bashir Khoda

{"title":"Controlling Surface of Rods with Entrained Particle as Asperities","authors":"MD Khalil, Md. Akibul Islam, Dezhong Tong, M. Jawed, Bashir Khoda","doi":"10.1115/1.4064646","DOIUrl":"https://doi.org/10.1115/1.4064646","url":null,"abstract":"\u0000 Changing the surface properties (i.e., roughness or friction) can be instrumental for many applications but can be a complex and resources intensive process. In this paper, we demonstrate a novel process of controlling the friction of a continuous rod by delivering inorganic micro-particles. A standardized continuous particle transfer protocol has been developed in our laboratory for depositing particles from a liquid carrier system to the cylindrical rod substrate. The particle transfer process can produce controllable and tunable surface properties. Polymeric binder is used to deliver the particles as asperities over the rod substrate and by controlling their size, shape and distribution, the coefficient of friction of the rod is determined. Tabletop experiments are designed and performed to measure the friction coefficient following the Capstan equation. The entrained particles on the substrate will create a size and shape-based asperities which will alter the surface morphology toward desired direction. Both oblique and direct quantitative measurements are performed at different particles and binder concentrations. A systematic variation in the friction coefficient is observed and reported in the result section. It is observed from the capstan experiment that adding only 1% irregular shaped particles in the suspension changes the friction coefficient of the rods by almost 115%. The proposed friction control technique is a simple to scale up, low-cost, low-waste, and low energy manufacturing method for controlling the surface morphology.","PeriodicalId":513355,"journal":{"name":"Journal of Micro- and Nano-Manufacturing","volume":"686 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139807658","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Controlling Surface of Rods with Entrained Particle as Asperities 以夹带颗粒为穿透物控制棒的表面

Journal of Micro- and Nano-Manufacturing Pub Date : 2024-02-03 DOI: 10.1115/1.4064646

MD Khalil, Md. Akibul Islam, Dezhong Tong, M. Jawed, Bashir Khoda

{"title":"Controlling Surface of Rods with Entrained Particle as Asperities","authors":"MD Khalil, Md. Akibul Islam, Dezhong Tong, M. Jawed, Bashir Khoda","doi":"10.1115/1.4064646","DOIUrl":"https://doi.org/10.1115/1.4064646","url":null,"abstract":"\u0000 Changing the surface properties (i.e., roughness or friction) can be instrumental for many applications but can be a complex and resources intensive process. In this paper, we demonstrate a novel process of controlling the friction of a continuous rod by delivering inorganic micro-particles. A standardized continuous particle transfer protocol has been developed in our laboratory for depositing particles from a liquid carrier system to the cylindrical rod substrate. The particle transfer process can produce controllable and tunable surface properties. Polymeric binder is used to deliver the particles as asperities over the rod substrate and by controlling their size, shape and distribution, the coefficient of friction of the rod is determined. Tabletop experiments are designed and performed to measure the friction coefficient following the Capstan equation. The entrained particles on the substrate will create a size and shape-based asperities which will alter the surface morphology toward desired direction. Both oblique and direct quantitative measurements are performed at different particles and binder concentrations. A systematic variation in the friction coefficient is observed and reported in the result section. It is observed from the capstan experiment that adding only 1% irregular shaped particles in the suspension changes the friction coefficient of the rods by almost 115%. The proposed friction control technique is a simple to scale up, low-cost, low-waste, and low energy manufacturing method for controlling the surface morphology.","PeriodicalId":513355,"journal":{"name":"Journal of Micro- and Nano-Manufacturing","volume":"43 3","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139867431","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Scalable Au Metal-assisted Chemical Etch Nanopatterning Using Enhanced Metal Break Techniques 利用增强型金属断裂技术实现可扩展的金金属辅助化学蚀刻纳米图案化

Journal of Micro- and Nano-Manufacturing Pub Date : 2024-02-01 DOI: 10.1115/1.4064611

Mark Hrdy, Akhila Mallavarapu, P. Ajay, Mariana Castañeda, S. V. Sreenivasan

引用次数: 0