The BDRIE-HS* Technology Approach for Tiny Motion Detection with Improved Sensitivity and Noise Performance

Abstract

Within this contribution we introduce and describe our new technology approach with very high sensitivity and large seismic masses. The principle of this approach is explained together with integration concepts into our existing HAR technologies. As a first application example, 2D wideband vibration sensors with large masses, high sensitivity and a rather small footprint have been fabricated. The new sensors show promising improvements compared to their counterparts fabricated with the conventional BDRIE technology. Based on these results and as an outlook for the next step, the potential of this new approach for highly stable and sensitive MEMS gyroscopes is estimated.