{"title":"Single board impedance analyzer and transient analysis of QCR sensor response","authors":"R. Schaefer, S. Doerner, R. Lucklum, P. Hauptmann","doi":"10.1109/FREQ.2004.1418569","DOIUrl":"https://doi.org/10.1109/FREQ.2004.1418569","url":null,"abstract":"QCR (quartz crystal resonator) sensors afford the visualization and continuative research of chemical, biochemical or microreactor processes. In this context, the resonant frequency and the attenuation of the sensor are important parameters. The paper discusses a new concept for measuring both parameters within very short cycle times which allow the tracking of fast dynamic processes during those reactions.","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"115 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121226522","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
G. Mansfeld, S. Alekseev, I. Kotelyanskii, V. V. Kludzin, Yu. V. Pisarevskiĭ, N. Polzikova, V. Veretin
{"title":"Measurements of the viscosity tensor components of langatate","authors":"G. Mansfeld, S. Alekseev, I. Kotelyanskii, V. V. Kludzin, Yu. V. Pisarevskiĭ, N. Polzikova, V. Veretin","doi":"10.1109/FREQ.2004.1418537","DOIUrl":"https://doi.org/10.1109/FREQ.2004.1418537","url":null,"abstract":"Using microwave composite resonator spectroscopy and acousto-optic methods, the attenuation of acoustic waves was measured for various propagation directions and wave polarizations in langatate. These data were used for the calculation of a full set of viscosity tensor components of langatate.","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130900454","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Development of thin film getters for assuring high reliability and long lifetime to crystal oscillators","authors":"M. Amiotti, M. Moraja, A. Conte","doi":"10.1109/FREQ.2004.1418544","DOIUrl":"https://doi.org/10.1109/FREQ.2004.1418544","url":null,"abstract":"The shrinkage of hermetic packages for crystal oscillators poses tremendous challenges to keep constant the pressure during the lifetime of the device because of the considerable effect of surface outgassing and gas permeation. Getters have been used over tens of years in the vacuum tube industry to keep constant vacuum inside sealed devices. To provide a suitable getter solution to miniaturized hermetic packages, a few micron thick getter film has been developed and placed on the lid of the hermetic packages. This technical solution, the getter thin film on the lid, assures a long lifetime and stability to hermetically packaged oscillating structures.","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"221 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124389760","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
E. Seydel, H. Berger, G. Hildebrandt, H. Bradaczek
{"title":"Lattice damages in quartz crystal blanks influence on the resonator properties and on the X-ray measurement","authors":"E. Seydel, H. Berger, G. Hildebrandt, H. Bradaczek","doi":"10.1109/FREQ.2004.1418437","DOIUrl":"https://doi.org/10.1109/FREQ.2004.1418437","url":null,"abstract":"The temperature-frequency behavior of quartz crystals depends on the as-grown lattice defects in the volume as well as on process-induced surface damage. The influence of some special lattice distortions on the vibration behavior is calculated, assuming some simplified models. The degree of lattice damage is measured on blanks of different manufacturers and after different surface processing by means of the X-ray /spl Theta/-scan and /spl Omega/-scan methods. Single grains in the measuring area as well as reflection curve broadening and intensity changes are detected. It is necessary to check the lattice damage in blanks before further production steps in order to avoid crystal losses due to such damage. The curve-width and intensity measurement can be combined with automatic cut angle sorting, and the corresponding values can be used as additional sorting criteria.","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116808671","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A fast analysis of vibrations of crystal plates for resonator design applications","authors":"Ji Wang, Wenhua Zhao, Tingshan Bian","doi":"10.1109/FREQ.2004.1418527","DOIUrl":"https://doi.org/10.1109/FREQ.2004.1418527","url":null,"abstract":"Mindlin plate equations are the foundation of quartz crystal resonator analysis. In this paper, we implement the well-known Mindlin first-order equations in a Femlab environment, and find that useful solutions can be quickly obtained to examine the mode shapes that are important in the design of quartz crystal resonators. Such solutions are hard to obtain with the traditional finite element method, thus offering a rare opportunity to use the complete solutions for product design, improvement, and optimization. We showed the applications of these equations to a simple AT-cut quartz crystal strip resonator model.","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116964040","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Materials property dependence of the effective electromechanical coupling coefficient of thin film bulk acoustic resonators","authors":"Qingming Chen, Tongying Shun, Qing-Ming Wang","doi":"10.1109/FREQ.2004.1418422","DOIUrl":"https://doi.org/10.1109/FREQ.2004.1418422","url":null,"abstract":"The input electric impedance, Z/sub /spl omega//, for a three-layer (electrode/piezoelectric film/electrode) and a four layer (electrode/piezoelectric film/electrode/substrate) thin film bulk acoustic wave resonator, is derived by a one-dimensional transfer matrix method to describe the thin film resonator behavior, especially the effect of electrode and substrate layers on resonator properties. Based on the impedance spectra, the effective coupling coefficient, k/sub eff//sup 2/, of a thin film resonator can be evaluated with respect to the resonator structure and thin film properties. The calculation results for both AlN and PZT thin film resonators reveal that the mechanical Q factor of the thin film piezoelectric material has a significant effect on the k/sub eff//sup 2/ of the device. k/sub eff//sup 2/ decreases with the increase of the mechanical quality factor, Q, and reaches a stable value when the Q value is sufficiently high. k/sub eff//sup 2/ is also dependent on the thickness and material properties of the electrode and substrates. For a specific electrode material, a maximum value can be obtained at an appropriate electrode/piezoelectric layer thickness ratio. The frequency temperature stability of thin film resonators is also evaluated with respect to the resonator structure and material properties.","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"76 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117024079","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
