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2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)最新文献

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A Low-Noise Mixed Signal ASIC for Navigation-Grade Resonant MEMS Accelerometer 用于导航级谐振式MEMS加速度计的低噪声混合信号ASIC
2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2022-05-08 DOI: 10.1109/INERTIAL53425.2022.9787724
R. Dejaeger, O. Lefort, Mathieu Jeanneteau, J. Muguet
{"title":"A Low-Noise Mixed Signal ASIC for Navigation-Grade Resonant MEMS Accelerometer","authors":"R. Dejaeger, O. Lefort, Mathieu Jeanneteau, J. Muguet","doi":"10.1109/INERTIAL53425.2022.9787724","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787724","url":null,"abstract":"In this paper, we present the concepts used and the optimizations carried out by Thales to increase the performances and reliability of a newly developed accelerometer. Previous work already showed that the accelerometer is compatible with Navigation-grade applications and that a high maturity level of the product has been reached. This paper will focus this time on the solutions implemented on the Application-Specific Integrated Circuit (ASIC) to drive the resonator with high vibration amplitude and to obtain low electronic noise, both leading to a very good Signal-to-Noise Ratio (SNR). The implemented Initiated and Continuous Built-In Test (IBIT and CBIT) that increase the reliability even further will also be presented.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"102 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116471679","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
The BDRIE-HS* Technology Approach for Tiny Motion Detection with Improved Sensitivity and Noise Performance 改进灵敏度和噪声性能的微小运动检测的BDRIE-HS*技术方法
2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2022-05-08 DOI: 10.1109/INERTIAL53425.2022.9787762
R. Forke, K. Hiller, S. Hahn, A. Shaporin, S. Weidlich, D. Bülz, M. Küchler, D. Reuter, Christian Helke, D. Wünsch, K. Gottfried, H. Kuhn
{"title":"The BDRIE-HS* Technology Approach for Tiny Motion Detection with Improved Sensitivity and Noise Performance","authors":"R. Forke, K. Hiller, S. Hahn, A. Shaporin, S. Weidlich, D. Bülz, M. Küchler, D. Reuter, Christian Helke, D. Wünsch, K. Gottfried, H. Kuhn","doi":"10.1109/INERTIAL53425.2022.9787762","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787762","url":null,"abstract":"Within this contribution we introduce and describe our new technology approach with very high sensitivity and large seismic masses. The principle of this approach is explained together with integration concepts into our existing HAR technologies. As a first application example, 2D wideband vibration sensors with large masses, high sensitivity and a rather small footprint have been fabricated. The new sensors show promising improvements compared to their counterparts fabricated with the conventional BDRIE technology. Based on these results and as an outlook for the next step, the potential of this new approach for highly stable and sensitive MEMS gyroscopes is estimated.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122652350","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Open source bio-logger for monitoring and recording inertial movement 用于监测和记录惯性运动的开源生物记录仪
2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2022-05-08 DOI: 10.1109/INERTIAL53425.2022.9787736
S. Viollet, Nicolas Huloux, J. Diperi, J. Ingargiola, A. Kato, Y. Ropert‐Coudert
{"title":"Open source bio-logger for monitoring and recording inertial movement","authors":"S. Viollet, Nicolas Huloux, J. Diperi, J. Ingargiola, A. Kato, Y. Ropert‐Coudert","doi":"10.1109/INERTIAL53425.2022.9787736","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787736","url":null,"abstract":"There is a growing interest for bio-logging and the measurement of animal or human motion. However, most of the technical solutions are commercial and therefore fit hardly to particular needs. Here, we describe in details an Arduino-based stand-alone logger featuring a 32-bit microcontroller, an IMU, a Bluetooth link and a SD card. Angular speeds and 3D orientations measurements (roll, pitch and yaw angle) of the hydrofoil are done at a sampling frequency of 100 Hz while the kiteboard is moving in the open sea. Software and hardware design are made fully available on an open archive to facilitate the development of such device.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115844670","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A compact 6-axis IMU combining low-power operation with high stability and low noise 紧凑的6轴IMU，低功耗运行，高稳定性和低噪音
2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2022-05-08 DOI: 10.1109/INERTIAL53425.2022.9787744
C. Valzasina, F. Rizzini, L. Guerinoni, L. Falorni, Marco Garbarino, Stefano Polesel, Marco Milani, Matteo Quartiroli, A. Mecchia, A. Rizzo
