Elena V. Chuparina , Galina A. Belogolova , Boris A. Baenguev , Julia V. Sokolnikova , Olga V. Zarubina , Galina V. Pashkova
{"title":"Choosing a matrix effects correction method to quantify Cu, Zn, As and Pb in industrially contaminated soils by wavelength dispersive X-ray fluorescence spectrometry","authors":"Elena V. Chuparina , Galina A. Belogolova , Boris A. Baenguev , Julia V. Sokolnikova , Olga V. Zarubina , Galina V. Pashkova","doi":"10.1016/j.sab.2026.107497","DOIUrl":"10.1016/j.sab.2026.107497","url":null,"abstract":"<div><div>When quantifying the toxic elements Cu, Zn, As and Pb with X-ray fluorescence analysis in the soils contaminated by arsenic-containing industrial waste, there was a need to find some suitable methods for correcting of matrix effects caused by significant variations in the concentrations of the determined and interfering elements. The authors applied the XRF methods for calculating the elemental contents: external standard, Compton scattering correction, and <em>α</em>-correction with variable influence coefficients. The XRF results were validated with the atomic absorption spectrometry, the inductively coupled plasma mass spectrometry and the total reflection X-ray fluorescence spectrometry. This study showed that the Compton scattering correction is suitable for calculating the low-level contents of Cu, Zn, As and Pb in the contaminated soils, when the chemical compositions of soils are close to those of the calibration CRMs. If the contents of the determined and interfering elements in the contaminated soils varied significantly none of the above XRF methods provides the correct XRF results. The errors characterizing the difference between results of XRF and comparison methods (RSD) reached 20–90% rel. To compensate significant inter-element influences in such soils, the authors proposed the equation containing the Compton scattering component and empirical α<sub>ij</sub>- influence coefficients. As a result, the RSD values were significantly reduced, amounting to: Cu 1.1–7, Zn 3–12, As 1.6–9 and Pb 2–9.5% rel. The maximum contents of target elements in highly contaminated soils were as follows, μg/g: Cu 6036, Zn 13,550, As 10,880 and Pb 4976. Thus, the combined correction approach ensured the WDXRF determination of the high contents of target elements in the studied soils.</div></div>","PeriodicalId":21890,"journal":{"name":"Spectrochimica Acta Part B: Atomic Spectroscopy","volume":"240 ","pages":"Article 107497"},"PeriodicalIF":3.8,"publicationDate":"2026-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147388189","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Yizhuo Hu, Qian Wu, Qiang Zeng, Ji Chen, Shuhua Li, Chongxing Zhang, Ming Dong, Ming Ren
{"title":"Time-resolved atomic emission spectroscopy and dual-channel narrow-band imaging of a short-gap AC arc in insulating oil","authors":"Yizhuo Hu, Qian Wu, Qiang Zeng, Ji Chen, Shuhua Li, Chongxing Zhang, Ming Dong, Ming Ren","doi":"10.1016/j.sab.2026.107498","DOIUrl":"10.1016/j.sab.2026.107498","url":null,"abstract":"<div><div>Arc discharges in insulating oil are important both for power equipment insulation and for understanding plasmas in dense liquids, yet the thermodynamic state and microscopic plasma parameters of the arc channel remain poorly quantified by spectroscopic diagnostics. Here, a short-gap AC arc in mineral oil is investigated using time-resolved optical emission spectroscopy combined with dual-channel, narrow-band, time-synchronized imaging of hydrogen atomic emission. Excitation temperature and electron density are obtained throughout the AC cycle from selected Balmer line intensities and Stark-broadened profiles under well-defined criteria for local thermodynamic equilibrium (LTE) and optical thinness. At the current peak, hydrogen narrow-band images are processed by Abel inversion to reconstruct radial and axial distributions of line emission and excitation temperature, enabling quantitative comparison between imaging-based core temperatures and line-of-sight values from spectroscopy. The arc plasma is found to be in LTE near current maxima, while during current decay it undergoes a periodic transition from LTE to partial LTE and finally to a non-LTE state. Over successive half-cycles, the excitation temperature and electron density oscillate between 5546 K–14112 K and 5.69 × 10<sup>16</sup> cm<sup>−3</sup>–3.37 × 10<sup>17</sup> cm<sup>−3</sup> and exhibit pronounced hysteresis relative to the instantaneous current. Near the anode, radiation intensity and excitation temperature are markedly enhanced, with a core temperature of about 1.48 × 10<sup>4</sup> K and a maximum radial temperature gradient of 1.85 × 10<sup>4</sup> K/mm. These results provide quantitative benchmarks for hydrogen atomic emission and imaging diagnostics in oil-immersed arcs and help constrain models of arc plasmas in liquid dielectrics.</div></div>","PeriodicalId":21890,"journal":{"name":"Spectrochimica Acta Part B: Atomic Spectroscopy","volume":"240 ","pages":"Article 107498"},"PeriodicalIF":3.8,"publicationDate":"2026-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147388190","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Tomáš Matoušek , Simona Adamová , Michaela Prokopová , Martin Pivokonský , Stanislav Musil , Montserrat Filella
