{"title":"Analysis and Optimization of MEMS Electrostatic Microactuator","authors":"V. Behjat, A. Vahedi","doi":"10.1109/ICIINFS.2007.4579223","DOIUrl":"https://doi.org/10.1109/ICIINFS.2007.4579223","url":null,"abstract":"This paper presents the results of analysis and optimizing a MEMS electrostatic microactuator. Although, variable kinds of MEMS microactuators have built but the most commonly used ones are electrostatic micromotors. In this paper, a practical design for a variable capacitance electrostatic micromotor has been analyzed using a two-dimensional numerical finite element method. optimization the micromotor means maximizing its driving torque or minimizing the torque ripple. The procedure presented here for optimizing the micromotor consists of two stages: optimization the excitation sequence and optimization the geometric structure. Several excitation sequences have been studied for maximizing the driving torque, and finally the optimal excitation sequence has been found for supplying the micromotor. Geometric structure is optimized to minimize the torque ripple. The geometric structure optimization procedure is based on the successive sampling of geometric parameters. This paper demonstrates the optimal values for some geometric parameters witch is of great advantage during design stage of the micromotor. These parameters include stator tooth width, rotor tooth width and slot radius.","PeriodicalId":421462,"journal":{"name":"2007 International Conference on Perspective Technologies and Methods in MEMS Design","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131384111","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
V. Antonyuk, E.I. Klepfer, M. Lobur, J. Zaharko, M. Pereyma
{"title":"The Control Unit of PCI Bus","authors":"V. Antonyuk, E.I. Klepfer, M. Lobur, J. Zaharko, M. Pereyma","doi":"10.1109/MEMSTECH.2007.4283444","DOIUrl":"https://doi.org/10.1109/MEMSTECH.2007.4283444","url":null,"abstract":"Possible paths for technical implementation of the PCI bus controller of the computer complex of radio engineering system are considered.","PeriodicalId":421462,"journal":{"name":"2007 International Conference on Perspective Technologies and Methods in MEMS Design","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126365072","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"An optimization procedure for a fiber optic accelerometer","authors":"T. Grigorie","doi":"10.1109/MEMSTECH.2007.4283416","DOIUrl":"https://doi.org/10.1109/MEMSTECH.2007.4283416","url":null,"abstract":"The paper approaches a fiber optic accelerometer with Bragg grating both from the point of view of the mathematical modeling and from the proposing of an optimization method for it. Finally, the accelerometer is numerical simulated to validate the mathematical model and the proposed optimization method, that lead to the obtaining of a univocal and symmetric measurement domain relative to the null acceleration.","PeriodicalId":421462,"journal":{"name":"2007 International Conference on Perspective Technologies and Methods in MEMS Design","volume":"342 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115969134","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Simulation of Electromechanical Systems Driven by Large Random Vibrations","authors":"E. Halvorsen, L. Blystad, S. Husa, E. Westby","doi":"10.1109/MEMSTECH.2007.4283441","DOIUrl":"https://doi.org/10.1109/MEMSTECH.2007.4283441","url":null,"abstract":"In order to simulate vibration energy harvesters driven by broadbanded vibrations, lumped electromechanical models driven by large noise signals must be implemented. We accomplish this in SPICE using externally generated random input signals. The random signals are modeled as colored noise obtained by Altering white noise. A damped mass-spring system, with a Duffing spring, is used as a test case to verify the procedure. An electrostatic vibration energy harvester is then simulated using the same procedure. The power output and RMS mass displacement of the energy harvester are calculated as functions of capacitor gap and electric loading. We have demonstrated the feasibility of simulating random vibrations in a standard circuit simulator and showed a practical way of doing it.","PeriodicalId":421462,"journal":{"name":"2007 International Conference on Perspective Technologies and Methods in MEMS Design","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131476334","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Methodology of the Automated