Materials Chemistry and Physics最新文献

{"title":"Successfully achieved extrusion at a hybrid (SiCp-Cf)/AZ91 composite with a 50 % volume fraction","authors":"Yufan Jiang ,&nbsp;Kaibo Nie ,&nbsp;Kunkun Deng ,&nbsp;Quanxin Shi ,&nbsp;Jinhai Zhang","doi":"10.1016/j.matchemphys.2025.130842","DOIUrl":"10.1016/j.matchemphys.2025.130842","url":null,"abstract":"<div><div>A hybrid (SiC_p-C_f)/AZ91 composite with a 50 vol% has been prepared by melt infiltration for the first time. Uniform distribution of SiC_p and C_f was observed in the as-cast composite. The thermal deformation behavior of the hybrid (SiC_p-C_f)/AZ91 composites with the high volume fraction was firstly studied based on the true flow stress-strain curve and the evolution of the thermal processing map. The increase in temperature and reduction in strain rate led to lower stress values on the true stress-strain curve. Furthermore, as the strain increased, the area of the instability zone in the thermal processing map gradually diminished, and the activation energy decreased. Calculations and simulations identified the workability region of the composite material as 680–773 K and 0.003 to 0.1 s⁻¹. Based on these findings, hot extrusion of high volume fraction magnesium matrix composite was successfully initiated for the first time. During extrusion, fracture and directional alignment of C_f along the extrusion path enhanced the flow of the matrix alloy AZ91 and SiC_p, thereby facilitating deformation. Compared to the as-cast composite, the extruded composite exhibited reduced porosity and enhanced mechanical properties, with ultimate tensile strength and elastic modulus reaching 370 MPa and 157 GPa, respectively. Additionally, the thermal expansion coefficient of the extruded composite was approximately 50 % lower than that of the AZ91 alloy. The composites also demonstrated superior high-temperature thermal stability between 300 °C and 400 °C.</div></div>","PeriodicalId":18227,"journal":{"name":"Materials Chemistry and Physics","volume":"340 ","pages":"Article 130842"},"PeriodicalIF":4.3,"publicationDate":"2025-04-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143807154","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Efficient and stable dehydrogenation of ethylbenzene over vanadia supported on ultra-fine Al2O3 nanofibers with excellent physicochemical properties","authors":"Quanhua Wang ,&nbsp;Yuhao Zong ,&nbsp;Yanchao Liu ,&nbsp;Haixia Hu ,&nbsp;Yanwei Yue ,&nbsp;Xingxing Xie ,&nbsp;Lixing Guo ,&nbsp;Qingyuan Hu ,&nbsp;Hu Wang ,&nbsp;Jinke Li ,&nbsp;Jiajun Shi ,&nbsp;Lichen Zhang ,&nbsp;Jiajun Zheng ,&nbsp;Shuwei Chen","doi":"10.1016/j.matchemphys.2025.130818","DOIUrl":"10.1016/j.matchemphys.2025.130818","url":null,"abstract":"<div><div>The design and development of a highly efficient and stable catalyst for styrene (ST) obtained from ethylbenzene (EB) dehydrogenation reaction is urgently required because a commercial Fe–K-based catalyst often undergoes severe deactivation resulted from the active phase decomposition into inactive ferrite compound at high temperatures (&gt;600 °C). Herein, ultra-fine Al₂O₃ nanofibers which are further self-assembled to form uniform rod-like morphology (R–Al₂O₃) were fabricated via a facile sol-gel strategy and further utilized as support to dispersing vanadium species (V/R–Al₂O₃). The physicochemical properties of the samples were systematically characterized by XRD, Raman, SEM, TEM, H₂-TPR, CO₂-TPD, XPS, and ²⁷Al MAS NMR techniques. It is found that except that R–Al₂O₃ support has the merits of a high specific surface area, lager pore volume, and uniform mesopore structure, the presence of the unsaturated pentacoordinate Al³⁺ ions plays a pivotal role in better dispersing V active species, with the existence of the isolate and/or polymeric forms. As compared to V/C–Al₂O₃ (commercial Al₂O₃ as support), the V/R–Al₂O₃ catalyst endows outperformed catalytic performances for oxidative dehydrogenation of ethylbenzene in the presence of CO₂ (OEBDH-CO₂). In which, the V/R–Al₂O₃ catalyst gives a high EB catalytic activity and good stability without significant deactivation phenomenon being detected even after the third regeneration test. Such a result can be principally ascribed to that R–Al₂O₃ support with excellent textural properties can better disperse V species so as to expose more active sites, which is beneficial for improving the conversion efficiency of EB. More importantly, keeping/regaining high valence state of V species in the V/R–Al₂O₃ catalyst under CO₂ as a soft oxidant effectively promotes Mars-Van Krevelen redox cycle, further suppressing the catalyst deactivation. This work provides a rational design strategy for a high efficiency and stable dehydrogenation catalyst by optimizing the textural properties of Al₂O₃ support and introducing the unsaturated pentacoordinate Al³⁺ ions.