{"title":"Simultaneous ultratrace analysis of antimony, arsenic and germanium species by hydride generation–cryotrapping–ICP-MS/MS: Focus on antimony in freshwaters","authors":"Tomáš Matoušek , Simona Adamová , Michaela Prokopová , Martin Pivokonský , Stanislav Musil , Montserrat Filella","doi":"10.1016/j.sab.2026.107501","DOIUrl":"10.1016/j.sab.2026.107501","url":null,"abstract":"<div><div>A method is presented for the ultratrace analysis of antimony (Sb) species in natural water samples, performed simultaneously with the analysis of arsenic (As) and germanium (Ge) species. Compromise conditions enable efficient generation of volatile inorganic and methyl-substituted hydrides, which are cryotrapped, separated in a semi-automated system and detected by inductively coupled plasma mass spectrometry with triple quadrupole (ICP-MS/MS). Selective hydride generation (HG) from a TRIS buffer at pH 6, with or without L-cysteine for prereduction, distinguishes between trivalent and pentavalent Sb and As species. Limits of detection are in the low ng L<sup>−1</sup> for inorganic As and Sb, low tenths of ng L<sup>−1</sup> for methylated As species and a few hundredths of ng L<sup>−1</sup> for methylated Sb and Ge species, making the method suitable for natural waters. Speciation of Sb, As and Ge in SLRS-6 and AQUA-1 reference materials is presented. Main analytical challenges and key considerations are discussed, supported by a one-year monitoring of Sb, As and Ge species at (sub)ng L<sup>−1</sup> concentrations in Czech drinking water reservoirs. Limitations in quantifying methylated Sb species due to the absence of analytical standards are addressed. Conservation by HNO<sub>3</sub> preserves speciation well, but the selectivity of trivalent iAs and iSb determination in the presence of pentavalent species is affected. EDTA is effective in maintaining the oxidation state of Sb and As species; however, inorganic Ge must be analyzed within days due to the slow formation of stable EDTA complexes, which are inaccessible for HG.</div></div>","PeriodicalId":21890,"journal":{"name":"Spectrochimica Acta Part B: Atomic Spectroscopy","volume":"240 ","pages":"Article 107501"},"PeriodicalIF":3.8,"publicationDate":"2026-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147388191","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
J. Ghani , A. Bisciotti , G. Bianchini , R. Tassinari , G. Iezzi , F. Radica , G. Cruciani
{"title":"Laser-induced breakdown spectroscopy (LIBS) for the characterization of demolition waste: an exploratory study","authors":"J. Ghani , A. Bisciotti , G. Bianchini , R. Tassinari , G. Iezzi , F. Radica , G. Cruciani","doi":"10.1016/j.sab.2026.107458","DOIUrl":"10.1016/j.sab.2026.107458","url":null,"abstract":"<div><div>Laser-induced breakdown spectroscopy (LIBS) is a fast, and non-destructive technique for real-time elemental analysis, ideal for in-line characterization of construction and demolition waste (CDW). This study evaluates and improves the accuracy of portable LIBS for elemental quantification in pressed pellets from CDW. Pressed powder pellets of different CDW categories (i.e., cements, concrete, masonry), previously analysed by X-ray fluorescence (XRF), were measured using the SciAps Z900 handheld LIBS spectrometer. Total of 71 selected samples were used to build a new library dataset based on a matrix-matching calibration (MMC) approach. The resulting MMC library was then compared with the built-in SciAps “Geochem” library, which is designed for inorganic-mineral rock matrices. MMC method shows higher Si and Ca levels with similar concentrations, as main components of mixed CDW materials. Results show that MMC reduces matrix effects and analyte signal interference, enabling accurate elemental quantification, particularly for CDW samples dominated by high Si (20–70 wt%), and Ca contents (10–75 wt%). The accuracy and measurements of Ca contents are better for both MMC and Geochem calibration (GC) models, although the average relative difference decreases from 10.9% (GC) to 4.55% (MMC). Comparable accuracy improvements are found for other major elements (Si, Al, Ti, Fe, Mn, Mg, Na, K). To further validate MMC-library performance, certified reference materials from the National Institute of Standards and Technology (NIST) for building materials were also analysed. Our findings suggest that the MMC approach improves both the accuracy and precision of LIBS measurements on pressed pellets from CDW.