L. Rodríguez-Pardo, J. Fariña, C. Gabrielli, H. Perrot, R. Brendel
{"title":"Methodology of design of electronic circuit oscillators for QCM sensors in liquid media","authors":"L. Rodríguez-Pardo, J. Fariña, C. Gabrielli, H. Perrot, R. Brendel","doi":"10.1109/FREQ.2004.1418570","DOIUrl":"https://doi.org/10.1109/FREQ.2004.1418570","url":null,"abstract":"This work deals with the development of a methodology for the design of electronic circuit oscillators for quartz crystal microbalance (QCM) applications in damping media. The developed methodology allows the design requirements of an oscillator topology to be obtained as a function of the resonator operating conditions (characteristics of the working media and of mass to sense). This methodology allows the oscillation condition to be studied and the critical values of the components, the possible oscillation areas and the optimal expressions that allow the losses maintaining the oscillation to be obtained.","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"323 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122625498","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Po-Hsun Sung, C. Fang, P. Chang, Y. Chin, Pei-Yen Chen
{"title":"The method for integrating FBAR with circuitry on CMOS chip","authors":"Po-Hsun Sung, C. Fang, P. Chang, Y. Chin, Pei-Yen Chen","doi":"10.1109/FREQ.2004.1418520","DOIUrl":"https://doi.org/10.1109/FREQ.2004.1418520","url":null,"abstract":"A method is described to integrate a 3/spl times/2 ladder type film bulk acoustic wave (FBAR) filter on a CMOS chip. The modified Mason equivalent circuit model is used to simulate the FBAR characteristics. The filter is designed by the insertion loss method to meet the requirements. A low noise amplifier (LNA) has been designed and manufactured by the UMC 0.18 /spl mu/m process. By the use of a post CMOS process, the FBAR filter structure can be realized on a CMOS chip. Finally, the mass loading frequency trimming method can adjust the center frequency of the FBAR. The feasibility of integration can be proved by this method.","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128808958","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
F. P. Stratton, D. Chang, D. Kirby, R. Joyce, T. Hsu, R. Kubena, Y. Yong
{"title":"A MEMS-based quartz resonator technology for GHz applications","authors":"F. P. Stratton, D. Chang, D. Kirby, R. Joyce, T. Hsu, R. Kubena, Y. Yong","doi":"10.1109/FREQ.2004.1418425","DOIUrl":"https://doi.org/10.1109/FREQ.2004.1418425","url":null,"abstract":"We report on the development of a new MEMS quartz resonator technology that allows for the processing and integration of VHF to UHF high-Q oscillators and filters with high-speed silicon or III-V electronics. The paper describes the successful demonstration of new wafer bonding and dry plasma etching processes that make quartz-MEMS technology possible. We present impedance, Q, and temperature sensitivity data along with comparison to 3D harmonic and thermal analysis of VHF-UHF resonators. We also show Coventor simulation data of our first two- and three-pole monolithic crystal filter designs as well as a filter array layout which facilitates integration with front-end RF electronics and switches. Finally, we demonstrate a mechanical tuning technique for our resonators utilizing focused-ion-beam (FIB) technology.","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129987284","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Cylindrical distributed Bragg reflector resonators with extremely high Q-factors","authors":"M. Tobar, J. Hartnett, J. Le Floch, D. Cros","doi":"10.1109/FREQ.2004.1418462","DOIUrl":"https://doi.org/10.1109/FREQ.2004.1418462","url":null,"abstract":"A simple non-Maxwellian method is presented that allows the approximate solution of all the dimensions of a multilayered dielectric TE/sub 0qp/ mode cylindrical resonant cavity that constitutes a distributed Bragg reflection (DBR) resonator. The analysis considers an arbitrary number of alternating dielectric and free space layers of cylindrical geometry enclosed by a metal cylinder. The layers may be arranged axially, radially or both. Given only the aspect ratio of the cavity, the desired frequency and the dielectric constants of the material layers, the relevant dimensions are determined from only a set of simultaneous equations, and iterative techniques are not required. The formulas were verified using rigorous method of lines (MoL) calculations, and previously published experimental work. We show that the simple approximation gives dimensions close to the values of the optimum Bragg reflection condition determined by the rigorous analysis. The resulting solution is more compact with a higher Q-factor when compared to other reported cylindrical DBR structures. This is because, unlike previous analyses, it properly takes into account the effect of the aspect ratio on the Bragg anti-resonance condition along the z-axis of the resonator. By properly taking the aspect ratio into account, we show that the thickness of the Bragg reflectors is equivalent to the thickness of plane wave Bragg reflectors (or quarter wavelength plates). Thus it turns out that the sizes of the reflectors are related to the free space propagation constant, rather than the propagation constant in the z direction.","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"198 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124445853","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}