</div></div>","PeriodicalId":18227,"journal":{"name":"Materials Chemistry and Physics","volume":"340 ","pages":"Article 130818"},"PeriodicalIF":4.3,"publicationDate":"2025-04-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143760272","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Controllable synthesis and characterization of In2O3 nanopowder in the NH4Ac-HCl buffer system","authors":"Liang Sun,&nbsp;Yudong Yang,&nbsp;Yuhu Li,&nbsp;Menghui Liu,&nbsp;Yingzhe Wang","doi":"10.1016/j.matchemphys.2025.130813","DOIUrl":"10.1016/j.matchemphys.2025.130813","url":null,"abstract":"<div><div>In response to the severe agglomeration and poor dispersibility of indium oxide prepared by the chemical precipitation method, this study investigates the synthesis of In₂O₃ within the NH₄Ac-HCl buffer solution system. SEM, XRD, and other characterization techniques were employed to study the effects of buffer solution pH and feeding method on the morphology and particle size of the indium oxide powder, as well as to characterize their physical and chemical properties. The results indicated that the introduction of the NH₄Ac-HCl buffer system into the reaction solution effectively inhibits nucleation and promotes the growth of crystal nuclei, thereby reducing particle agglomeration. By maintaining the buffer system's pH within a narrow range of 3.5–4.5, we achieved the synthesis of spherical indium oxide particles with an average diameter of 60 nm. These particles demonstrate high crystallinity and are devoid of agglomeration. Moreover, the buffer system alters the optical characteristics of In₂O₃, narrowing its direct band gap from 3.20 eV to 2.95 eV. Notably, In₂O₃ synthesized at a pH of 4.5 exhibits the lowest intensity of photoluminescence (PL) emission peaks, suggesting a higher level of crystalline integrity and a lower incidence of defects. Photocatalytic degradation studies provide further validation of our findings. At a pH of 4.5 within the buffer system, the degradation rate of indium oxide for methylene blue (MB) is measured to be 55 ± 1 %, which is significantly lower than the degradation rate of 93 ± 1 % observed in the control system.</div></div>","PeriodicalId":18227,"journal":{"name":"Materials Chemistry and Physics","volume":"340 ","pages":"Article 130813"},"PeriodicalIF":4.3,"publicationDate":"2025-04-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143821017","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"The role of oral microbiota in accelerating corrosion of Ti6Al4V: An electrochemical study","authors":"Xudiyang Zhou ,&nbsp;Ao Leng ,&nbsp;Changpeng Li ,&nbsp;Tianyi Tang ,&nbsp;Jin Xu ,&nbsp;Boxin Wei ,&nbsp;Bokai Liao ,&nbsp;Cheng Sun","doi":"10.1016/j.matchemphys.2025.130836","DOIUrl":"10.1016/j.matchemphys.2025.130836","url":null,"abstract":"<div><div>This study examines the effect of oral microflora on the corrosion behavior of Ti6Al4V alloy in an aerobic environment. Electrochemical tests reveal that microbial activity significantly accelerates corrosion, increasing the corrosion current density from 4.8 nA/cm² under sterile conditions to 11.6 nA/cm². Fluorescence imaging confirms non-uniform biofilm formation, which creates localized microenvironments that promote pitting. Acid-producing bacteria, such as <em>Streptococcus mutans</em>, lower the pH of artificial saliva to approximately 6.5, enhancing metal dissolution. Scanning electron microscopy (SEM) further reveals pronounced pitting corrosion in microbial-inoculated samples. These findings underscore the need for advanced surface treatments and protective strategies to enhance the corrosion resistance of Ti6Al4V alloys in biomedical applications.