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Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328)最新文献

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Integrated missile guidance and control: a state dependent Riccati differential equation approach 综合导弹制导与控制:状态依赖Riccati微分方程方法
Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328) Pub Date : 1999-08-22 DOI: 10.1109/CCA.1999.806207
N. F. Palumbo, T. D. Jackson
{"title":"Integrated missile guidance and control: a state dependent Riccati differential equation approach","authors":"N. F. Palumbo, T. D. Jackson","doi":"10.1109/CCA.1999.806207","DOIUrl":"https://doi.org/10.1109/CCA.1999.806207","url":null,"abstract":"The need to engage tactical ballistic missile (TBM) threats and high performance anti-ship cruise missiles is dictating the design of enhanced performance missile interceptors that can provide a high probability of kill. It can be argued that current interceptor guidance and control (G&C) designs are suboptimal because each of the G&C components are designed separately before they are made to interact together as a single functional unit. Ultimately, integrated G&C (IGC) design techniques might improve interceptor performance because: 1) the implicit interdependency of the classically separate G&C components could provide a positive synergism that is unrealized in the more conventional designs, and 2) an IGC design is formulated as a single optimization problem thus providing a unified approach to interceptor performance optimization. The prototype IGC system discussed in this paper is designed via an approximate solution to the nonlinear disturbance attenuation problem. Furthermore, the integrated controller has been implemented in a high fidelity six-degree-of-freedom (6DOF) missile simulation that incorporates a fully coupled nonlinear aerodynamics model. A high-performance benchmark missile G&C system has also been designed and incorporated to provide performance comparisons. In addition to a discussion of the solution methodology, 6DOF Monte Carlo simulation results are presented that compare the integrated concept to the benchmark G&C system. The simulation results to date show the IGC paradigm reduces both the mean and I-sigma miss statistics as compared to the benchmark system.","PeriodicalId":325193,"journal":{"name":"Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122064516","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 93
New method of capturing tumbling object in space and its control aspects 空间翻滚物体捕捉的新方法及其控制方面
Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328) Pub Date : 1999-08-22 DOI: 10.1109/CCA.1999.800940
S. Nakasuka, T. Fujiwara
{"title":"New method of capturing tumbling object in space and its control aspects","authors":"S. Nakasuka, T. Fujiwara","doi":"10.1109/CCA.1999.800940","DOIUrl":"https://doi.org/10.1109/CCA.1999.800940","url":null,"abstract":"A method of capturing tumbling objects in a non-gravitational field is proposed, aiming at future on-orbit service missions such as capturing failed satellites or a manned vehicle which loses control, or removing debris. The key technology for this capture is how to compensate for the difference of rotational motions between the chaser and the target at the moment of capture. Most conventional methods use manipulator movement for this objective while keeping the position and attitude of the chaser body constant, which limits the allowable rotational velocity and patterns of the tumbling motion of the target. In the proposed method, the chaser aligns its rotational motion with the target's one by appropriate control before capturing the target, which is expected to enlarge the allowable target rotational motion range. Technical issues to realize it are discussed and our approach to them are proposed, which is verified with some computer simulations and hardware experiments.","PeriodicalId":325193,"journal":{"name":"Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122608447","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 18
Rapid process recipe optimization for batch thermal reactors 间歇式反应器快速工艺配方优化
Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328) Pub Date : 1999-08-22 DOI: 10.1109/CCA.1999.806665
M. A. Erickson, S. Shah, T. Gudmundsson, P. C. Pandey
{"title":"Rapid process recipe optimization for batch thermal reactors","authors":"M. A. Erickson, S. Shah, T. Gudmundsson, P. C. Pandey","doi":"10.1109/CCA.1999.806665","DOIUrl":"https://doi.org/10.1109/CCA.1999.806665","url":null,"abstract":"Describes a method for rapidly optimizing the uniformity of thin films deposited or grown on semiconductor wafers in batch thermal reactors. The method allows process recipes to be automatically optimized in as few as two process runs. Challenges associated with optimizing process recipes to yield uniform final film thickness on all wafers processed in each batch are presented, and the uniformity problem is formulated as a run-to-run control problem. A solution to this problem is presented that includes a run-to-run process model, an estimator, and a controller. This solution has been implemented in a software package that is used by engineers in the field to optimize process recipes. Measured results are presented from the optimization of two different process recipes.","PeriodicalId":325193,"journal":{"name":"Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328)","volume":"8 1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129435748","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Robust control of a triple inverted pendulum 三重倒立摆的鲁棒控制
Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328) Pub Date : 1999-08-22 DOI: 10.1109/CCA.1999.801149
V. Tsachouridis
{"title":"Robust control of a triple inverted pendulum","authors":"V. Tsachouridis","doi":"10.1109/CCA.1999.801149","DOIUrl":"https://doi.org/10.1109/CCA.1999.801149","url":null,"abstract":"The design and implementation of a robust computer control system for balancing and improving the steady state performance of a triple inverted pendulum-cart system is considered. The controller is based on discrete-time H/sub /spl infin// theory. An integrator is used to eliminate the effects of small constant sensor offsets and rail inclinations. Experimental results are reported.","PeriodicalId":325193,"journal":{"name":"Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127638819","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
Application of non-regressor based adaptive control to an underwater mobile platform-mounted manipulator 基于非回归量的自适应控制在水下移动平台机械臂中的应用
Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328) Pub Date : 1999-08-22 DOI: 10.1109/CCA.1999.801132
Pan-Mook Lee, J. Yuh
{"title":"Application of non-regressor based adaptive control to an underwater mobile platform-mounted manipulator","authors":"Pan-Mook Lee, J. Yuh","doi":"10.1109/CCA.1999.801132","DOIUrl":"https://doi.org/10.1109/CCA.1999.801132","url":null,"abstract":"An underwater manipulator mounted on a mobile platform such as underwater vehicles is a multi-body dynamic system. The hydrodynamics of the manipulator mounted on the vehicle are poorly known and time-varying. Furthermore, its motion is disturbed by the vehicle motion. This paper presents a non-regressor based adaptive control scheme for the trajectory tracking of underwater mobile platform-mounted manipulators. The presented adaptive control system does not require any information about the system. The adaptive control law estimates the control gains defined by the combinations of the bounded constants of system parameter matrices. To evaluate the performance of the adaptive controller, computer simulation was performed with a two-link planar manipulator mounted on a one degree-of-freedom mobile platform. The effects of hydrodynamic forces acting on the manipulator are included.","PeriodicalId":325193,"journal":{"name":"Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328)","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121589365","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Real-time plasma etch control using in-situ sensors and neural networks 利用原位传感器和神经网络进行实时等离子体蚀刻控制
Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328) Pub Date : 1999-08-22 DOI: 10.1109/CCA.1999.807760
D. Stokes, G. May
{"title":"Real-time plasma etch control using in-situ sensors and neural networks","authors":"D. Stokes, G. May","doi":"10.1109/CCA.1999.807760","DOIUrl":"https://doi.org/10.1109/CCA.1999.807760","url":null,"abstract":"Recent work has shown that neural networks offer great promise in modeling complex fabrication processes such as reactive ion etching (RIE). This paper explores the use of neural networks for real-time, model-based feedback control of RIE. This objective is accomplished in part by constructing a predictive model for the system, which can be inverted (or approximately inverted) to achieve the desired control. The efficacy of this approach is demonstrated using experimental data from a SiO/sub 2/ etch process to simulate real-time control of etch rate, uniformity, selectivity, and anisotropy. In addition, using a residual gas analysis system as a sensor, the approach is further demonstrated using actual experimental data acquired during the etch of a GaAs/AlGaAs metal-semiconductor-metal structure. In the latter case, real-time control of the etch rate of the constituent materials is investigated.","PeriodicalId":325193,"journal":{"name":"Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328)","volume":"238 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121983010","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Optimal auxiliary input for fault detection of systems with model uncertainty 模型不确定性系统故障检测的最优辅助输入
Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328) Pub Date : 1999-08-22 DOI: 10.1109/CCA.1999.801183
T. Hatanaka, K. Uosaki
