Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)最新文献_第10页

Frequency temperature behavior of bi-mesa shaped at cut quartz resonators 切割石英谐振器双台面的频率温度特性

Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218) Pub Date : 2001-06-06 DOI: 10.1109/FREQ.2001.956355

S. Goka, H. Sekimoto, Y. Watanabe, T. Sato

{"title":"Frequency temperature behavior of bi-mesa shaped at cut quartz resonators","authors":"S. Goka, H. Sekimoto, Y. Watanabe, T. Sato","doi":"10.1109/FREQ.2001.956355","DOIUrl":"https://doi.org/10.1109/FREQ.2001.956355","url":null,"abstract":"To confirm the effect of bi-mesa structures on the decoupling of thickness-shear (TS) and thickness-flexure (TF) modes, we measured the frequency-temperature behavior of bi-mesa shaped AT cut quartz resonators. The TF mode couples with the TS mode because the same displacement component is contained within the TS mode. This strong coupling cannot be eliminated as long as the plates have boundaries. Therefore, the temperature characteristics of the fundamental TS mode are clearly affected by the TF components. Bi-mesa structures have an energy trapping effect large enough to spatially separate the vibrational modes, so bi-mesa structures can decrease the effect of TF components. Therefore, the frequency-temperature behavior of a bi-mesa resonator is close to that of an infinite plate, which has no TF component effect. The bi-mesa resonators used in this study were fabricated using a wet etching process, and the fundamental TS frequency was 8.3 MHz. The frequency-temperature behavior was measured using a network analyzer. Results showed that bi-mesa resonators have temperature characteristics four times better than those of flat resonators, ranging from -20 to 85/spl deg/C. These results confirm the energy trapping effect of bi-mesa structures and their effectiveness in separating vibrational modes.","PeriodicalId":369101,"journal":{"name":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","volume":"2017 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132993509","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 8

The analysis of non-homogeneity of SAW velocity in langasite langasite中SAW速度的非均匀性分析

Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218) Pub Date : 2001-06-06 DOI: 10.1109/FREQ.2001.956196

S. Sakharov, O. Buzanov, A. Medvedev, S. Kondratiev, E. Girardet, T. Thorvaldsson

{"title":"The analysis of non-homogeneity of SAW velocity in langasite","authors":"S. Sakharov, O. Buzanov, A. Medvedev, S. Kondratiev, E. Girardet, T. Thorvaldsson","doi":"10.1109/FREQ.2001.956196","DOIUrl":"https://doi.org/10.1109/FREQ.2001.956196","url":null,"abstract":"The research results of the influence of different technology parameters of crystal growth and device manufacturing process on SAW velocity variation on langasite (LGS) wafers O 3\" are presented. The wafers were made from crystals grown by the Czochralski method along <00.1> and <01.1> directions. The paper also gives a technology process description of langasite crystal growth along <01.1> direction and of making O 3\" wafers. SAW velocity measurements were performed utilizing specially developed test structures. The test structures were also used to estimate the device sensitivity due to electrode thickness and electrode width variations of the manufacturing process.. Advantages of LGS wafers for possible SAW device applications are discussed. Due to good temperature stability and a moderately high electromechanical coupling coefficient, langasite is known as a promising material for SAW devices. The filters on LGS have exhibited better electrical parameters than their analogues on quartz and lithium tantalate. In order to demonstrate a practical filter application on LGS, a SAW filter at the center frequency of 114.99 MHz was designed and realized. The chip fits into a 3.8/spl times/3.8 mm/sup 2/ SMD package. Measured performance is in excellent agreement with the predicted response and the chip size was dramatically reduced compared to the state-of-the-art for this kind of filter.","PeriodicalId":369101,"journal":{"name":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130937546","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

A derivation of two-dimensional equations for the vibration of electroded piezoelectric plates using an unrestricted thickness expansion of the electric potential 利用不受限制的电势厚度展开，推导出电致压电片振动的二维方程

Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218) Pub Date : 2001-06-06 DOI: 10.1109/FREQ.2001.956341

H. Tiersten

{"title":"A derivation of two-dimensional equations for the vibration of electroded piezoelectric plates using an unrestricted thickness expansion of the electric potential","authors":"H. Tiersten","doi":"10.1109/FREQ.2001.956341","DOIUrl":"https://doi.org/10.1109/FREQ.2001.956341","url":null,"abstract":"In the derivation of two-dimensional equations for the vibration of piezoelectric plates from variational equations, expansions of the mechanical and electrical variables in the thickness coordinate are employed. If the major surfaces of the plate are electroded and the electric potential is expanded in functions of the thickness coordinate which do not vanish at the electrodes, the variations of the different orders of the expansion potentials are not independent because the electric potential must satisfy constraint conditions at the electrodes where it is independent of position. In this work the electric potential is expanded in functions of the thickness coordinate which do not vanish at the surface electrodes and the constraint conditions are included by means of the method of Lagrange multipliers. The resulting piezoelectric plate equations are obtained along with an integral condition on the Lagrange multipliers over the electrodes, which results in the equation for the current through the electrodes. It is shown that the elimination of the Lagrange multipliers results in a reduced system of electrostatic plate equations and associated edge conditions, which is easier to use.","PeriodicalId":369101,"journal":{"name":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125218638","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 5

A bulk acoustic wave resonator for sensing liquid electrical property changes 一种用于检测液体电性能变化的体声波谐振器

Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218) Pub Date : 2001-06-06 DOI: 10.1109/FREQ.2001.956336

C. Zhang, J. Vetelino

引用次数: 14

All quartz surface mount resonators 所有石英表面安装谐振器

Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218) Pub Date : 2001-06-06 DOI: 10.1109/FREQ.2001.956245

W. D. Beaver

引用次数: 3

Thin film shear modulus determination with quartz crystal resonators: a review 石英晶体谐振器测定薄膜剪切模量的研究进展

Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218) Pub Date : 2001-06-06 DOI: 10.1109/FREQ.2001.956262

R. Lucklum, P. Hauptmann

引用次数: 13

Characteristics of surface acoustic waves propagating obliquely in periodic electrode gratings 周期性电极光栅中表面声波的斜传播特性

Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218) Pub Date : 2001-06-06 DOI: 10.1109/FREQ.2001.956357

V. Laude, S. Ballandras

引用次数: 3

Design of a cryogenic dual-mode resonator for a fly-wheel oscillator for a cesium frequency standard 铯频率标准飞轮振荡器低温双模谐振器的设计

Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218) Pub Date : 2001-06-06 DOI: 10.1109/FREQ.2001.956369

M. Tobar, J. Hartnett, E. Ivanov, D. Cros, P. Bilski

引用次数: 4

Improvement of frequency drift of at-cut resonators using an unelectroded resonant region 利用非电极谐振区改进at-cut谐振器的频率漂移

Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218) Pub Date : 2001-06-06 DOI: 10.1109/FREQ.2001.956351

K. Hirama, H. Konno, K. Asao, K. Nakamura

引用次数: 1

Hysteresis characteristics vs relative humidity for AT-Cut quartz humidity sensors AT-Cut石英湿度传感器的滞后特性与相对湿度的关系

Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218) Pub Date : 2001-06-06 DOI: 10.1109/FREQ.2001.956283

M. Kuroiwa, Y. Shimamoto, Y. Yasuda, S. Wakamoto, M. Nakazawa

引用次数: 2