Optics and Lasers in Engineering最新文献

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A machine-learning assisted measurement device for circadian lighting based on spectral sensors 基于光谱传感器的机器学习辅助昼夜节律照明测量装置
IF 3.5 2区 工程技术
Optics and Lasers in Engineering Pub Date : 2024-11-20 DOI: 10.1016/j.optlaseng.2024.108702
Jianling Huang , Cheng Zeng , Meicong Huang , Yaling Chai , Shanrong Ke , Da Xu , Lili Zheng , Xinqin Liao , Yijun Lu , Zhong Chen , Lihong Zhu , Ziquan Guo
{"title":"A machine-learning assisted measurement device for circadian lighting based on spectral sensors","authors":"Jianling Huang ,&nbsp;Cheng Zeng ,&nbsp;Meicong Huang ,&nbsp;Yaling Chai ,&nbsp;Shanrong Ke ,&nbsp;Da Xu ,&nbsp;Lili Zheng ,&nbsp;Xinqin Liao ,&nbsp;Yijun Lu ,&nbsp;Zhong Chen ,&nbsp;Lihong Zhu ,&nbsp;Ziquan Guo","doi":"10.1016/j.optlaseng.2024.108702","DOIUrl":"10.1016/j.optlaseng.2024.108702","url":null,"abstract":"<div><div>Light has an undeniable impact on the human body, as it can to some extent affect hormone secretion and emotional changes. Spectral power distribution (SPD) is the main indicator for evaluating the quality of light sources, but traditional spectral measurement equipment is bulky and expensive, and cannot be widely used in our daily life. In order to fill this gap, this article designs a low-cost and small lighting measurement device for measuring the circadian lighting, which obtains spectral data from 8 channels in the visible light range through multi-channel spectral sensors. Machine learning methods are used to reconstruct the SPD of 81 wavelength data points, thereby improving the accuracy of designed measurement device. This device can simultaneously achieve real-time measurement of SPD and real-time monitoring of circadian related parameters, and return circadian related parameters (such as circadian action factor, melanopic efficacy of luminous radiation, equivalent melanopic lux, etc.). Results have found that the error of circadian parameters measured by this equipment is less than 5%.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"184 ","pages":"Article 108702"},"PeriodicalIF":3.5,"publicationDate":"2024-11-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142697219","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The synchronous measurement of mechanical and magnetic characteristics of superconducting materials in extreme environments 在极端环境下同步测量超导材料的机械和磁特性
IF 3.5 2区 工程技术
Optics and Lasers in Engineering Pub Date : 2024-11-19 DOI: 10.1016/j.optlaseng.2024.108697
Z. Huang , X. Su , J. Deng , Y. Zhang , J. Zhou , X. Zhang
{"title":"The synchronous measurement of mechanical and magnetic characteristics of superconducting materials in extreme environments","authors":"Z. Huang ,&nbsp;X. Su ,&nbsp;J. Deng ,&nbsp;Y. Zhang ,&nbsp;J. Zhou ,&nbsp;X. Zhang","doi":"10.1016/j.optlaseng.2024.108697","DOIUrl":"10.1016/j.optlaseng.2024.108697","url":null,"abstract":"<div><div>Thermomagnetic instability typically occurs before the quench of high temperature superconductors. Magnetic perturbation and thermal agitation are known to be the main driving force of thermomagnetic instability. However, the interaction between mechanical deformation and the thermomagnetic instability is still unclear. To investigate the phenomenon and inner principle of the thermomagnetic instability induced by mechanical deformation, an experimental method is proposed for the in-situ, real-time, and synchronous test of mechanical deformation and magnetic flux based on digital imaging correlation (DIC) and magneto-optical imaging (MOI). Under the current-carrying and external magnetic field conditions, uniaxial tensile tests of YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-δ</sub> (YBCO) coated conductors (CCs) are carried out, in which the evolution and distribution magnetic flux induced by strain are studied. At the same time, chemical etching is adopted to explore the damage caused by mechanical deformation in YBCO layer. It is found through the experiment that the mechanical deformation can induce thermomagnetic instability, and threshold of strain for inducing flux motions is obtained. Meanwhile, magnetic flux avalanche occurs in front end of the flux penetration area in the case of current carrying. In addition, plenty of various-sizes transverse cracks are discovered in the superconducting layer whose distribution area basically coincides with the flux penetration area. The experiment results reveal the intrinsic correlation between the mechanical deformation and thermomagnetic instability of high temperature superconducting wires, which provides a direct experimental approach for the study of unpredicted quench behaviors of superconducting magnets.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"184 ","pages":"Article 108697"},"PeriodicalIF":3.5,"publicationDate":"2024-11-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142698580","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Dual-wavelength efficient phase imaging method based on convolutional neural networks 基于卷积神经网络的双波长高效相位成像方法
