Optical Systems Design最新文献

{"title":"Modeling of grayscale lithography and calibration with experimental data for blazed gratings","authors":"P. Bhardwaj, A. Erdmann, R. Leitel","doi":"10.1117/12.2597203","DOIUrl":"https://doi.org/10.1117/12.2597203","url":null,"abstract":"This paper discusses a collaborative effort of two Fraunhofer institutes to develop a lithography model that simulates the fabrication of blazed gratings using grayscale lithography. The model is calibrated with experimental data of blazed grating profiles. The complete process of modeling and calibration has been performed using the research and development lithography simulator Dr.LiTHO. To emulate the grayscale exposure of blazed gratings in a LED-based micro-image stepper with Dr.LiTHO a thin mask with a linear variation of the mask transmission and corresponding distribution of exposure dose was used. The resulting photoresist profiles are obtained with a standard model for Diazonaphthoquinone (DNQ) photoresists. The calibration of simulated and experimental profile data of blazed gratings is performed using Dr.LiTHO’s inbuilt optimizer - Pythmea. The difference between experimental and simulated profile shapes is expressed by an areaFit. Minimization of this areaFit versus photoresist parameters and correlation analysis help to identify the most appropriate model parameters.","PeriodicalId":217586,"journal":{"name":"Optical Systems Design","volume":"177 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-10-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116648522","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Pre-production simulation of optical monitoring combining monochromatic and broadband monitoring strategies","authors":"Silvia Schwyn Thoeny, D. Schachtler, S. Waldner, T. Frei, Manuel Baertschi","doi":"10.1117/12.2597085","DOIUrl":"https://doi.org/10.1117/12.2597085","url":null,"abstract":"Various types of optical monitoring systems are established in industry. They range from single wavelength, over monochromatic to broadband monitoring to calculate a monitoring signal, which allows to terminate each layer in a filter at the required thickness. State of the art monitoring systems offer the capability of monochromatic and broadband monitoring in a single device. With these technologies available, the question arises how to combine these monitoring strategies for a specific application in a way, which leads to accurate coating results with the least sensitivity to production errors and thus to the highest yield. To answer this question without the need to perform costly coating runs, we developed a software tool, which mimics all the monitoring features of Evatec’s GSM optical monitoring system. Additionally, the software is able to disturb the simulated ideal monitoring signal with errors such as detector noise, drifts, deviations in shutter delay times, etc. The values of these disturbances are specific to the deposition tool. They were determined based on the broadband spectra of actual coating runs. By starting a virtual coating run with defined disturbances, the thickness deviations expected with a selected strategy can be assessed and the development of thickness deviations during the run, i.e. error compensation and error accumulation can be simulated. Within the software, parameters for the termination of each layer can be varied individually and the effect on the coating result can be observed. In order to demonstrate the capability of this tool, a specific coating design was then selected. For this design various monitoring strategies were tested, broadband strategies with different wavelength ranges, monochromatic strategies varying wavelength assignment per layer but also mixed strategies of broadband and monochromatic monitoring. The most stable monitoring strategy resulting from these simulations was coated as well as some of the less promising candidates and their results were compared.","PeriodicalId":217586,"journal":{"name":"Optical Systems Design","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124142296","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Some first-order and higher-order statistical properties of polarization speckle (Erratum)","authors":"S. Xiao, Jianlin Nie, S. Hanson, M. Takeda, Wen Wang","doi":"10.1117/12.2617430","DOIUrl":"https://doi.org/10.1117/12.2617430","url":null,"abstract":"Publisher’s Note: This paper, originally published on 13 September 2021, was replaced with a corrected/revised version on 27 September 2021. If you downloaded the original PDF but are unable to access the revision, please contact SPIE Digital Library Customer Service for assistance.","PeriodicalId":217586,"journal":{"name":"Optical Systems Design","volume":"415 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116679220","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Current status of PAPYRUS: the pyramid based adaptive optics system at LAM/OHP","authors":"E. Muslimov, N. Levraud, V. Chambouleyron, I. Boudjema, A. Lau, A. Caillat, F. Pedreros, G. Otten, K. El Hadi, K. Joaquina, M. Maxime, M. El Morsy, O. Beltramo-Martin, R. Fétick, Z. Ke, J. Sauvage, B. Neichel, T. Fusco, J. Schmitt, A. Le Van Suu, J. Charton, A. Schimpf, B. Martin, F. Dintrono, S. Esposito, E. Piña","doi":"10.1117/12.2597170","DOIUrl":"https://doi.org/10.1117/12.2597170","url":null,"abstract":"The Provence Adaptive optics Pyramid Run System (PAPYRUS) is a pyramid-based Adaptive Optics (AO) system that will be installed at the Coude focus of the 1.52m telescope (T152) at the Observatoire de Haute Provence (OHP). The project is being developed by PhD students and Postdocs across France