</div></div>","PeriodicalId":18227,"journal":{"name":"Materials Chemistry and Physics","volume":"340 ","pages":"Article 130836"},"PeriodicalIF":4.3,"publicationDate":"2025-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143800225","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Microwave-assisted synthesis of Nb2AlC MAX phase from aluminum-Nb2O5-carbon precursors","authors":"Zahra Jahandideh ,&nbsp;Ehsan Ghasali ,&nbsp;Touradj Ebadzadeh ,&nbsp;Seyed Mohammad Mirkazemi","doi":"10.1016/j.matchemphys.2025.130838","DOIUrl":"10.1016/j.matchemphys.2025.130838","url":null,"abstract":"<div><div>In this work, the microwave synthesis of the Nb₂AlC MAX phase was undertaken using Nb₂O₅, Al, and C precursors. MAX phases constitute a novel family of ceramic-metallic compounds with a unique layered structure, exhibiting a combination of ceramic and metallic properties. The synthesis was carried out at a temperature of 1200 °C with a 2-h dwell time at the maximum temperature. Comprehensive structural and microstructural characterization employing X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), X-ray photoelectron spectroscopy (XPS) and High-resolution transmission electron microscopy (HRTEM) techniques unambiguously confirmed the successful synthesis of the Nb₂AlC MAX phase with the desired crystallographic structure. The findings highlight the efficacy of the microwave synthesis approach for the fabrication of the Nb₂AlC MAX phase and elucidate the profound impact of temperature and dwell time on the synthesis process and the resultant product characteristics. This work represents a significant advancement in the optimization of MAX phase synthesis via the microwave route, emphasizing the critical influence of synthesis parameters on the production of advanced materials with tailored properties.</div></div>","PeriodicalId":18227,"journal":{"name":"Materials Chemistry and Physics","volume":"340 ","pages":"Article 130838"},"PeriodicalIF":4.3,"publicationDate":"2025-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143800317","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"XANES-EXAFS spectroscopy for discerning and retrieval of atomic and coordination states of a diverse single-metal-atomic structures","authors":"Anubha Yadav,&nbsp;Tapan Dey,&nbsp;Twinkle Joshi,&nbsp;Saikat Dutta","doi":"10.1016/j.matchemphys.2025.130837","DOIUrl":"10.1016/j.matchemphys.2025.130837","url":null,"abstract":"<div><div>Due to the outstanding accomplishments of single-metal-atom electrocatalysts in the context of nanomaterials for a broad spectrum of electrochemical energy conversions, there is a pressing need to further advance the X-ray absorption spectroscopic determination discerning and analysing tool for the purpose of confirming the coordination structure of a wide-range of single-metal-atomic materials. This range includes isolated/correlated single-metal-atom, single-metal-atom alloy, dual-metal single-atom, single-atom dimer, nano-single-atom, and interfacial single-atomic heterostructures. XANES-EXAFS spectra elucidate the exact electronic and geometric configuration of central metal by a combined package of FT-EXAFS spectra and WT-contour-EXAFS fitting. XANES-EXAFS spectroscopic determination of electronic and atomic structure also illustrates the significance of synchrotron X-ray spectroscopic techniques in classifying the electrochemical activity patterns of varied types of single-metal-atom electrode materials. This article addresses a range of questions such as: nature of EXAFS spectral peaks linked to varied coordination structure/environment around central metal-atoms including isolated/correlated single-metal-atom, single-metal-atom alloy, dual-metal single-atom, single-atom dimer, nano-single-atom, interfacial single-atomic heterostructuresand link between electrochemical performance trend and discerning coordination environment of central metal-atom of above single-atomic materials. Finally, the capability of XANES-EXAFS spectra is addressed for distinguishing the coordination and electronic environment of a wide-range single-atom systems including vivid electrochemical features linked to their coordination structure to take on future grand challenges. Moreover, while insightfully discussing distinct features of a broad range of single-metal-atom systems, maximum atom utilization, enhanced density of atoms, nano-confinement effects were linked with XANES-EXAFS spectral features which pave the way for future directions. Many review articles have focused on the engineering of atomically dispersed single atoms and their derivatives (such as single-atom-dimer, single-atom-alloy, etc) but methods of data extraction, their analysis protocols and revealing electronic structures are still unaddressed. In this review article we have elucidated principles of XAS and XAFS techniques, which are the core in identifying atomically dispersed single atoms. This article provides a base knowledge to the readers about soft and hard X-ray techniques, and which can be effective based on the material designing. This also provides a brief description of core shell electronic transitions which are very crucial in identifying the electronic states as well as coordination environments across the metal active center.