{"title":"Optimal auxiliary input for fault detection of systems with model uncertainty","authors":"T. Hatanaka, K. Uosaki","doi":"10.1109/CCA.1999.801183","DOIUrl":"https://doi.org/10.1109/CCA.1999.801183","url":null,"abstract":"Introduction of an auxiliary input is known to be useful to detect the system fault quickly without affecting the original system behavior in normal mode. Such an auxiliary input is designed to enlarge the distance measured by the Kullback discrimination information measure between the system models corresponding to the normal and the fault modes. However, in practice, the designer hardly knows the exact models. Hence, the optimal auxiliary input should be designed for the case of the system models with uncertainty. Here, the auxiliary input is designed to maximize the distance for the worst combination of system models. Numerical simulation results indicate the applicability of the proposed auxiliary input in fault detection.","PeriodicalId":325193,"journal":{"name":"Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122701901","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Development of a robot holon using an open modular controller 采用开放式模块化控制器的机器人全息仪的研制
Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328) Pub Date : 1999-08-22 DOI: 10.1109/CCA.1999.801218
J. Schnell, S. Andersen, G. Langer, C. Sørensen
{"title":"Development of a robot holon using an open modular controller","authors":"J. Schnell, S. Andersen, G. Langer, C. Sørensen","doi":"10.1109/CCA.1999.801218","DOIUrl":"https://doi.org/10.1109/CCA.1999.801218","url":null,"abstract":"This paper reviews the development of a robot holon based on an open controller in the context of the holonic multicell control system (HoMuCS) architecture. We describe the results and research work that was involved in developing a robot holon for a physical robot. The robot holon was implemented on a existing robot at the department which was upgraded by removing its native control system and replacing it with a new PC-based open controller. The development of the robot holon builds on the notion that a robot holon will be able to perform both processing tasks and material handling tasks. Based on that notion we attempt to draw up a robot-architecture in the HoMuCS that can easily be reconfigured for these types of tasks. The research results gave a further specification of the HoMuCS architecture by extending it with the special robot holon type.","PeriodicalId":325193,"journal":{"name":"Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121200047","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
A virtual closed loop remedy for temporary sensor failures 一个虚拟闭环补救暂时的传感器故障
Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328) Pub Date : 1999-08-22 DOI: 10.1109/CCA.1999.801196
J. Suh, G. Bajpai, B. Chang
{"title":"A virtual closed loop remedy for temporary sensor failures","authors":"J. Suh, G. Bajpai, B. Chang","doi":"10.1109/CCA.1999.801196","DOIUrl":"https://doi.org/10.1109/CCA.1999.801196","url":null,"abstract":"Digital system upsets can occur as a result of electrical transients induced by electromagnetic fields. One possible upset is the irrecoverable loss of sensor data due to noisy readings or data changes in the input circuitry. The control system may not perform adequately when faced with such modes of failure. The paper focuses on a technique in which a virtual closed loop is used to overcome these modes of failure. The advantage of using this technique is confirmed by results from a DC motor control system set-up in electromagnetic environments.","PeriodicalId":325193,"journal":{"name":"Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122323447","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Model based predictive control in RTP semiconductor manufacturing RTP半导体制造中基于模型的预测控制
Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328) Pub Date : 1999-08-22 DOI: 10.1109/CCA.1999.801217
R. D. De Keyser, J. Donald
{"title":"Model based predictive control in RTP semiconductor manufacturing","authors":"R. D. De Keyser, J. Donald","doi":"10.1109/CCA.1999.801217","DOIUrl":"https://doi.org/10.1109/CCA.1999.801217","url":null,"abstract":"Temperature control in single-wafer semiconductor reactors has become a hot topic. The interest in the subject illustrates the fact that the temperature measurement and control issues are far from trivial. This is due to the reactor design which is inherently non-isothermal, to the principal difficulties in measuring wafer temperature (or film thickness) in real-time and to the typically large interaction present between zones in radiantly heated systems. CVD-RTP (chemical vapor deposition-rapid thermal processing) reactors offer a challenge to control engineers in that the control of temperature uniformity over the wafer surface is of utmost importance for the next generation of processing equipment. This paper presents a solution based on the methodology of model based predictive control.","PeriodicalId":325193,"journal":{"name":"Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125303871","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
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