一种用于检测液体电性能变化的体声波谐振器

Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218) Pub Date : 2001-06-06 DOI:10.1109/FREQ.2001.956336

C. Zhang, J. Vetelino

{"title":"一种用于检测液体电性能变化的体声波谐振器","authors":"C. Zhang, J. Vetelino","doi":"10.1109/FREQ.2001.956336","DOIUrl":null,"url":null,"abstract":"A thickness shear mode (TSM) bulk acoustic wave (BAW) sensor for liquid electrical property (conductivity and dielectric constant) measurements is presented. This sensor, which is configured as a resonator structure, employs a sensing electrode geometry, which allows the accurate measurement of the liquid electrical properties. The frequency response of the sensor has been measured in both conductive (NaCl) and non-conductive (2-proponal) solutions. A theoretical model has been developed to describe the sensor operating in liquids and the calculated impedance is shown to agree well with the measured impedance. The sensitivity of this sensor to the change in liquid dielectric constant has been determined. Compared with other sensing technologies, the present sensor may provide a more reliable, portable and low cost solution for on-line monitoring of the liquid electrical property changes.","PeriodicalId":369101,"journal":{"name":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","volume":"12 4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"14","resultStr":"{\"title\":\"A bulk acoustic wave resonator for sensing liquid electrical property changes\",\"authors\":\"C. Zhang, J. Vetelino\",\"doi\":\"10.1109/FREQ.2001.956336\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A thickness shear mode (TSM) bulk acoustic wave (BAW) sensor for liquid electrical property (conductivity and dielectric constant) measurements is presented. This sensor, which is configured as a resonator structure, employs a sensing electrode geometry, which allows the accurate measurement of the liquid electrical properties. The frequency response of the sensor has been measured in both conductive (NaCl) and non-conductive (2-proponal) solutions. A theoretical model has been developed to describe the sensor operating in liquids and the calculated impedance is shown to agree well with the measured impedance. The sensitivity of this sensor to the change in liquid dielectric constant has been determined. Compared with other sensing technologies, the present sensor may provide a more reliable, portable and low cost solution for on-line monitoring of the liquid electrical property changes.\",\"PeriodicalId\":369101,\"journal\":{\"name\":\"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)\",\"volume\":\"12 4 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2001-06-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"14\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/FREQ.2001.956336\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/FREQ.2001.956336","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 14

摘要

提出了一种测量液体电导率和介电常数的厚度剪切型体声波传感器。该传感器配置为谐振器结构，采用传感电极几何形状，可以精确测量液体电性能。测量了传感器在导电(NaCl)和非导电(2-丙基)溶液中的频率响应。建立了一个描述传感器在液体中工作的理论模型，计算的阻抗与测量的阻抗吻合良好。测定了该传感器对液体介电常数变化的灵敏度。与其他传感技术相比，该传感器可为在线监测液体电性能变化提供更可靠、便携和低成本的解决方案。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A bulk acoustic wave resonator for sensing liquid electrical property changes

A thickness shear mode (TSM) bulk acoustic wave (BAW) sensor for liquid electrical property (conductivity and dielectric constant) measurements is presented. This sensor, which is configured as a resonator structure, employs a sensing electrode geometry, which allows the accurate measurement of the liquid electrical properties. The frequency response of the sensor has been measured in both conductive (NaCl) and non-conductive (2-proponal) solutions. A theoretical model has been developed to describe the sensor operating in liquids and the calculated impedance is shown to agree well with the measured impedance. The sensitivity of this sensor to the change in liquid dielectric constant has been determined. Compared with other sensing technologies, the present sensor may provide a more reliable, portable and low cost solution for on-line monitoring of the liquid electrical property changes.

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Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)

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