</div></div>","PeriodicalId":18227,"journal":{"name":"Materials Chemistry and Physics","volume":"340 ","pages":"Article 130837"},"PeriodicalIF":4.3,"publicationDate":"2025-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143800133","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Antibacterial TiO2 nanoparticles and hydroxyapatite loaded carboxymethyl cellulose bio-nanocomposite scaffold for wound dressing application","authors":"Qiong Wang ,&nbsp;Mahani Yusoff ,&nbsp;Nur Ain Atisya C.M. Khairuddin ,&nbsp;Nur Adibah Roslan ,&nbsp;Mohd Hasmizam Razali","doi":"10.1016/j.matchemphys.2025.130835","DOIUrl":"10.1016/j.matchemphys.2025.130835","url":null,"abstract":"<div><div>One of the most promising new directions in addressing the shortcomings of traditional tissue substitutes for serious injuries was tissue engineering. This study details the development of an antibacterial nanocomposite scaffold using carboxymethyl cellulose incorporating TiO₂ nanoparticles and hydroxyapatite (TiO₂NP + HA@CMC) for wound dressing application to enhance skin tissue regeneration. FTIR, XRD, SEM, TGA, swelling, and degradation were among the several analyses used to thoroughly evaluate and characterise the TiO₂NP + HA@CMC scaffold and its predecessors. The scaffolds' abilities to inhibit bacteria as well as promote cell adherence and viability were investigated. The in-vitro analyses revealed that the addition of TiO₂NP + HA to the scaffold significantly improved its antibacterial properties as 7.70 ± 0.02 mm and 5.20 ± 0.06 mm inhibition zone against <em>S.aureus</em> and <em>E.coli</em> were observed. The swelling capacity and biodegradation of the TiO₂NP + HA@CMC scaffold was increased due to the presence of TiO₂NP and HA. In-vitro results demonstrated that the TiO₂NP + HA@CMC nanocomposite scaffold exhibited satisfactory biocompatibility and supported cell viability on normal human skin fibroblast cells. Moreover, in-vivo wound healing potential showing 100 % wound closure using TiO₂NP + HA@CMC nanocomposite scaffold as compared to 88.40 % of control sample, highlighting its potential for clinical applications.</div></div>","PeriodicalId":18227,"journal":{"name":"Materials Chemistry and Physics","volume":"340 ","pages":"Article 130835"},"PeriodicalIF":4.3,"publicationDate":"2025-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143800328","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Impact of Zn/Sn variations on the microstructure, mechanical properties, and biocorrosion of T4-Treated Mg-0.5Ca-Zn-(Sn) alloys for orthopaedic implants","authors":"Pradipta Kumar Rout ,&nbsp;Sourav Ganguly ,&nbsp;Sudesna Roy ,&nbsp;Dinesh Kumar Rathore","doi":"10.1016/j.matchemphys.2025.130834","DOIUrl":"10.1016/j.matchemphys.2025.130834","url":null,"abstract":"<div><div>This study investigates the influence of Zn and Sn on the microstructure, mechanical properties, and corrosion resistance of T4-treated, squeeze-cast Mg-0.5Ca–Zn-(Sn) alloys fabricated under 300 MPa pressure. The alloys—Mg-0.5Ca–1Zn (A), Mg-0.5Ca–1Zn-0.5Sn (B), Mg-0.5Ca–1Zn–1Sn (C), and Mg-0.5Ca–2Zn–1Sn (D)—underwent T4 solution heat treatment and were characterized using XRD and FE-SEM. The T4-treatment resulted in the formation of Mg₂Zn₁₁, with Ca and Sn retained in solid solution, contributing to solid solution strengthening. Increased Zn and Sn content enhanced mechanical properties, with alloys Mg-0.5Ca–1Zn–1Sn and Mg-0.5Ca–2Zn–1Sn demonstrating higher microhardness (74.8 ± 3.9 HV and 84.8 ± 3.6 HV, respectively) and compressive strength (247.75 ± 6.44 MPa and 282.61 ± 7.91 MPa, respectively). Corrosion tests in Hank's Balanced Salt Solution (HBSS) indicated that Sn-modified alloys exhibited lower corrosion rates, with Mg-0.5Ca–1Zn–1Sn and Mg-0.5Ca–2Zn–1Sn showing the lowest initial corrosion current densities (0.328 ± 0.011 and 0.240 ± 0.002 μA cm⁻², respectively). Post-corrosion analysis confirmed that Mg-0.5Ca–2Zn–1Sn alloy developed a compact Mg(OH)₂ layer, followed by Mg-0.5Ca–1Zn–1Sn, contributing to improved corrosion resistance. These results highlight that Sn-modified, T4-treated Mg–Ca–Zn alloys, particularly Mg-0.5Ca–1Zn–1Sn and Mg-0.5Ca–2Zn–1Sn with 1 wt% Sn, exhibit superior mechanical strength and corrosion resistance, making them promising candidates for biodegradable orthopaedic implants.