IF 3.5 2区 工程技术
Optics and Lasers in Engineering Pub Date : 2024-11-19 DOI: 10.1016/j.optlaseng.2024.108703
Yuanyuan Xu, Fan Yang, Gubing Cai, Yiru Fan, Wanxiang Wang
{"title":"Dual-wavelength efficient phase imaging method based on convolutional neural networks","authors":"Yuanyuan Xu,&nbsp;Fan Yang,&nbsp;Gubing Cai,&nbsp;Yiru Fan,&nbsp;Wanxiang Wang","doi":"10.1016/j.optlaseng.2024.108703","DOIUrl":"10.1016/j.optlaseng.2024.108703","url":null,"abstract":"<div><div>Traditional dual-wavelength interference techniques often require collecting multiple frames of intensity maps, followed by phase shifting and unwrapping to derive phase information. This method is not only time-consuming but also complex. To address these shortcomings, a high-precision and fast phase recovery method is proposed based on deep learning techniques. This approach leverages a large dataset of interferograms for training, testing based on U-Net. Remarkably, our method predicts phase information from a single frame interferogram. It significantly simplifies the computational steps and enhances a certain degree of generalization ability, as various types of fringe interferograms can be processed through separate training. Simulation tests reveal root mean square errors (RMSEs) of 0.0108 rad, 0.0232 rad, and 0.0465 rad for three different types of interferograms, indicating excellent phase recovery accuracy. Further robustness testing with Gaussian white noise shows minimal changes in RMSE, underscoring the method's stability. Real experimental results confirm the method's feasibility and better computational efficiency, achieving phase information retrieval in just 0.5 s.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"184 ","pages":"Article 108703"},"PeriodicalIF":3.5,"publicationDate":"2024-11-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142697194","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High-quality computer-generated holography based on Vision Mamba 基于 Vision Mamba 的高质量计算机生成全息技术
IF 3.5 2区 工程技术
Optics and Lasers in Engineering Pub Date : 2024-11-18 DOI: 10.1016/j.optlaseng.2024.108704
Lei Yang , Shengyuan Xu , Chunzheng Yang , Chenliang Chang , Qichao Hou , Qiang Song
{"title":"High-quality computer-generated holography based on Vision Mamba","authors":"Lei Yang ,&nbsp;Shengyuan Xu ,&nbsp;Chunzheng Yang ,&nbsp;Chenliang Chang ,&nbsp;Qichao Hou ,&nbsp;Qiang Song","doi":"10.1016/j.optlaseng.2024.108704","DOIUrl":"10.1016/j.optlaseng.2024.108704","url":null,"abstract":"<div><div>Deep learning, especially through model-driven unsupervised networks, offers a novel approach for efficient computer-generated hologram (CGH) generation. However, current model-driven CGH generation models are primarily built on the convolutional neural networks (CNNs), which struggle to achieve high-quality hologram reconstruction due to limited receptive fields. Although Vision Transformers (ViTs) excel at processing more distant visual information, they are burdened with huge computational load. The recent emergence of Vision Mamba (ViM) presents a promising avenue to address these challenges. In this study, we introduce the CVMNet, a lightweight model that combines the precision of convolutional layers for local feature extraction and the long-range modeling abilities of state-space models (SSMs) to enhance the quality of CGHs. By employing parallel computation for the ViM to handle feature channels, the CVMNet effectively reduces the number of model parameters. Numerical reconstruction and optical experiments demonstrate that the CVMNet can generate 1080P high-quality holograms in just 16 ms, boosting an average PSNR of over 30 dB and effectively suppressing speckle noise in reconstructed images. Additionally, the CVMNet showcases robust generalization capabilities.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"184 ","pages":"Article 108704"},"PeriodicalIF":3.5,"publicationDate":"2024-11-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142697217","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Multispectral polarimetric bidirectional reflectance research of plant canopy 植物冠层的多光谱偏振双向反射研究
