Microtechnologies for the New Millennium最新文献_第9页

Scaling of dynamic thermoelectric harvesting devices in the 1-100 cm3 range 1-100 cm3范围内动态热电收集装置的缩放

Microtechnologies for the New Millennium Pub Date : 2015-05-21 DOI: 10.1117/12.2181209

M. Kiziroglou, A. Elefsiniotis, N. Kokorakis, S. Wright, T. T. Toh, P. Mitcheson, U. Schmid, T. Becker, E. Yeatman

引用次数: 2

Optimal design of piezoelectric microtransducers for static response 压电微换能器静态响应优化设计

Microtechnologies for the New Millennium Pub Date : 2015-05-21 DOI: 10.1117/12.2180573

D. Ruiz, A. Donoso, J. C. Bellido, M. Kucera, U. Schmid, J. Sánchez-Rojas

{"title":"Optimal design of piezoelectric microtransducers for static response","authors":"D. Ruiz, A. Donoso, J. C. Bellido, M. Kucera, U. Schmid, J. Sánchez-Rojas","doi":"10.1117/12.2180573","DOIUrl":"https://doi.org/10.1117/12.2180573","url":null,"abstract":"In this work, we present a systematic procedure to design piezoelectric transducers by simultaneously optimizing the host structure and the electrode layout. The technique allows maximizing any electromechanical coupling of output efficiency of the transducer. Either the output current collected at the electrodes when a mechanical force is applied (sensors), or the in-plane displacement when a given voltage is applied to the electrodes (actuators) can be optimized. We introduce a new idea to avoid the typical problem in topology optimization of the appearance of gray areas, getting finally 0-1 designs, some of which have been manufactured. Also, mathematical demonstration of reciprocity of the piezoelectric effect is shown. Many MEMS-based actuators like microgrippers, surface probes, or micro-optical devices can be optimized following this procedure. A similar approach has been demonstrated previously in modal sensors/actuators, although restricted to the design of the electrode layout for a given structure. The novel method shown here allows the simultaneous optimization of both shapes, for electrode and structure in the static case.","PeriodicalId":232941,"journal":{"name":"Microtechnologies for the New Millennium","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134035300","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Fabrication and characterization of a fuel flexible micro-reformer fully integrated in silicon for micro-solid oxide fuel cell applications 用于微固体氧化物燃料电池的全集成硅燃料柔性微转化炉的制造与表征

Microtechnologies for the New Millennium Pub Date : 2015-05-21 DOI: 10.1117/12.2178860

D. Pla, M. Salleras, I. Garbayo, Á. Morata, N. Sabaté, N. J. Divins, J. Llorca, A. Tarancón

引用次数: 1

Impact of titanium layer and silicon substrate properties on the microstructure of c-axis oriented AlN thin films 钛层和硅衬底性能对c轴取向AlN薄膜微观结构的影响

Microtechnologies for the New Millennium Pub Date : 2015-05-21 DOI: 10.1117/12.2179156

E. Wistrela, A. Bittner, U. Schmid

{"title":"Impact of titanium layer and silicon substrate properties on the microstructure of c-axis oriented AlN thin films","authors":"E. Wistrela, A. Bittner, U. Schmid","doi":"10.1117/12.2179156","DOIUrl":"https://doi.org/10.1117/12.2179156","url":null,"abstract":"Highly c-axis orientated sputter deposited aluminium nitride (AlN) thin films are widely used as piezoelectric layers in micro-electro-mechanical systems (MEMS). Therefore, stable and reliable deposition and patterning of the AlN thin films in the fabrication process of such devices is of utmost importance. In this work, we study the wet chemical etching behavior of highly c-axis oriented AlN layers as well as the film-related residuals after the etching procedure. To investigate the impact of the underlying material on the quality of the AlN films they are either deposited on pure silicon (Si) substrates or on Si substrates covered with a sputter-deposited thin titanium (Ti) film. The 620 nm thin AlN layers are synthesized simultaneously onto both substrate types and subsequently wet-chemical etched in a phosphorous acid based etching solution at a temperature of 80°C. We demonstrate a significant difference in surface roughness of the untreated AlN films when sputter-deposited on Ti or pure Si. Furthermore, we analyze the piezoelectric properties of the deposited films. Although the XRD analyses indicate a high c-axis orientated wurtzite structure for all deposited films, the absolute value of the piezoelectric coefficients |d33| of AlN thin films synthesized on Ti are 0.4-4.3 pC/N, whereas corresponding values of 5.2-6 pC/N are determined at those deposited on pure Si substrates,. Finally, after wet chemically etching a porous, but homogeneous AlN microstructure is observed for samples synthesized onto Ti layers, whereas AlN layers deposited directly on Si substrate are either etched very inhomogenously or almost completely with some etch resistant pyramidal-shaped residues. This might be due to a local change in polarity within the AlN layer.","PeriodicalId":232941,"journal":{"name":"Microtechnologies for the New Millennium","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114998825","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Vibration energy harvesting: fabrication, miniaturisation and applications 振动能量收集:制造、小型化和应用