MEMS Design","authors":"V. Teslyuk, M. Lobur, P. Denysyuk, K. Kolesnyk","doi":"10.1109/MEMSTECH.2007.4283431","DOIUrl":"https://doi.org/10.1109/MEMSTECH.2007.4283431","url":null,"abstract":"In this paper, the automated MEMS design at system level is offered which is based on the generation of large number of alternative decisions on the basis of a developed AND-OR - tree, the method of alternative decision quantity decrease and multicriterion optimization task quantity decrease.","PeriodicalId":421462,"journal":{"name":"2007 International Conference on Perspective Technologies and Methods in MEMS Design","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130898203","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Jinsheng Wang, Y. Gong, G. Abba, J. Cao, Jiashun Shi, G. Cai
{"title":"Micro Milling Technologies for MEMS","authors":"Jinsheng Wang, Y. Gong, G. Abba, J. Cao, Jiashun Shi, G. Cai","doi":"10.1109/MEMSTECH.2007.4283432","DOIUrl":"https://doi.org/10.1109/MEMSTECH.2007.4283432","url":null,"abstract":"In this paper, a comprehensive introduction of micro milling technology, which is a novel micro-manufacturing technology to fabricate many materials with complex 3D and high aspect ratio structure, is presented. Compared with some other micro-manufacturing technologies, micro milling has a lot of merits, such as low cost, flexibility. The machine tool, micro mills, and monitoring devices are the key technologies, and the micro milling principles with attention to minimum chip thickness and workpiece microstructure influences are presented primarily. At last, our research in micro milling field is given.","PeriodicalId":421462,"journal":{"name":"2007 International Conference on Perspective Technologies and Methods in MEMS Design","volume":"101 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133068359","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Perspectives of Smart RFID Tags Usage Fabricated by MEMS Technologies","authors":"M. Pereyma, I. Motyka, M. Lobur","doi":"10.1109/MEMSTECH.2007.4283438","DOIUrl":"https://doi.org/10.1109/MEMSTECH.2007.4283438","url":null,"abstract":"In this paper the future trends of the smart RFID tags fabricated by MEMS technologies are discussed.","PeriodicalId":421462,"journal":{"name":"2007 International Conference on Perspective Technologies and Methods in MEMS Design","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130111512","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Features of the Nature-Language Interface for Physical Quantities Measurement Sensors Database Design Development","authors":"V. Grigoryev, R. Panchak","doi":"10.1109/MEMSTECH.2007.4283427","DOIUrl":"https://doi.org/10.1109/MEMSTECH.2007.4283427","url":null,"abstract":"In this paper features of the nature-language interface for physical quantities measurement sensors database design development are given.","PeriodicalId":421462,"journal":{"name":"2007 International Conference on Perspective Technologies and Methods in MEMS Design","volume":"333 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121251764","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"The Calculation of Signal Delay in the Semiconductors Integral Integrated Chip","authors":"S. Ivchuk, I. Kostyuk, M. Pereyma","doi":"10.1109/MEMSTECH.2007.4283443","DOIUrl":"https://doi.org/10.1109/MEMSTECH.2007.4283443","url":null,"abstract":"Simple models and analytical calculations for time analysis of signal distribution in MOS integrated chips are considered in this paper.","PeriodicalId":421462,"journal":{"name":"2007 International Conference on Perspective Technologies and Methods in MEMS Design","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126641383","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Model and Analysis of Signal Conditioning Circuit of Capacitive Microaccelerometer","authors":"R. Ivanciv, R. Zaharyuk, V. Teslyuk","doi":"10.1109/MEMSTECH.2007.4283433","DOIUrl":"https://doi.org/10.1109/MEMSTECH.2007.4283433","url":null,"abstract":"Developed signal conditioning circuit of capacitive microaccelerometer. Described principles of circuit work and described main elements. Developed mathematical model of signal conditioning. Presented results of signal conditioning and made conclusions.","PeriodicalId":421462,"journal":{"name":"2007 International Conference on Perspective Technologies and Methods in MEMS Design","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130207394","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}