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2012 24th Chinese Control and Decision Conference (CCDC)最新文献

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Development of in-situ real-time CD monitoring and control system through PEB process 基于PEB工艺的CD现场实时监控系统的开发
2012 24th Chinese Control and Decision Conference (CCDC) Pub Date : 2012-05-23 DOI: 10.1109/CCDC.2012.6243076
Geng Yang, A. Tay, W. Ho
{"title":"Development of in-situ real-time CD monitoring and control system through PEB process","authors":"Geng Yang, A. Tay, W. Ho","doi":"10.1109/CCDC.2012.6243076","DOIUrl":"https://doi.org/10.1109/CCDC.2012.6243076","url":null,"abstract":"Real-time control is the trend for photoresist processing in the advanced lithography. In this paper we develop an in-situ ellipsometer integrated with a programmable thermal heating system, which could perform real-time monitoring and control for critical dimension (CD) latent image through the entire post-exposure bake (PEB) process. The inline ellipsometry measurements are fitted into an electromagnetic wave model built on the rigorous coupled-wave analysis (RCWA) theory for CD latent image characterization. Thereafter a real-time control scheme is proposed by applying the programmable thermal bake-plate. The experimental outcome demonstrates a significant improvement on the final CD result comparing to the conventional baking method.","PeriodicalId":345790,"journal":{"name":"2012 24th Chinese Control and Decision Conference (CCDC)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114163297","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Power system short-term load forecasting based on neural network with artificial immune algorithm 基于人工免疫算法的神经网络电力系统短期负荷预测
2012 24th Chinese Control and Decision Conference (CCDC) Pub Date : 2012-05-23 DOI: 10.1109/CCDC.2012.6244131
Huang Yue, Li Dan, Gao Liqun
{"title":"Power system short-term load forecasting based on neural network with artificial immune algorithm","authors":"Huang Yue, Li Dan, Gao Liqun","doi":"10.1109/CCDC.2012.6244131","DOIUrl":"https://doi.org/10.1109/CCDC.2012.6244131","url":null,"abstract":"This paper offers one kind of improved artificial immune algorithm which takes different mutation strategy toward different unit that has various quality. This algorithm conducts self-adapt adjustment between mutation rate and crossover rate in order to achieve balance between search accuracy and search efficiency. This paper conducts DAIA-BPNN short-term power load forecast model based on DAIA algorithm. It uses DAIA algorithm to optimize the weight and threshold of BPNN while overcoming the blindness when selecting the weight and threshold of BPNN. The actual calculation example of the short-term power system load forecast shows that the method presented in this paper has higher forecast accuracy and robustness compared with artificial neural networks and regression analysis model.","PeriodicalId":345790,"journal":{"name":"2012 24th Chinese Control and Decision Conference (CCDC)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114547931","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
On computation of distributed supervisory controllers in discrete-event systems 离散事件系统中分布式监控控制器的计算
2012 24th Chinese Control and Decision Conference (CCDC) Pub Date : 2012-05-23 DOI: 10.1109/CCDC.2012.6242986
Renyuan Zhang, Y. Gan, Zhaoan Wang, W. Wonham
{"title":"On computation of distributed supervisory controllers in discrete-event systems","authors":"Renyuan Zhang, Y. Gan, Zhaoan Wang, W. Wonham","doi":"10.1109/CCDC.2012.6242986","DOIUrl":"https://doi.org/10.1109/CCDC.2012.6242986","url":null,"abstract":"This paper refines an earlier localization procedure used to design optimal nonblocking distributed supervisory controllers in discrete-event systems (DES). The earlier algorithm needed a control consistency relation involving two conditions, and introduced superfluous selfloops. We propose a refined procedure, including a newly defined weak control consistency relation, and a cleanup algorithm, which results in simpler and cleaner controllers. It is proved to be correct, and illustrated by a Transfer Line plant.","PeriodicalId":345790,"journal":{"name":"2012 24th Chinese Control and Decision Conference (CCDC)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121869036","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Adaptive image enhancement based on fractional differential mask 基于分数阶差分掩模的自适应图像增强
2012 24th Chinese Control and Decision Conference (CCDC) Pub Date : 2012-05-23 DOI: 10.1109/CCDC.2012.6244164
Dali Chen, Y. Chen, Dingyu Xue, Feng Pan