IF 3.5 2区 工程技术
Optics and Lasers in Engineering Pub Date : 2024-11-18 DOI: 10.1016/j.optlaseng.2024.108688
Qingyi He , Juntong Zhan , Xuanwei Liu , Chao Dong , Dapeng Tian , Qiang Fu
{"title":"Multispectral polarimetric bidirectional reflectance research of plant canopy","authors":"Qingyi He ,&nbsp;Juntong Zhan ,&nbsp;Xuanwei Liu ,&nbsp;Chao Dong ,&nbsp;Dapeng Tian ,&nbsp;Qiang Fu","doi":"10.1016/j.optlaseng.2024.108688","DOIUrl":"10.1016/j.optlaseng.2024.108688","url":null,"abstract":"<div><div>Vegetation monitoring has been widely applied in various fields such as forest coverage and vegetation growth status. By measuring and analyzing the polarization of plant canopies, it is possible to infer the growth status of plants, thereby assessing their growth rate and providing effective technical means for areas such as crop yield estimation and ecological environment monitoring. To investigate the relationship between the properties of plant canopies and their polarization, a multispectral polarized light imaging system was constructed based on the BRDF (Bidirectional Reflectance Distribution Function) device. Through experiments and analysis on Christmas blue cabbage and hibiscus, the polarization characteristics of sparse and dense vegetation were detected. The results indicate that the polarization of denser vegetation canopies is significantly greater than that of sparser vegetation, with polarization degrees reaching 0.29 and 0.43 in the red waveband, exceeding the polarization in the blue and green wavebands. This advantage surpasses the influence of leaf roughness on polarization. Furthermore, a pBRDF model of plant canopies was established, and fitted images of polarization degree variation with zenith angle were obtained. Data inversion was conducted on the canopies of Christmas blue cabbage and hibiscus, resulting in root mean square errors of 2.3% and 1.1%, respectively.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"184 ","pages":"Article 108688"},"PeriodicalIF":3.5,"publicationDate":"2024-11-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142697214","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Double spiral phase filter digital in-line holography for particle field recording and tracking 用于粒子场记录和跟踪的双螺旋相位滤波器数字在线全息技术
IF 3.5 2区 工程技术
Optics and Lasers in Engineering Pub Date : 2024-11-16 DOI: 10.1016/j.optlaseng.2024.108694
J. Lobera , A.M. López Torres , N. Andrés , F.J. Torcal-Milla , E.M. Roche , V. Palero
{"title":"Double spiral phase filter digital in-line holography for particle field recording and tracking","authors":"J. Lobera ,&nbsp;A.M. López Torres ,&nbsp;N. Andrés ,&nbsp;F.J. Torcal-Milla ,&nbsp;E.M. Roche ,&nbsp;V. Palero","doi":"10.1016/j.optlaseng.2024.108694","DOIUrl":"10.1016/j.optlaseng.2024.108694","url":null,"abstract":"<div><div>The application of digital in-line holography in fluid velocimetry is mainly limited by the twin image that hinders the particle position and velocity measurements. In this work, we propose the use of two spiral phase filters in a digital in-line holography configuration to discriminate the real and virtual images. The first filter is a physical plate that modifies the object spectrum prior the recording. The second filter is a numerical frequency filter, applied in the reconstruction process, which reshape one of the particle images into a point-like image while blurs its twin image. In this way, particle tracking algorithms, based on the detection of intensity peaks, can easily locate and track particles. The good performance of double spiral phase filter in-line holography for particle field recording and particle tracking has been demonstrated experimentally in the present work.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"184 ","pages":"Article 108694"},"PeriodicalIF":3.5,"publicationDate":"2024-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142661120","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Femtosecond laser processing with aberration correction based on Shack-Hartmann wavefront sensor 基于 Shack-Hartmann 波前传感器的具有像差校正功能的飞秒激光加工技术
IF 3.5 2区 工程技术
Optics and Lasers in Engineering Pub Date : 2024-11-16 DOI: 10.1016/j.optlaseng.2024.108693
Xiangyu Wang , Lei Zhu , Qi Zhang , Liang Yang , Min Tang , Fei Xiao , Xiaodong Wang , Shiyang Shen , Lanqiang Zhang , Youming Guo