</div></div>","PeriodicalId":18227,"journal":{"name":"Materials Chemistry and Physics","volume":"340 ","pages":"Article 130834"},"PeriodicalIF":4.3,"publicationDate":"2025-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143800318","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Porous ceramics via 3D printing and emulsion templating","authors":"Loïc Mathieu,&nbsp;Anne Aimable,&nbsp;Julie Bourret,&nbsp;Vincent Pateloup,&nbsp;Cécile Pagnoux","doi":"10.1016/j.matchemphys.2025.130839","DOIUrl":"10.1016/j.matchemphys.2025.130839","url":null,"abstract":"<div><div>Coupling foaming or emulsion templating techniques with additive manufacturing is a very efficient and innovative method for the elaboration of tailored materials with a hierarchical porosity. During this work, new formulations have been developed driven by a low toxicity to health and the environment approach, based on the combination of an emulsion with a vegetable oil, with no surfactant, and a suspension of halloysite. This mineral, with a nanotubular morphology, is known for its ability to stabilize Pickering emulsions. The emulsion template being directly transformed into porosity after thermal treatments was characterized at each step. At first, different formulations of emulsions without solid phase were studied in terms of stability, and droplets size and their dispersion. In a second step, the emulsions were enriched with the mineral phase. Robocasting process, also known as Direct Ink Writing (DIW), imposes both plasticity and consistency to the formulated pastes for optimal processing, which could be adjusted through both oil and solid fractions. The porosity of the printed ceramic structures was then evaluated after the elimination of the template and at different sintering temperatures. This approach allows to achieve complex geometries with high porosity, between 60 % and 70 % of the volume depending on the heat treatment, and a very good preservation of the shape of the printed objects and the pores created by the emulsion template.</div></div>","PeriodicalId":18227,"journal":{"name":"Materials Chemistry and Physics","volume":"340 ","pages":"Article 130839"},"PeriodicalIF":4.3,"publicationDate":"2025-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143821016","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Gas phase and surface processes of SiCxNyOz film formation by parallel plate plasma-enhanced chemical vapor deposition without heat assistance","authors":"Hitoshi Habuka","doi":"10.1016/j.matchemphys.2025.130830","DOIUrl":"10.1016/j.matchemphys.2025.130830","url":null,"abstract":"<div><div>The three steps to quantitatively evaluate the gas phase and the surface processes were developed for a SiC_<em>x</em>N_<em>y</em>O_z film formation using the parallel plate plasma-enhanced chemical vapor deposition without heat assistance. (A) The measured film thickness was expressed by the thickness equation using the fourth-degree polynomial forms of the mathematical product of the electric current, <em>I</em>, and the partial pressures, <em>P</em>, of the monomethylsilane, nitrogen and argon gases. (B) The data set consisting of the film thickness and the film formation conditions in the typical thickness range was prepared using the thickness equation. (C) The data set was analyzed assuming the gas phase and the surface processes, such as (i) the multi-order reactions of the nitrogen and the monomethylsilane gases in the gas phase to produce the intermediate compound, (ii) the chemisorption of the intermediate compound at the surface, (iii) the decomposition of the chemisorbed intermediate compound by the argon gas to produce the SiC_<em>x</em>N_<em>y</em>O_z film and (iv) the etching of the SiC_<em>x</em>N_<em>y</em>O_z film surface by the argon gas. The film thickness was sufficiently reproduced by the rate equation in this study. The surface coverage by the intermediate compound was evaluated to be 0.02–0.1 %. The influence of the argon etching was significant, because only 8–18 % of the total formed thickness remained as the film.</div></div>","PeriodicalId":18227,"journal":{"name":"Materials Chemistry and Physics","volume":"340 ","pages":"Article 130830"},"PeriodicalIF":4.3,"publicationDate":"2025-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143800135","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}