with support from staff members consolidating the existing expertise and hardware into an RD testbed. This testbed allows us to run various pyramid wavefront sensing (WFS) control algorithms on-sky and experiment on new concepts for wavefront control with additional benefit from the high number of available nights at this telescope. It will also function as a teaching tool for students during the planned AO summer school at OHP. To our knowledge, this is one of the first pedagogic pyramid-based AO systems on-sky. The key components of PAPYRUS are a 17x17 actuators Alpao deformable mirror with a Alpao RTC, a very low noise camera OCAM2k, and a 4-faces glass pyramid. PAPYRUS is designed in order to be a simple and modular system to explore wavefront control with a pyramid WFS on sky. We present an overview of PAPYRUS, a description of the opto-mechanical design and the current status of the project.","PeriodicalId":217586,"journal":{"name":"Optical Systems Design","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126939111","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Denoising method for image quality improvement in photoacoustic microscopy using deep learning","authors":"Ziming Yu, K. Tang, Xianlin Song","doi":"10.1117/12.2600759","DOIUrl":"https://doi.org/10.1117/12.2600759","url":null,"abstract":"Photoacoustic microscopy (PAM) is an imaging technology developed rapidly in recent years. The technology has the advantages of high resolution, rich contrast of optical imaging and high penetration depth of acoustic imaging. It is widely used in biomedical field, such as tumor detection. Photoacoustic images can not only reflect the structural characteristics of tissues, but also reflect the metabolic state, disease characteristics and even nerve activity of tissues, so as to realize functional imaging. Photoacoustic (PA) signals are inherently recorded in noisy environments and are also exposed to the noise of system components. The presence of noise has a great negative impact on image quality and interferes with image details. Therefore, it is necessary to reduce the noise in PA signals to reconstruct images with less interference information. Because deep learning can process image information quickly and efficiently, deep learning has become the preferred method for photoacoustic image denoising in recent years. In this study, the photoacoustic blood vessel image obtained was added with a certain intensity of Gaussian noise, and the denoising generative adversarial network based on Wasserstein distance (WGAN) was used to denoise the photoacoustic blood image. For the purpose of evaluation, the Peak Signal-to-Noise Ratio (RSNR), Structural Similarity Index Metric (SSIM), Universal Quality Index (UQI) and Image Enhancement Factor (IEF) were calculated. According to the calculation results, this study effectively improves the image quality, proves the effectiveness of the neural network, and has good clinical significance and broad application prospects.","PeriodicalId":217586,"journal":{"name":"Optical Systems Design","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121055750","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Simulation study on EUV multilayer polarization effects","authors":"L. Bilalaj, H. Mesilhy, A. Erdmann","doi":"10.1117/12.2599904","DOIUrl":"https://doi.org/10.1117/12.2599904","url":null,"abstract":"The impact of polarization was observed in the extreme ultraviolet (EUV) imaging simulations for high NA lithography [3] [4] [5]. It is shown that polarized illumination can improve the local contrast of images or NILS (normalized intensity log slope). This work investigates the possibilities to polarize EUV light by optimized multilayers. The characterization and simulation of multilayer structures has been performed using Dr.LiTHO [10]. The most efficient multilayer polarizers operate close to Brewster angle, where the reflectivity for TM polarized light (RTM) is close to zero, according to Fresnel’s equations. A multiobjective optimization algorithm was used to identify the suitable multilayer configurations maximizing reflectivity of TE polarized light (RTE) and fraction of polarization. Fraction of polarization (FoP) was calculated as the ratio between (RTE-RTM)/(RTE+RTM) to obtain the suitable multilayer with variable thickness. The multilayer structure is optimized to have the highest reflectivity of TE polarized light and fraction of polarization at the Brewster angle. It was found that MoSi multilayer can achieve 99.9% fraction of polarization by optimizing the thickness of Si and Mo. In reality, a multilayer polarizer has to operate over certain ranges of incident angles and/or wavelength ranges. Multilayer is optimized for different ranges of wavelength (13 nm : 14 nm) and incidence angles (37° : 47°). Additional simulations investigate the impact of different options in the design of the multilayer (e.g., constant vs. variable bilayer thickness) and materials (e.g., RuSi vs. MoSi multilayers) on the achievable performance.","PeriodicalId":217586,"journal":{"name":"Optical Systems Design","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129664074","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Visualization of the photothermal effect of mouse brain based on Monte Carlo and finite element method","authors":"Wen-han Jiang, Xianlin Song","doi":"10.1117/12.2600763","DOIUrl":"https://doi.org/10.1117/12.2600763","url":null,"abstract":"Photothermal imaging plays an important role in brain structural and functional imaging. However, the skull has a strong scattering effect on photons, it is necessary to study the propagation behavior