</div></div>","PeriodicalId":21890,"journal":{"name":"Spectrochimica Acta Part B: Atomic Spectroscopy","volume":"238 ","pages":"Article 107458"},"PeriodicalIF":3.8,"publicationDate":"2026-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146015549","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Katarzyna Gałczyńska , Kinga Skrzyniarz , Aneta Węgierek-Ciuk , Ilona Stabrawa , Sławomir Wąsik , Ewa Trybus , Krystyna Kurdziel , Karol Ciepluch , Michał Arabski
{"title":"Mechanism underlying transport of an anticancer copper(II) complex into A549 lung cancer cells and across cell monolayers","authors":"Katarzyna Gałczyńska , Kinga Skrzyniarz , Aneta Węgierek-Ciuk , Ilona Stabrawa , Sławomir Wąsik , Ewa Trybus , Krystyna Kurdziel , Karol Ciepluch , Michał Arabski","doi":"10.1016/j.sab.2026.107460","DOIUrl":"10.1016/j.sab.2026.107460","url":null,"abstract":"<div><div>Understanding how copper complexes with anticancer properties penetrate cellular barriers is essential for evaluating their therapeutic potential. This study investigates the transport and cellular uptake of a copper(II)–1-allylimidazole complex across biological boundaries, including a eukaryotic cell monolayer and the plasma membrane of cancer cells. Using complementary techniques—laser interferometry, total reflection X-ray fluorescence (TXRF), flow cytometry, and transmission electron microscopy (TEM)—we demonstrate that the complex rapidly diffuses through a confluent CHO-K1 monolayer and subsequently interacts with A549 lung cancer cells. The results show that the complex first reaches the cell surface, followed by its internalization via endocytosis and accumulation inside the cells. Additional studies using lipid membrane models revealed concentration-dependent interactions, with surface binding at low concentrations and membrane perturbation at higher concentrations, as indicated by changes in fluorescence anisotropy, liposome size, and fluorescence quenching. Altogether, these findings provide a coherent picture of the mechanism underlying cellular uptake of the copper(II) complex and enhance the understanding of how such compounds penetrate and affect cancer cells.</div></div>","PeriodicalId":21890,"journal":{"name":"Spectrochimica Acta Part B: Atomic Spectroscopy","volume":"238 ","pages":"Article 107460"},"PeriodicalIF":3.8,"publicationDate":"2026-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146080988","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"An automated, standardless method for elemental analysis in EDXRF based on spectral deconvolution for resolution enhancement","authors":"Wei Zhao, Xianyun Ai, Wenhui Li","doi":"10.1016/j.sab.2025.107417","DOIUrl":"10.1016/j.sab.2025.107417","url":null,"abstract":"<div><div>Energy resolution and matrix effects hinder the widespread application of energy-dispersive X-ray fluorescence spectroscopy in analyzing unknown samples. To address these limitations, this paper proposes a novel automatic and standardless elemental analysis method. This method integrates deconvolution with fundamental parameters model in a closed iterative framework: deconvolution first enhances spectral resolution to improve qualitative element identification, and the fundamental parameters model then quantifies elemental contents with qualitative results dynamically feeding back to input to the fundamental parameters model, forming a tightly coupled qualitative-quantitative loop. The approach was validated using multi-element certified reference materials and the results were compared with those obtained from the commercial software XRS-FP2. The findings confirm that the proposed method enables automated end-to-end elemental analysis without reference materials, and contributes to mitigating the bottlenecks of peak overlap and matrix effects in unknown sample analysis. It thus provides a practical analytical tool for rapid and reliable elemental analysis.</div></div>","PeriodicalId":21890,"journal":{"name":"Spectrochimica Acta Part B: Atomic Spectroscopy","volume":"237 ","pages":"Article 107417"},"PeriodicalIF":3.8,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145683116","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pingsai Chu , Ye Tian , Yuanyuan Xue , Qingxi Liu , Boyang Xue , Jinjia Guo , Yuan Lu , Ronger Zheng