Microtechnologies for the New Millennium Pub Date : 2015-05-21 DOI: 10.1117/12.2179783

S. Beeby, D. Zhu

{"title":"Vibration energy harvesting: fabrication, miniaturisation and applications","authors":"S. Beeby, D. Zhu","doi":"10.1117/12.2179783","DOIUrl":"https://doi.org/10.1117/12.2179783","url":null,"abstract":"This paper reviews work at the University of Southampton and its spin-out company Perpetuum towards the use of vibration energy harvesting in real applications. Perpetuum have successfully demonstrated vibration-powered condition monitoring systems for rail and industrial applications. They have pursued applications were volume is not a particular constraint and therefore sufficient power can be harvested. Harvester reliability and longevity is a key requirement and this can be a challenging task in high shock environments. The University of Southampton has investigated the miniaturization of the technology. MEMS electromagnetic harvesters were found to be unsuitable although miniaturized devices fabricated using bulk components did perform well. Screen printed piezoelectric harvesters were also found to perform well and were ideally suited to a low profile application where device thickness was limited. Screen printing was not only used to deposit the active piezoelectric material but also an inertial mass ink based on tungsten. This enables the device to be printed entirely by screen printing providing a low-cost route to manufacture. Finally, details of a simulation tool that can take real world vibrations and estimate vibration energy harvester output was presented. This was used to simulate linear and nonlinear harvesters and in many applications with a characteristic resonant frequency the linear approach was found to be the optimum. Bistable nonlinear harvesters were found to work better with more random vibration sources.","PeriodicalId":232941,"journal":{"name":"Microtechnologies for the New Millennium","volume":"252 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117294494","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 17

Thermal cycling reliability of RF-MEMS switches RF-MEMS开关的热循环可靠性

Microtechnologies for the New Millennium Pub Date : 2015-05-21 DOI: 10.1117/12.2178763

V. Mulloni, G. Sordo, B. Margesin

引用次数: 2

2D stepping microdrive for hyperspectral imaging 用于高光谱成像的二维步进微驱动器

Microtechnologies for the New Millennium Pub Date : 2015-05-21 DOI: 10.1117/12.2178867

C. Endrödy, H. Mehner, A. Grewe, S. Sinzinger, M. Hoffmann

{"title":"2D stepping microdrive for hyperspectral imaging","authors":"C. Endrödy, H. Mehner, A. Grewe, S. Sinzinger, M. Hoffmann","doi":"10.1117/12.2178867","DOIUrl":"https://doi.org/10.1117/12.2178867","url":null,"abstract":"In a novel hyperspectral imaging concept based on confocal chromatic microscopy, a pinhole array (matrix of pinholes) has to be scanned across an intermediate image plane to capture the full object plane. In this paper a two-axis stepping microdrive is presented for the pinhole array (6×7.5×0.2 mm3 of glass, weight 20 mg), featuring a 10 μm step size and a 200 μm displacement range in each direction. With the two-axis stepwise actuation of the pinhole array, the imaged area of the object plane is increased from 7% (fixed pinhole array) up to 89% with actuated array. The two-axis positioning is implemented with a three-axis inchworm motion driven by electrostatic forces. A combination of horizontal and vertical electrostatic actuators are arranged to achieve a precise in-plane actuation of the pinhole array. The microdrive is fabricated with established MEMS technologies and features a size about 1 cm2 with 1 mm thickness. The microdrive is capable to position the pinhole array over the displacement range. The array size enables a 1:1 optical imaging on an 8 mm diagonal size CCD. The presented stepping microdrive outperforms existing microsystem solutions with a combination of high payload, large step size, displacement range, and the large optical aperture. Furthermore, the device concept enables the positioning of milligram weights with a highly integrated microsystem.","PeriodicalId":232941,"journal":{"name":"Microtechnologies for the New Millennium","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130568232","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Characterization of a dispersion-controlled approach to surface profilometry on wafers using a white-light interferometer 用白光干涉仪对晶圆片表面轮廓测量的色散控制方法进行表征