{"title":"A compact 6-axis IMU combining low-power operation with high stability and low noise","authors":"C. Valzasina, F. Rizzini, L. Guerinoni, L. Falorni, Marco Garbarino, Stefano Polesel, Marco Milani, Matteo Quartiroli, A. Mecchia, A. Rizzo","doi":"10.1109/INERTIAL53425.2022.9787744","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787744","url":null,"abstract":"This paper presents design, architecture and characterization results of STMicroelectronics LSM6DSV16X 6-axis Inertial Measurement Unit (IMU). Traditional consumer-grade IMUs have been split into low-power sensors intended for Wearable … IoT applications [1], [2] and consumer High-End sensors offering improved stability of the gyroscope and accelerometer parameters [3], [4], [5] as result of increased power consumption. LSM6DSV16X presents the traditional compact footprint of 2.5 x 3.0 mm2 housed in a plastic full mold LGA package and it is the first sensor to offer state-of-the-art stability performance, Zero Rate Level (ZRL) temperature drift of ± 5 mdps/K, Zero-g Level (ZgL) temperature drift lower than ± 0.1 mg/K together with 650 µA current consumption in high-performance mode, combined with extremely low gyroscope noise of 2.8 mdps/√(Hz).","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127531398","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Frequency Modulated MEMS Lorentz Force Magnetometer Using CW/CCW Modes 使用CW/CCW模式的调频MEMS洛伦兹力磁强计
2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2022-05-08 DOI: 10.1109/INERTIAL53425.2022.9787717
Linxin Zhang, T. Tsukamoto, Shuji Tanaka
{"title":"Frequency Modulated MEMS Lorentz Force Magnetometer Using CW/CCW Modes","authors":"Linxin Zhang, T. Tsukamoto, Shuji Tanaka","doi":"10.1109/INERTIAL53425.2022.9787717","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787717","url":null,"abstract":"This paper reports a fully differential frequency modulated (FM) Lorentz force MEMS magnetometer using superposed clockwise (CW) and counter clockwise (CCW) modes of a 2-axis degenerated resonator. The Lorentz force generated by sensing currents synchronous to the oscillation modulate the resonant frequencies. Sensing currents correspond to CW mode and CCW mode have the same amplitudes but opposite directions, thus the frequency difference could be generated by the applied magnetic field. The common-mode shift of frequency caused by temperature could be removed by this method. The principle of operation was demonstrated by the numerical simulation. The sensitivity of the frequency to the applied magnetic field estimated by the simulation was 55.2 Hz/T. The MEMS device was fabricated and the sensitivity of the magnetometer was experimentally evaluated by using frequency modulation mode. The experimental sensitivity of magnetometer was 63.46 Hz/T, which was close to the result of simulation.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"98 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121368231","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A MEMS gravimeter with multi-axis gravitational sensitivity 具有多轴重力灵敏度的MEMS重力仪
2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2021-02-10 DOI: 10.1109/INERTIAL53425.2022.9787754
R. Middlemiss, P. Campsie, W. Cunningham, R. Douglas, Victoria McIvor, Vinod Belwanshi, J. Hough, S. Rowan, D. Paul, A. Prasad, G. D. Hammond
{"title":"A MEMS gravimeter with multi-axis gravitational sensitivity","authors":"R. Middlemiss, P. Campsie, W. Cunningham, R. Douglas, Victoria McIvor, Vinod Belwanshi, J. Hough, S. Rowan, D. Paul, A. Prasad, G. D. Hammond","doi":"10.1109/INERTIAL53425.2022.9787754","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787754","url":null,"abstract":"A single-axis Microelectromechanical system gravimeter has recently been developed at the University of Glasgow. The sensitivity and stability of this device was demonstrated by measuring the Earth tides. The success of this device was enabled in part by its extremely low resonant frequency. This low frequency was achieved with a geometric anti-spring design, fabricated using well-established photolithography and dry etch techniques. Analytical models can be used to calculate the results of these non-linear oscillating systems, but the power of finite element analysis has not been fully utilised to explore the parameter space before now. In this article finite element models are used to investigate the behaviour of geometric anti-springs. These computer models provide the ability to investigate the effect of the fabrication material of the device: anisotropic <100> crystalline silicon. This is a parameter that is difficult to investigate analytically, but finite element modelling is used to take anisotropy into account. The finite element models are then used to demonstrate the design of a three-axis gravimeter enabling the gravity tensor to be measured - a significantly more powerful tool than the original single-axis device.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-02-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122816681","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
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