{"title":"Adaptive image enhancement based on fractional differential mask","authors":"Dali Chen, Y. Chen, Dingyu Xue, Feng Pan","doi":"10.1109/CCDC.2012.6244164","DOIUrl":"https://doi.org/10.1109/CCDC.2012.6244164","url":null,"abstract":"In this paper, an adaptive image enhancement based on fractional differential mask is proposed. Firstly, the designing method of the fractional differential mask is introduced and the image enhancing strategy based on the fractional differential mask is presented. Then, an unsupervised method is introduced to optimize the fractional order parameter by using the statistical character of digital image. The experiments demonstrate the validity of the proposed image enhancing algorithm.","PeriodicalId":345790,"journal":{"name":"2012 24th Chinese Control and Decision Conference (CCDC)","volume":"76 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128726558","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Lagrangian relaxation based Feasible Solution Algorithm 基于拉格朗日松弛的可行解算法
2012 24th Chinese Control and Decision Conference (CCDC) Pub Date : 2012-05-23 DOI: 10.1109/CCDC.2012.6244136
Han Yunjun, Yan Xiangdong, Wang Dan
{"title":"Lagrangian relaxation based Feasible Solution Algorithm","authors":"Han Yunjun, Yan Xiangdong, Wang Dan","doi":"10.1109/CCDC.2012.6244136","DOIUrl":"https://doi.org/10.1109/CCDC.2012.6244136","url":null,"abstract":"Lagrangian relaxation is widely and efficiently applied to solve large scale integer programming problems. One of the most challenging issues for Lagrangian relaxation based approaches is to obtain a good feasible solution based on the optimal dual solution. In this paper, a Feasible Solution Algorithm in Largrangian relaxation framework is proposed to systematically obtain a feasible solution. The basic idea is to gradually add relaxed constraints back into the subproblems which are then solved successively. The numerical testing results show that this method can not only alleviate dual solution oscillation and zigzag phenomena but also can achieve fast converge and obtain feasible solutions.","PeriodicalId":345790,"journal":{"name":"2012 24th Chinese Control and Decision Conference (CCDC)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128269981","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
A new fire detection method based on integrated features 一种基于综合特征的火灾探测新方法
2012 24th Chinese Control and Decision Conference (CCDC) Pub Date : 2012-05-23 DOI: 10.1109/CCDC.2012.6244151
Liu Mengxin, Xu Weijing, Zhang Ying, Zhang Rui
{"title":"A new fire detection method based on integrated features","authors":"Liu Mengxin, Xu Weijing, Zhang Ying, Zhang Rui","doi":"10.1109/CCDC.2012.6244151","DOIUrl":"https://doi.org/10.1109/CCDC.2012.6244151","url":null,"abstract":"Because of high fire frequency and huge losses, the research of fire signal detection in the monitoring system is an important task in the fire-preventing field. A new fire signal detection method based on integrated features of flame is proposed in the paper. With the difference of background and foreground objects achieved in video, the moving target can be detected to judge if there are characteristics of flame, which includes color and saturation, flashing characteristics, spatial wavelet energy and circularity. The fire signal detection method presented can overcome the shortcomings that exist in some traditional methods i.e. it can surmount the large impact on environmental interference factors, such as temperature, photographic and smoke of environment. By a large amount of experiments, it shows clearly that the error rate of flame recognition is low, and also the real-time ability and the anti-disturbance ability are very good.","PeriodicalId":345790,"journal":{"name":"2012 24th Chinese Control and Decision Conference (CCDC)","volume":"70 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128718006","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Input-to-state stability of recurrent neural networks with time-varying delays and Markovian switching 具有时变延迟和马尔可夫切换的递归神经网络的输入状态稳定性
2012 24th Chinese Control and Decision Conference (CCDC) Pub Date : 2012-05-23 DOI: 10.1109/CCDC.2012.6243023
Yong Xu, Song Zhu