and thermal effect of photons in brain. In this study, MCmatlab, an open source program in MATLAB, which combines the Monte Carlo method with finite element method, was used to build a photothermal model of mouse brain to simulate the movement of photons in mouse brain. Monte Carlo method is commonly used to solve the distribution of light in biological tissues, and FEM (Finite Element Method) can effectively solve the distribution of optical parameters in biological tissues, and helps to obtain an approximate solution of the radiation transfer equation (RTE). By constructing a 3D model to observe the structure of each layer of the brain more intuitively, the laser pulse propagation in the mouse brain and the temperature distribution of each layer of brain tissue were obtained by the RTE solver and the finite element thermal diffusion solver included in MCmatlab.","PeriodicalId":217586,"journal":{"name":"Optical Systems Design","volume":"365 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123386493","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Opto-thermal simulation model for optimizing the thermal response of the optical properties of Ce:YAG single-crystal phosphors","authors":"Elisavet Chatzizyrli, Angeliki Afentaki, Moritz Hinkelmann, R. Lachmayer, J. Neumann, D. Kracht","doi":"10.1117/12.2597095","DOIUrl":"https://doi.org/10.1117/12.2597095","url":null,"abstract":"As laser diodes (LDs) replace LEDs in the remote phosphor setup, a new class of lighting solutions emerges, giving rise to laser-excited remote phosphor (LERP) systems. While already in use in some commercial applications such as automotive lighting, these systems have not yet matured. The optical behavior of phosphors is temperature dependent, specifically the absorption coefficient, the conversion efficiency reflected in the quantum efficiency (QE) coefficient, and, to a lesser extent, the emission spectrum. For this reason, opto-thermal analysis is critical for further investigating and optimizing these systems. A steady-state opto-thermal simulation scheme that combines ray tracing in OpticStudio software with heat transfer calculations using the finite element method (F.E.M.) in ANSYS is presented and experimentally validated here. Furthermore, the temperature-dependent models established for phosphor properties are used to optimize the phosphor sample.","PeriodicalId":217586,"journal":{"name":"Optical Systems Design","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129816762","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Application of the global discrete-continuous optimization method with selective variables averaging to design of a fast NIR lens","authors":"A. Terentyev, E. Muslimov, N. Pavlycheva","doi":"10.1117/12.2597065","DOIUrl":"https://doi.org/10.1117/12.2597065","url":null,"abstract":"Design of an optical system implies definition of its' parameters including both continuous and discrete variables. The first group is corresponds to such parameters as radii of curvature and axial thicknesses, and the second one consists of the optical materials types. A number of algorithms to optimize both groups of variables simultaneously was developed and implemented in optical design software. However, as the working spectral range expands and requirements to the systems' aperture and performance increase, the efficiency of existing design tools for mixed-variables optimization may appear to be insufficient. On top of this, the standard optimization tools do not provide all the necessary control and customization options Therefore, we consider a custom optimization tool to perform a global search in mixed variables. It is based on the method of global optimization with selective averaging of variables. A positive selectivity coefficient is introduced into a positive decreasing functional kernel. With increase of the coefficient the averaging provides convergence of the target discrete variables to the optimal solution. We apply this principle to develop a custom optimization tool. It is used for optimization of an f/1.8 objective lens working in the NIR range of 0.9-1.8 microns with the field of view of 10 deg. We analyze the optimization process convergence in the continuous and discrete variables space and compare our results with the existing optimization tools.","PeriodicalId":217586,"journal":{"name":"Optical Systems Design","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125881801","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Deep learning applied to quad-pixel plenoptic images","authors":"Guillaume Chataignier, B. Vandame, J. Vaillant","doi":"10.1117/12.2597001","DOIUrl":"https://doi.org/10.1117/12.2597001","url":null,"abstract":"In recent years, we have seen the development of integrated plenoptic sensors, where multiple pixels are placed under one microlens. It is mainly used by cameras and smartphones to drive the autofocus of the main lens, and it often takes the form of dual-pixels with 2 rectangular sub-pixels. We study the evolution of dual-pixels, the so-called quad-pixel sensor with 2x2 square sub-pixels under the microlens. As it is a simple light field capturing device, we investigate the computational photography abilities of such sensor. We first present our work on pixel-level simulations, then we present a model of image formation taking into account the diffraction by the microlens. Finally, we present new ways to process a quad-pixel images based on deep learning.","PeriodicalId":217586,"journal":{"name":"Optical Systems Design","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123502806","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}