{"title":"One-point calibration of underwater double-pulse laser-induced breakdown spectroscopy","authors":"Pingsai Chu , Ye Tian , Yuanyuan Xue , Qingxi Liu , Boyang Xue , Jinjia Guo , Yuan Lu , Ronger Zheng","doi":"10.1016/j.sab.2026.107455","DOIUrl":"10.1016/j.sab.2026.107455","url":null,"abstract":"<div><div>Quantification of submerged target using laser-induced breakdown spectroscopy (LIBS) is often limited by the lack of matrix-matched standards for building the calibration curves. Traditional underwater single-pulse LIBS (SP-LIBS) is characterized by strong continuum background and few spectral lines, making it difficult to apply the calibration-free method which has been widely used in the air environment. In this work, we applied the calibration-free method (CF-LIBS) and the one-point calibration method (OPC-LIBS) for the quantification of submerged alloys using underwater double-pulse LIBS (DP-LIBS) technique. Underwater DP-LIBS utilizes a first laser pulse to generate a bubble on the target surface and then induce a plasma inside the bubble by a second laser pulse. It shows a significant enhancement in the spectral quality compared to the traditional SP-LIBS, with sufficient lines available in the spectrum for calculating the plasma temperature with the Boltzmann plot. The well-known McWhirter criterion, together with two additional criteria based on the relaxation time and the diffusion length, were used to verify the local thermodynamic equilibrium (LTE) conditions in the plasma of underwater DP-LIBS. By applying the OPC-LIBS method with one standard of known composition, the quantification performance is remarkably improved compared to the CF-LIBS method. The average relative errors of Zn, Mn, Cu of the six samples were reduced from 4.31%, 75.96%, 57.07% to 0.75%, 11.94%, 8.86%, and the average <span><math><mi>dist</mi></math></span> value was also reduced from 8.01 wt% to 1.42 wt%. This work reveals the ideal plasma state in underwater DP-LIBS that is suitable for the calibration-free analysis, and demonstrates the feasibility of OPC-LIBS method in the underwater DP-LIBS quantitative analysis.</div></div>","PeriodicalId":21890,"journal":{"name":"Spectrochimica Acta Part B: Atomic Spectroscopy","volume":"237 ","pages":"Article 107455"},"PeriodicalIF":3.8,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145976805","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Dominik Blaimer , Christopher Leist , Ute Kaiser , Kerstin Leopold
{"title":"Exploring the potential of high-resolution continuum source graphite furnace atomic absorption spectrometry for the analysis of gold nanoparticles in the single-digit size range","authors":"Dominik Blaimer , Christopher Leist , Ute Kaiser , Kerstin Leopold","doi":"10.1016/j.sab.2026.107453","DOIUrl":"10.1016/j.sab.2026.107453","url":null,"abstract":"<div><div>Gold nanoparticles (AuNPs) exhibit unique properties due to their high surface-to-volume ratio, opening a wide range of innovative applications and requiring fast, sensitive and robust analytical techniques for their monitoring. In recent years, high-resolution continuum source graphite furnace atomic absorption spectrometry (HR-CS-GFAAS) has proven to be useful for this task. In this study, its applicability to detect and size very small AuNPs in the single-digit size range is shown. This is of particular interest, given that alternative techniques often lack sufficiently low size detection limits. The time of first inflection point (t<sub>ip</sub>) was introduced as a new sizing parameter in GFAAS, particularly sensitive within the tested size range of 2.2 nm to 10.1 nm regardless of the coating of the AuNPs and moreover not significantly affected by the presence of Au(III) ions. Experimentally, a minimum distinguishable size difference of 1.6 nm could be demonstrated, and we predict a theoretical value of 0.4 nm. As a reference method to determine the size of the very small AuNPs, high-resolution transmission electron microscopy (HRTEM) was used. Additionally, the mass proportions of bimodal mixtures of AuNP suspensions were recovered by deconvolution of the transient absorbance signals. For total gold quantification, a mass quantification limit of 0.8 pg was achieved, equivalent to 20 ng L<sup>−1</sup> in liquid samples and independent of the introduced gold species. In summary, the proposed method has demonstrated its significant potential as a screening tool for the simultaneous speciation, quantification and sizing of very small AuNPs with minimal sample preparation requirements.