{"title":"Femtosecond laser processing with aberration correction based on Shack-Hartmann wavefront sensor","authors":"Xiangyu Wang ,&nbsp;Lei Zhu ,&nbsp;Qi Zhang ,&nbsp;Liang Yang ,&nbsp;Min Tang ,&nbsp;Fei Xiao ,&nbsp;Xiaodong Wang ,&nbsp;Shiyang Shen ,&nbsp;Lanqiang Zhang ,&nbsp;Youming Guo","doi":"10.1016/j.optlaseng.2024.108693","DOIUrl":"10.1016/j.optlaseng.2024.108693","url":null,"abstract":"<div><div>Optical aberrations are critical for high-precision and large-depth fabrication of femtosecond lasers in transparent media. Some approaches have been demonstrated to correct these aberrations, such as calculated formulas, iterative algorithms for phase retrieval, and neural networks. However, these approaches have a few drawbacks, such as insufficient aberration correction and a lack of real-time operation, limiting the processing depth and performance of the device. Thus, this study demonstrated an aberration correction scheme with direct wavefront sensing. The aberrations during processing at different depths, from 100 to 600 μm, were measured using a Shack-Hartmann wavefront sensor. As a guide star, this sensor used the supercontinuum emitted by the plasma, which is generated by multiphoton absorption and avalanche effects in the focal region. A liquid-crystal spatial light modulator (SLM) effectively compensated the aberrations. Voxels with a constant aspect ratio of 2.82–2.91 were fabricated in different depths, significantly lower than the aspect ratio of 4.46–19.5 with uncorrected aberrations. This technology allows the precise fabrication of three-dimensional photonic devices consisting of curved waveguides at continuously different depths and improves the throughput of laser processing.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"184 ","pages":"Article 108693"},"PeriodicalIF":3.5,"publicationDate":"2024-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142661121","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Multifunctional processor based on cascaded switchable polarization-multiplexed metasurface 基于级联可切换偏振多路复用元表面的多功能处理器
IF 3.5 2区 工程技术
Optics and Lasers in Engineering Pub Date : 2024-11-16 DOI: 10.1016/j.optlaseng.2024.108691
Rui Xia, Haodong Zhu, Ruiqi Yin, Ming Zhao, Zhenyu Yang
{"title":"Multifunctional processor based on cascaded switchable polarization-multiplexed metasurface","authors":"Rui Xia,&nbsp;Haodong Zhu,&nbsp;Ruiqi Yin,&nbsp;Ming Zhao,&nbsp;Zhenyu Yang","doi":"10.1016/j.optlaseng.2024.108691","DOIUrl":"10.1016/j.optlaseng.2024.108691","url":null,"abstract":"<div><div>In many optical applications, vortex beam is widely used in optical communications, quantum information processing and other fields due to its unique properties. And in the field of imaging, it is crucial to obtain high quality and clear images. Current strategies mainly observe the interference fringes of the vortex beam and the Gaussian beam or use external optics to measure the topological charges (TCs), and apply machine learning in the back-end processing to denoise the image. The emerging diffractive deep neural network (D<sup>2</sup>NN) proposes a novel solution. Here, we introduce a multifunctional processor based on cascaded switchable polarization-multiplexed metasurface. It realizes the TC measurement and image denoising by exploiting the polarization-sensitive properties of anisotropic meta-atoms, which generate different phase responses under varying polarization states of incident light. Different types of noisy images, noise models, and noise ratios can be denoised by switching the metasurface. This study highlights the potential applications of integrating metasurfaces with D<sup>2</sup>NN through numerical simulation validation, expanding possibilities by transforming metasurfaces into multifunctional processors.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"184 ","pages":"Article 108691"},"PeriodicalIF":3.5,"publicationDate":"2024-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142661119","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Efficient point cloud occlusion method for ultra wide-angle computer-generated holograms 超广角计算机生成全息图的高效点云遮挡法
IF 3.5 2区 工程技术
Optics and Lasers in Engineering Pub Date : 2024-11-15 DOI: 10.1016/j.optlaseng.2024.108678
Juan Martinez-Carranza , Jose Martinez-Carranza , Tomasz Kozacki
