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2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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Vertical Integration of Force Transmission Structure on Capacitive Cmos-Mems Tactile Force Sensor for Sensitivity Improvement 电容式Cmos-Mems触觉力传感器传力结构垂直集成提高灵敏度
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2023-01-15 DOI: 10.1109/MEMS49605.2023.10052308
Yuanyuan Huang, Yen-Lin Chen, Shihwei Lin, Fuchi Shih, Zihsong Hu, W. Fang
{"title":"Vertical Integration of Force Transmission Structure on Capacitive Cmos-Mems Tactile Force Sensor for Sensitivity Improvement","authors":"Yuanyuan Huang, Yen-Lin Chen, Shihwei Lin, Fuchi Shih, Zihsong Hu, W. Fang","doi":"10.1109/MEMS49605.2023.10052308","DOIUrl":"https://doi.org/10.1109/MEMS49605.2023.10052308","url":null,"abstract":"This study extends the capacitive tactile force sensor array to develop a novel force transmission structure for sensitivity enhancement (Fig. 1). The sensor is designed and implemented using the commercial TSMC 1P6M CMOS process. Merits of the proposed design include: (1) Pillar-array force transmission structure: integrate with capacitive sensing array vertically to effectively transmit the load to each sensing elements to enhance the sensitivity; (2) Rigid force contact interface (i.e. glass bump): can be employed to further enhance the sensitivity. Measurements show that the sensitivity of proposed design with rigid glass bump is 5.04 fF/N (sensing range:5N). Compare with reference design having the same bump size, the sensitivity is increased for 2-fold.","PeriodicalId":333331,"journal":{"name":"2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-01-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115317006","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
MEMS First-Order Bessel Beam Acoustic Transducer for Particle Trapping And Controllable Rotating 用于粒子捕获和可控旋转的MEMS一阶贝塞尔光束声换能器
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2023-01-15 DOI: 10.1109/MEMS49605.2023.10052542
Jiaqi Li, Zhenhuan Sun, Yuyu Jia, Teng Li, Haojian Lu, Lurui Zhao, Hai Liu, Song Liu
{"title":"MEMS First-Order Bessel Beam Acoustic Transducer for Particle Trapping And Controllable Rotating","authors":"Jiaqi Li, Zhenhuan Sun, Yuyu Jia, Teng Li, Haojian Lu, Lurui Zhao, Hai Liu, Song Liu","doi":"10.1109/MEMS49605.2023.10052542","DOIUrl":"https://doi.org/10.1109/MEMS49605.2023.10052542","url":null,"abstract":"This paper reports a novel and easy-to-fabricate MEMS first-order Bessel beam acoustic transducer (BBAT) for particle trapping and electrically controllable rotating, in terms of the design, fabrication, characterization, and experiments. The BBAT is primarily composed of a bulk lead zirconate titanate (PZT) ceramic and polydimethylsiloxane (PDMS) membrane, bonded by SU-8 photoresist. The transducer encloses customized air-cavities in order to generate Archimedes’ spiral acoustic source. We prototyped a 2.32 MHz BBAT with the design, which was capable of firmly trapping polystyrene (PS) particles as large as 800 μm diameter under 18 Vpp, and precisely steering the rotating velocity by controlling the driving voltage. A linear relationship between the rotating velocity and driving volage square was observed, which can reach as high as 138 rpm under 150 Vpp.","PeriodicalId":333331,"journal":{"name":"2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-01-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124402581","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
High-Performance Wafer-Scale Transfer-Free Graphene Microphones 高性能晶圆级无转移石墨烯麦克风
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2023-01-15 DOI: 10.1109/MEMS49605.2023.10052360
R. Pezone, Gabriele Baglioni, P. Sarro, P. Steeneken, S. Vollebregt
{"title":"High-Performance Wafer-Scale Transfer-Free Graphene Microphones","authors":"R. Pezone, Gabriele Baglioni, P. Sarro, P. Steeneken, S. Vollebregt","doi":"10.1109/MEMS49605.2023.10052360","DOIUrl":"https://doi.org/10.1109/MEMS49605.2023.10052360","url":null,"abstract":"A repeatable method to fabricate multi-layer graphene (ML-gr) membranes of 2r = 85 – 155 μm (t < 10 nm) with a 100% yield on 100 mm wafers is demonstrated. These membranes show higher sensitivity than a commercial MEMS-Mic combined with an area reduction of 10x. The process overcomes one of the main limitations when integrating graphene diaphragms in microphones due to the absence of automatic transfer methods on non-planarized target substrates. This method aims to overcome this limitation by combining a full-dry release of Chemical Vapor Deposition (CVD) graphene by Deep Reactive Ion Etching (DRIE) and vapor HF (VHF).","PeriodicalId":333331,"journal":{"name":"2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"65 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-01-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114674834","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of Boat Model Powered by Electro-Hydrodynamic Propulsion System 以电-水动力推进系统为动力的船模研制
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2023-01-15 DOI: 10.1109/MEMS49605.2023.10052157
L. Mai, Tuan‐Khoa Nguyen, T. Vu, Thien Xuan Dinh, C. Tran, Hoang‐Phuong Phan, T. Dinh, T. Nguyen, N. Nguyen, D. Dao, Van Thanh Dau
