2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)

Vertical Integration of Force Transmission Structure on Capacitive Cmos-Mems Tactile Force Sensor for Sensitivity Improvement

Pub Date : 2023-01-15 DOI: 10.1109/MEMS49605.2023.10052308 Yuanyuan Huang, Yen-Lin Chen, Shihwei Lin, Fuchi Shih, Zihsong Hu, W. Fang

MEMS First-Order Bessel Beam Acoustic Transducer for Particle Trapping And Controllable Rotating

Pub Date : 2023-01-15 DOI: 10.1109/MEMS49605.2023.10052542 Jiaqi Li, Zhenhuan Sun, Yuyu Jia, Teng Li, Haojian Lu, Lurui Zhao, Hai Liu, Song Liu

High-Performance Wafer-Scale Transfer-Free Graphene Microphones

Pub Date : 2023-01-15 DOI: 10.1109/MEMS49605.2023.10052360 R. Pezone, Gabriele Baglioni, P. Sarro, P. Steeneken, S. Vollebregt