</div></div>","PeriodicalId":21890,"journal":{"name":"Spectrochimica Acta Part B: Atomic Spectroscopy","volume":"237 ","pages":"Article 107453"},"PeriodicalIF":3.8,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146022599","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Ultrasensitive and high-accuracy trace detection by using self-absorption-autocompensated discharge-assisted LIBS for reinforcing aircraft safety","authors":"Boping Xu , Peiqi Yin , Jiajia Hou , Xukun Yin , Jie Tang , Dacheng Zhang , Huailiang Xu","doi":"10.1016/j.sab.2025.107416","DOIUrl":"10.1016/j.sab.2025.107416","url":null,"abstract":"<div><div>Monitoring trace metal elements in lubricating oils of aero-engines is crucial for evaluating wear conditions and predicting service life. In this work, a self-absorption-autocompensated discharge-assisted LIBS (SAAC-DA-LIBS) technique is proposed for trace element analysis in lubricating oils. The transient discharge field in DA-LIBS was modulated by optimizing spark discharge and arc discharge, thereby enhancing the plasma spectral intensity by two orders of magnitude. The SAAC, based on self-autocalibration of doublet lines, evaluates the self-absorption effect, and further infers the ideal spectral intensity. Accordingly, the linearity of the calibration curve is significantly improved over a wide concentration range. The limits of detection (LODs) for the typical elements, Ca, Ba, and Na, are substantially reduced from 94.21 μmol/mol, 33.31 μmol/mol, and 50.75 μmol/mol in SP-LIBS to 0.91 μmol/mol, 0.31 μmol/mol, and 1.50 μmol/mol in SAAC-DA-LIBS, respectively, exhibiting a sensitivity improvement by more than two orders of magnitude. Moreover, the recovery rate approaches 100 %, guaranteeing a superior recovery performance of SAAC-DA-LIBS. Thus, SAAC-DA-LIBS emerges as an ultrasensitive and high-accuracy technique with strong potential for in situ, real-time detection of lubricants, offering a promising approach to enhancing aviation safety.</div></div>","PeriodicalId":21890,"journal":{"name":"Spectrochimica Acta Part B: Atomic Spectroscopy","volume":"237 ","pages":"Article 107416"},"PeriodicalIF":3.8,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145737947","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Lu Wang , Xi-Ming Zhu , Tian-Yuan Ji , Yang Wang , Klaus Bartschat , Qiu-Yao Cao , Li-Qiu Wei
{"title":"A charge-state resolved optical emission spectroscopy method applicable to vacuum-sputtered and ablated metal-containing plasma to determine the time-resolved monovalent and divalant titanium ion number densities","authors":"Lu Wang , Xi-Ming Zhu , Tian-Yuan Ji , Yang Wang , Klaus Bartschat , Qiu-Yao Cao , Li-Qiu Wei","doi":"10.1016/j.sab.2025.107402","DOIUrl":"10.1016/j.sab.2025.107402","url":null,"abstract":"<div><div>Metal plasma has been widely applied in hard coatings or metallization of vias and trenches in semiconductor device fabrication. Ion irradiation plays a vital role in the film properties. Previous methods have focused on the Ti atom and Ti<sup>+</sup> ion number densities; however, there is a lack of a practical optical emission spectroscopy method for measuring the Ti<sup>2+</sup> ion number density. High-charge-state ions lead to high compressive stress, especially in high-power impulse magnetron sputtering (HiPIMS) and vacuum arc plasma devices with a high ionization fraction. In this work, we present a novel charge-state resolved OES method to obtain the time-resolved Ti<sup>+</sup> and Ti<sup>2+</sup> ion number densities. This method is based on the excited-state cycle mechanisms of Ti<sup>+</sup>(4p) and Ti<sup>2+</sup>(4p) emitting states, as determined by kinetic investigations using a collisional-radiative model. In the excited-state cycle mechanisms, the Ti<sup>+</sup>/Ti<sup>2+</sup> line-ratio is found to be sensitive to the ion ratio, and the Ti<sup>2+</sup> line-ratio is sensitive to the electron density. The latter can decouple the influence of the electron density on the Ti<sup>+</sup>/Ti<sup>2+</sup> line ratio, allowing the Ti<sup>+</sup> and Ti<sup>2+</sup> ion number densities to be determined by combining the above line ratios. This method is verified in a vacuum arc titanium metal plasma source.</div></div>","PeriodicalId":21890,"journal":{"name":"Spectrochimica Acta Part B: Atomic Spectroscopy","volume":"237 ","pages":"Article 107402"},"PeriodicalIF":3.8,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145737945","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}