{"title":"Development of Boat Model Powered by Electro-Hydrodynamic Propulsion System","authors":"L. Mai, Tuan‐Khoa Nguyen, T. Vu, Thien Xuan Dinh, C. Tran, Hoang‐Phuong Phan, T. Dinh, T. Nguyen, N. Nguyen, D. Dao, Van Thanh Dau","doi":"10.1109/MEMS49605.2023.10052157","DOIUrl":"https://doi.org/10.1109/MEMS49605.2023.10052157","url":null,"abstract":"This paper demonstrates the development of an ion-wind powered boat (iBoat) that offers a simple propellerless design, trivial noise, and relatively low energy consumption. The apparatus of the iBoat includes a conducting wire working as the ion emitter and the water surface as the ground electrode, eliminating the need to carry a counter electrode essential in conventional ion wind generation. A miniaturized version of the iBoat and an electro-hydrodynamic propulsion system that can generate a thrust-to-power ratio up to 1.45 mN/W using a novel wire-dielectric-water configuration. Numerical simulations will also be formulated to shed light on the physical principles underlying our novel concept.","PeriodicalId":333331,"journal":{"name":"2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"80 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-01-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117348199","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Fractal Microelectrodes Integrated With the Catheter for Low-Voltage Pulsed Field Ablation 分形微电极与导管集成用于低压脉冲场烧蚀
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2023-01-15 DOI: 10.1109/MEMS49605.2023.10052546
Mengfei Xu, Mu Qin, Zi-liang Song, Wen Hong, Qingda Xu, Jiawei Cao, Kejun Tu, Longchun Wang, Bin Yang, Jingquan Liu
{"title":"Fractal Microelectrodes Integrated With the Catheter for Low-Voltage Pulsed Field Ablation","authors":"Mengfei Xu, Mu Qin, Zi-liang Song, Wen Hong, Qingda Xu, Jiawei Cao, Kejun Tu, Longchun Wang, Bin Yang, Jingquan Liu","doi":"10.1109/MEMS49605.2023.10052546","DOIUrl":"https://doi.org/10.1109/MEMS49605.2023.10052546","url":null,"abstract":"This paper reports a novel flexible fractal microelectrode integrated with the catheter to achieve diagnosis and treatment for low-voltage pulsed field ablation (PFA). The fractal design increases the ratio of the edge length to the geometric surface area of the electrode, which contributes to the transfer of current from the electrode into the tissue. Besides, the fractal structure reduces the spacing between the electrodes, which can obtain a large electric field. Pt-Black coating enhances the electrical stimulation and electrocardiogram (ECG) recording capability. Foremost, it achieves in vivo ablation at 100 V on rat hearts. In short, the device can perform ablation procedures independently, including low-voltage PFA and ECG recording.","PeriodicalId":333331,"journal":{"name":"2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"140 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-01-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121015683","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array 微吸盘阵列的液浸倾斜旋转紫外光刻技术
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2023-01-15 DOI: 10.1109/MEMS49605.2023.10052567
Gakuto Kagawa, Hidetoshi Takahashi
{"title":"Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array","authors":"Gakuto Kagawa, Hidetoshi Takahashi","doi":"10.1109/MEMS49605.2023.10052567","DOIUrl":"https://doi.org/10.1109/MEMS49605.2023.10052567","url":null,"abstract":"This paper reports liquid-immersion inclined/rotated UV lithography for fabricating micro suction cups. Microstructures such as micro suction cups have been applied in various applications. However, the conventional fabrication method had limitations in suction force due to the insufficient inclination angle. We proposed liquid-immersion to inclined/rotated exposure (IRE), enabling greater microstructure inclination angles. IRE equipment was developed to fabricate PDMS micro suction cup arrays. The experimental inclination angle reached 51°, nearly doubling the conventional IRE method.","PeriodicalId":333331,"journal":{"name":"2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"279 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-01-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121040648","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Electromechanically Stable Interconnection between LIG and Thick Dam-Shaped Metallic Electrode via Stored AG Microparticle Solution 贮银微粒溶液实现LIG与厚坝形金属电极的机电稳定互连
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2023-01-15 DOI: 10.1109/MEMS49605.2023.10052528
Saeyoung Park, Yooyong Shin, Min-Ho Seo
{"title":"Electromechanically Stable Interconnection between LIG and Thick Dam-Shaped Metallic Electrode via Stored AG Microparticle Solution","authors":"Saeyoung Park, Yooyong Shin, Min-Ho Seo","doi":"10.1109/MEMS49605.2023.10052528","DOIUrl":"https://doi.org/10.1109/MEMS49605.2023.10052528","url":null,"abstract":"This paper reports a method for forming an electromechanically stable interconnection between Laser-induced graphene (LIG) and metallic electrode exploiting silver (Ag) micro-particle (μ-P) solution (ink) and dam-shaped thick metallic electrodes. From visual inspection, we confirmed uniformly intertwined contact between the Ag μ-P and LIG. In practice, we confirmed that the proposed concept shows ohmic contact with high reproducibility (n=100). Finally, we adapted the proposed method to demonstrate a 3-electrode electrochemical biosensor, and it successfully detected various concentrations (0–5 mM) of ferrocene with high reproducibility (n=3)","PeriodicalId":333331,"journal":{"name":"2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"2000 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-01-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127315232","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High Resolution Tactile Sensor for Measurement of a Complicated Tactile Feeling of "Shittori" With Moistness 高分辨率触觉传感器测量湿性“Shittori”复杂触觉
