Atomic Layer Deposition最新文献

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Crystalline as-deposited TiO 2 anatase thin films grown from TDMAT and water using thermal atomic layer deposition with in situ layer-by-layer air annealing 利用热原子层沉积和原位逐层空气退火技术，从 TDMAT 和水中生长出晶体状沉积 TiO 2 锐钛矿薄膜

Atomic Layer Deposition Pub Date : 2024-06-04 DOI: 10.3897/aldj.2.117753

Jamie P. Wooding, K. Kalaitzidou, M. Losego

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引用次数: 0

Atmospheric-pressure plasma-enhanced spatial atomic layer deposition of silicon nitride at low temperature 大气压等离子体增强低温氮化硅空间原子层沉积

Atomic Layer Deposition Pub Date : 2023-03-27 DOI: 10.3897/aldj.1.101651

Jie Shen, Fred Roozeboom, Alfredo Mameli

引用次数: 0