Microtechnologies for the New Millennium Pub Date : 2015-05-21 DOI: 10.1117/12.2179022

C. Taudt, A. Augenstein, T. Baselt, H. Assmann, A. Greiner, E. Koch, P. Hartmann

引用次数: 4

Force monitoring transducers with more than 100,000 scale intervals 力监测传感器具有超过100,000刻度间隔

Microtechnologies for the New Millennium Pub Date : 2015-05-21 DOI: 10.1117/12.2178719

V. Stavrov, A. Shulev, D. Chakarov, G. Stavreva

{"title":"Force monitoring transducers with more than 100,000 scale intervals","authors":"V. Stavrov, A. Shulev, D. Chakarov, G. Stavreva","doi":"10.1117/12.2178719","DOIUrl":"https://doi.org/10.1117/12.2178719","url":null,"abstract":"This paper presents the results obtained at characterization of novel, high performing force transducers to be employed into monitoring systems with very high accuracy. Each force transducer comprises of a coherently designed mechanical transducer and a position microsensor with very high accuracy. The range of operation for the mechanical transducer has been optimized to fit the 500μm travel range of the position microsensor. Respectively, the flexures’ stiffness corresponds to achieve the maximum displacement at 70N load force. The position microsensor is a MEMS device, comprising of two rigid elements: an anchored and an actuated ones connected via one monolithic micro-flexure. Additionally, the micro-flexure comprises of two strain detecting cantilevers having four sidewall embedded piezoresistors connected in a Wheatstone bridge. The particular sensor provides a voltage signal having sensitivity in the range of 240μV/μm at 1V DC voltage supply. The experimental set-up for measurement of the load curve of the force transducer has demonstrated an overall force resolution of about 0.6mN. As a result, more than 100,000 scale intervals have been experimentally assessed. The present work forms development of a common approach for accurate measurement of various physical values, when they are transduced in a multi-D displacement. Due to the demonstrated high accuracy, the force transducers with piezoresistive MEMS sensors remove most of the constraints in force monitoring with ppm-accuracy.","PeriodicalId":232941,"journal":{"name":"Microtechnologies for the New Millennium","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121505298","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 5

Real-time synchronization of wireless sensor network by 1-PPS signal 利用1-PPS信号实现无线传感器网络的实时同步

Microtechnologies for the New Millennium Pub Date : 2015-05-21 DOI: 10.1117/12.2179479

Marco Giammarini, Marco Pieralisi, D. Isidori, E. Concettoni, C. Cristalli, Matteo Fioravanti

{"title":"Real-time synchronization of wireless sensor network by 1-PPS signal","authors":"Marco Giammarini, Marco Pieralisi, D. Isidori, E. Concettoni, C. Cristalli, Matteo Fioravanti","doi":"10.1117/12.2179479","DOIUrl":"https://doi.org/10.1117/12.2179479","url":null,"abstract":"The use of wireless sensor networks with different nodes is desirable in a smart environment, because the network setting up and installation on preexisting structures can be done without a fixed cabled infrastructure. The flexibility of the monitoring system is fundamental where the use of a considerable quantity of cables could compromise the normal exercise, could affect the quality of acquired signal and finally increase the cost of the materials and installation. The network is composed of several intelligent \"nodes\", which acquires data from different kind of sensors, and then store or transmit them to a central elaboration unit. The synchronization of data acquisition is the core of the real-time wireless sensor network (WSN). In this paper, we present a comparison between different methods proposed by literature for the real-time acquisition in a WSN and finally we present our solution based on 1-Pulse-Per-Second (1-PPS) signal generated by GPS systems. The sensor node developed is a small-embedded system based on ARM microcontroller that manages the acquisition, the timing and the post-processing of the data. The communications between the sensors and the master based on IEEE 802.15.4 protocol and managed by dedicated software. Finally, we present the preliminary results obtained on a 3 floor building simulator with the wireless sensors system developed.","PeriodicalId":232941,"journal":{"name":"Microtechnologies for the New Millennium","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131456942","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1