{"title":"Input-to-state stability of recurrent neural networks with time-varying delays and Markovian switching","authors":"Yong Xu, Song Zhu","doi":"10.1109/CCDC.2012.6243023","DOIUrl":"https://doi.org/10.1109/CCDC.2012.6243023","url":null,"abstract":"This paper presents an algebraic criterion for the input-to-state stability (ISS) of recurrent neural networks with Markovian switching. The criterion is easy to be verified with the connection weights. A numerical example is given to demonstrate the effectiveness of the proposed criteria.","PeriodicalId":345790,"journal":{"name":"2012 24th Chinese Control and Decision Conference (CCDC)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129060105","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Stabilization of a class of switched stochastic systems with asynchronous switching 一类具有异步切换的切换随机系统的镇定
2012 24th Chinese Control and Decision Conference (CCDC) Pub Date : 2012-05-23 DOI: 10.1109/CCDC.2012.6244084
Yue-E. Wang, Ximing Sun, Jun Zhao
{"title":"Stabilization of a class of switched stochastic systems with asynchronous switching","authors":"Yue-E. Wang, Ximing Sun, Jun Zhao","doi":"10.1109/CCDC.2012.6244084","DOIUrl":"https://doi.org/10.1109/CCDC.2012.6244084","url":null,"abstract":"This paper concerns the asynchronously switched control problem for a class of switched stochastic systems with time delays under an average dwell time (ADT) scheme. By further allowing the Lyapunov-Krasovskii functional to increase during the running time of the active subsystem with the mismatched controller, the mean-square exponential stability condition for the resulting closed-loop system is firstly derived. Then, the corresponding solvability condition for desired controllers is established. Finally, two numerical examples are exploited to show the validity and potential of the developed result.","PeriodicalId":345790,"journal":{"name":"2012 24th Chinese Control and Decision Conference (CCDC)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129477186","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Adaptive fault-tolerant tracking controller design against actuator stuck faults 针对执行器卡滞故障的自适应容错跟踪控制器设计
2012 24th Chinese Control and Decision Conference (CCDC) Pub Date : 2012-05-23 DOI: 10.1109/CCDC.2012.6244655
Xiao-Ni Zhang, Jianliang Wang, Guanghong Yang
{"title":"Adaptive fault-tolerant tracking controller design against actuator stuck faults","authors":"Xiao-Ni Zhang, Jianliang Wang, Guanghong Yang","doi":"10.1109/CCDC.2012.6244655","DOIUrl":"https://doi.org/10.1109/CCDC.2012.6244655","url":null,"abstract":"This paper studies the problem of adaptive fault-tolerant tracking control for linear continuous-time systems with actuator stuck faults. A design method of an adaptive fault-tolerant tracking controller is developed based on the online estimation of the functioning of the actuators that is used to monitor the health of the system. In the event of actuator stuck faults, a compensation controller is incorporated into the initial controller to improve control effect and reject the zero-frequency disturbance produced by the stuck-actuators. Finally, the design procedure and the advantage of the proposed method are illustrated via a numerical example of flight control of an F-16 aircraft.","PeriodicalId":345790,"journal":{"name":"2012 24th Chinese Control and Decision Conference (CCDC)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129704252","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Step by step fusion SOI-KF with random packet dropping 逐步融合SOI-KF随机丢包
2012 24th Chinese Control and Decision Conference (CCDC) Pub Date : 2012-05-23 DOI: 10.1109/CCDC.2012.6244617
Na Liu, Shu-Li Sun
{"title":"Step by step fusion SOI-KF with random packet dropping","authors":"Na Liu, Shu-Li Sun","doi":"10.1109/CCDC.2012.6244617","DOIUrl":"https://doi.org/10.1109/CCDC.2012.6244617","url":null,"abstract":"To the phenomenon of the limited bandwidth in wireless sensor networks, the innovation is quantized to a one-bit datum based on its sign, which reduces the transmission burden and energy consumption. During every sampling period, it must be taken into account that the transmitted data may be lost or received by the fusion center at different time instants. So the step by step fusion SOI-KF (Kalman Filter using the Sign of Innovations) with random packet dropping is designed based on the idea of first coming first dealing. It will avoid the waiting of the data which have firstly reached the fusion center in a sampling period and reduce the high-dimension computational burden caused by augmentation in the centralized fusion. The simulation verifies the feasibility and effectiveness of the algorithm.","PeriodicalId":345790,"journal":{"name":"2012 24th Chinese Control and Decision Conference (CCDC)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130399761","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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