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2023-01-15 DOI: 10.1109/MEMS49605.2023.10052225
Genki Yamada, Yuto Morita, K. Terao, F. Shimokawa, H. Takao
{"title":"High Resolution Tactile Sensor for Measurement of a Complicated Tactile Feeling of \"Shittori\" With Moistness","authors":"Genki Yamada, Yuto Morita, K. Terao, F. Shimokawa, H. Takao","doi":"10.1109/MEMS49605.2023.10052225","DOIUrl":"https://doi.org/10.1109/MEMS49605.2023.10052225","url":null,"abstract":"In this paper, we present a high-resolution MEMS tactile sensor that can measure the \"shittori feel\", which is becoming increasingly important in tactile quality evaluation. The Japanese word \"shittori\", refers to a complicated tactile sensation that includes moistness and smoothness, describing the pleasant tactile sensation of fine leather and well-moisturized skin. Although shittori is one of the most important tactile sensations in measuring high-quality tactile feelings, the principles of its quantitative measurement are not well understood. In this study, we propose a new hypothesis regarding the adhesive frictional properties of moist materials. Moreover, we have realized the first tactile sensor that can simultaneously detect moistness and smoothness to distinguish the \"shittori feel\" of moist materials.","PeriodicalId":333331,"journal":{"name":"2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-01-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122574870","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Development of Monolithic Micro-Led Gas Sensor Based E-Nose System for Real-Time, Selective Gas Prediction 基于单片微led气体传感器的实时选择性气体预测电子鼻系统的研制
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2023-01-15 DOI: 10.1109/MEMS49605.2023.10052155
Kichul Lee, Mingu Kang, I. Park
{"title":"Development of Monolithic Micro-Led Gas Sensor Based E-Nose System for Real-Time, Selective Gas Prediction","authors":"Kichul Lee, Mingu Kang, I. Park","doi":"10.1109/MEMS49605.2023.10052155","DOIUrl":"https://doi.org/10.1109/MEMS49605.2023.10052155","url":null,"abstract":"As interest in environmental pollution, indoor air quality, and industrial safety increases, the demand for gas sensors is rapidly increasing. Until now, only high sensitivity and fast response speed were considered important, so there was a problem of high-power consumption and bulky size, and they were installed only in limited places. For higher utilization of gas sensors in the future, low power and mass production are required. In this study, a micro-sized, ultra-violet micro-LED gas sensor (μLG) that can operate in an ultra-low-power was fabricated, and using a convolutional neural network algorithm, an e-nose system was developed. As a result, it was possible to distinguish four different gas species and predict the concentration of each gas in real time.","PeriodicalId":333331,"journal":{"name":"2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"249 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-01-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123019905","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Evaluation of Local and Internal Elasticity of Hydrogel Materials by Using Light-Driven Gel Actuator 用光驱动凝胶作动器评价水凝胶材料的局部和内部弹性
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2023-01-15 DOI: 10.1109/MEMS49605.2023.10052379
Hibiki Nakajima, Yuha Koike, Y. Yokoyama, M. Hagiwara, T. Hayakawa
{"title":"Evaluation of Local and Internal Elasticity of Hydrogel Materials by Using Light-Driven Gel Actuator","authors":"Hibiki Nakajima, Yuha Koike, Y. Yokoyama, M. Hagiwara, T. Hayakawa","doi":"10.1109/MEMS49605.2023.10052379","DOIUrl":"https://doi.org/10.1109/MEMS49605.2023.10052379","url":null,"abstract":"We propose a method for evaluating local and internal elasticity of hydrogel materials. In this method, we deform inside of a sample by using a light-driven gel actuator and evaluate internal elasticity from strain of the material. Since the actuator can be driven by irradiating light through a microscope without wiring, this method enables us to evaluate local and internal elasticity which is difficult to be measured with conventional methods. In this study, we compared strains of two samples with different elasticities. It was observed that strain of a softer sample was larger than that of a harder sample. Furthermore, we can estimate the harder sample is approximately 1.3 times harder than the softer sample. Therefore, we succeeded in evaluating local and internal elasticities of samples with the proposed method.","PeriodicalId":333331,"journal":{"name":"2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"305 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-01-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114129856","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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