{"title":"Efficient point cloud occlusion method for ultra wide-angle computer-generated holograms","authors":"Juan Martinez-Carranza ,&nbsp;Jose Martinez-Carranza ,&nbsp;Tomasz Kozacki","doi":"10.1016/j.optlaseng.2024.108678","DOIUrl":"10.1016/j.optlaseng.2024.108678","url":null,"abstract":"<div><div>Holographic Near Eye Displays (HNEDs) are meant to be the next generation of electronic devices that enable projecting three-dimensional images directly to the eyes. This is possible because computer-generated holograms (CGHs), the backbone of HNEDs, encode accurate wavefront information from virtual objects. An immersive experience requires that these CGHs can reproduce large and highly detailed objects. Moreover, an occlusion culling algorithm is necessary to remove back surfaces that do not contribute to the scene, which provides a better sense of reality. Although there is a vast family of occlusion culling methods, none of these, to the best of our knowledge, consider occlusion when calculating CGHs for field of views (FoV) larger than 90° This work proposes a point cloud occlusion culling method for CGHs that projects images with angles larger than 90° Our approach is based on the geometry of the non-pupil Near Eye Display configuration. It is shown that this configuration provides the proper geometrical conditions that can be used for setting fast occlusion culling of unwanted back points. Occlusion culling with our method is carried out with clouds larger than 7-million-point sources and CGHs resolution of 4 K and 8K. It is demonstrated that our method is at least 5 times faster than current solutions. Furthermore, occluded clouds are used for calculating CGHs that are numerically and optically reconstructed. The obtained results confirm that our method provides high-quality occluded clouds, enabling high-quality production of CGHs with large FoV.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"184 ","pages":"Article 108678"},"PeriodicalIF":3.5,"publicationDate":"2024-11-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142661118","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
In-situ full-wafer metrology via coupled white light and monochromatic stroboscopic illumination 通过耦合白光和单色频闪照明进行原位全晶片测量
IF 3.5 2区 工程技术
Optics and Lasers in Engineering Pub Date : 2024-11-15 DOI: 10.1016/j.optlaseng.2024.108692
Jack B.P. Atkinson, Jonathan R. Howse
{"title":"In-situ full-wafer metrology via coupled white light and monochromatic stroboscopic illumination","authors":"Jack B.P. Atkinson,&nbsp;Jonathan R. Howse","doi":"10.1016/j.optlaseng.2024.108692","DOIUrl":"10.1016/j.optlaseng.2024.108692","url":null,"abstract":"<div><div>This work presents a novel optical setup to provide scalable <em>in-situ</em> metrology during spin coating. Stroboscopic white light imaging provides high resolution color videos of the process, at a temporal resolution matching the spin speed, where thin film interference colors are observed. Monochromatic specular reflection intensity data from the center of rotation provides a thickness profile at this point. By developing a color to thickness relationship <em>in-situ</em> with the combination of these techniques and leveraging the large-area data provided by color imaging, the thickness at any point on the wafer is reconstructed via a mapping procedure with minimal a-priori information. Experiments are carried out on full 3″ diameter wafers spun with pure xylene or pure butyl acetate, and the thickness profile at all points on the wafer can be determined. Differences in the topology of these solvents whilst drying are linked back to the solvent properties. The color to thickness mapping procedure is shown to have less than 5 % error in determined thickness values between 2μm and 100nm. The possible length scale resolved by the imaging is fully discussed as a function of radius, spin speed, strobe pulse duration and hardware used. The studies in this work achieved a minimum lateral resolution of 315μm when observing a full wafer, which is sufficiently detailed to properly reconstruct thickness variations caused by common spin-coating defects such as comets. The large area and scalable nature of this metrology technique lends itself to applications in semiconductor manufacturing where substrates of 300 mm are standard.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"184 ","pages":"Article 108692"},"PeriodicalIF":3.5,"publicationDate":"2024-11-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142661195","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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