2007 IEEE SensorsPub Date : 2007-12-17DOI: 10.1109/ICSENS.2007.4388338
C. Mousoulis, D. Papageorgiou
{"title":"A Multi-Layer Parylene Electrode Array for Use in an Implantable Microsystem for Treatment of Neurological Disorders","authors":"C. Mousoulis, D. Papageorgiou","doi":"10.1109/ICSENS.2007.4388338","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.4388338","url":null,"abstract":"This paper presents a multi-layer parylene electrode array for neural recording and stimulation. The immediate targeted use is for cerebral surface recordings of patients suffering from epileptic seizures. Ultimately, it will serve as the neural interface portion of a larger, fully implantable system to be used in the treatment of neurological disorders such as Parkinson's disease, essential tremor and epilepsy. The probe array consists of a parylene-Ti-parylene structure with sites and pads formed by Ti/Au deposition. The use of Parylene-C provides flexibility and improved electrical and mechanical properties compared to conventional polymers. The probes were characterized in-vitro, exhibiting sufficiently low impedance, suitable for neural stimulation and recording.","PeriodicalId":150188,"journal":{"name":"2007 IEEE Sensors","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115698239","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2007 IEEE SensorsPub Date : 2007-12-17DOI: 10.1109/ICSENS.2007.4388476
O. Gregory, Xi-ming Chen
{"title":"A Low TCR Nanocomposite Strain Gage for High Temperature Aerospace Applications","authors":"O. Gregory, Xi-ming Chen","doi":"10.1109/ICSENS.2007.4388476","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.4388476","url":null,"abstract":"Ceramic strain gages are being developed to monitor the structural integrity of gas turbine engine components employed in aerospace propulsion and power generation systems. Specifically, ceramic thin film strain gages based on indium-tin-oxide (ITO) and refractory metal (Pt, W, Ni, NiCoCrAlY) nanocomposites were investigated to achieve very low TRC's in the active strain element. Nanocomposite sensor elements were prepared from a number of ITO/Pt combinatorial libraries by co-sputtering onto alumina substrates placed in between ITO and Pt sputtering targets. Temperature coefficient of resistance (TCR) measurements of the resulting nanocomposites were made by thermally cycling the strain sensors from room temperature to 1000degC and measuring the piezoresistive response from room temperature to 1200degC at strain levels up to 1000 muepsiv. The chemical composition of the most promising combinatorial libraries was analyzed by EDS /SEM. Preliminary results indicated that a near zero TCR could be achieved over an extended temperature range in nanocomposite strain sensors containing less than 10% ITO. Even though EDS revealed that the bulk of the nanocomposite strain sensor was platinum, a relatively large gage factor (~26.0) and low drift rate (0.018%/hr) were realized with the nanocomposite. Based on these results, other combinatorial libraries employing ITO-refractory metal nanocomposites including ITO-W, ITO-Ni and ITO-NiCoCrAlY were investigated for high temperature strain gage applications. These combinations did not perform as well as ITO-Pt in terms of TCR and piezoresistive response when compared to those established for the ITO-Pt nanocomposite gages.","PeriodicalId":150188,"journal":{"name":"2007 IEEE Sensors","volume":"68 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123107511","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2007 IEEE SensorsPub Date : 2007-12-17DOI: 10.1109/ICSENS.2007.4388639
E. Shen, H. Mebrahtu, Wei Gao, A. Badali, P. Thomas, R. Hornsey
{"title":"High Precision Image Sensor Scale Factor Calibration","authors":"E. Shen, H. Mebrahtu, Wei Gao, A. Badali, P. Thomas, R. Hornsey","doi":"10.1109/ICSENS.2007.4388639","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.4388639","url":null,"abstract":"A correlation method is described wherein the calibration accuracy of a commercial precision translator is transferred to the image plane of a camera system through the determination of normalized magnification and scale factor. For example, a commercial translator can have a calibration fractional error of between 10-4 - 10-6 or smaller. This calibration technique employs a simple experimental apparatus consisting of a camera system (CMOS detector and lens), linear translators and a large \"random-dot\" target. By correlating the shift in a sub-region of the image with the translation of the target over a sequence of translations, the fractional error of the normalized magnification was measured to be 10-4. For applications where the object size is of primary importance (industrial inspection, object tracking), this precision can be traded off for convenience or speed.","PeriodicalId":150188,"journal":{"name":"2007 IEEE Sensors","volume":"107 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121828474","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2007 IEEE SensorsPub Date : 2007-12-17DOI: 10.1109/ICSENS.2007.4388557
R. Beigelbeck, F. Kohl, F. Keplinger, J. Kuntner, B. Jakoby
{"title":"A Novel Characterization Method for Thermal Thin-Film Properties Applied toPECVD Silicon Nitride","authors":"R. Beigelbeck, F. Kohl, F. Keplinger, J. Kuntner, B. Jakoby","doi":"10.1109/ICSENS.2007.4388557","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.4388557","url":null,"abstract":"Design, simulation, and optimization of micromachined sensor devices often require accurate knowledge of thermal thin-film properties, e. g., for PECVD-Si3N4. These thermal parameters can differ considerably from those stated for bulk material and they are typically process-dependent. We developed a novel method to determine the thermal conductivity as well as the heat capacity of such thin-films based on a micromachined cantilever device. In this contribution, we describe a newly devised test device together with the associated extraction procedure and report on an experimental verification for a dielectric PECVD silicon nitride thin-film.","PeriodicalId":150188,"journal":{"name":"2007 IEEE Sensors","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116922892","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2007 IEEE SensorsPub Date : 2007-12-17DOI: 10.1109/ICSENS.2007.4388492
K. Gobi, K. Matsumoto, K. Toko, H. Ikezaki, N. Miura
{"title":"Development of Polyethyleneglycol Monolayer-based SPR Immunosensor for Detection of Low-molecular-weight Fragrants","authors":"K. Gobi, K. Matsumoto, K. Toko, H. Ikezaki, N. Miura","doi":"10.1109/ICSENS.2007.4388492","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.4388492","url":null,"abstract":"We report our investigations on the development of a novel self-assembled monolayer (SAM)-based flow-through surface-plasmon-resonance (SPR) immunosensor for highly specific and rapid detection of benzaldehyde (BZ). The functional sensing surface was immobilized with a BZ derivative on the SAM of polyethyleneglycol-alkanethiols. Both the self-assembling of alkanethiols and the immobilization of BZ were controlled by the analysis of SPR resonance angle measurements. The BZ-bound SAM surface shows high specificity for immunoaffinity reaction with anti-BZ antibody (BZ-Ab). The quantification of benzaldehyde is based on the principle of indirect competitive immunoassay, in which the immunoreaction between the BZ derivative on sensor surface and anti-BZ antibody was inhibited in the presence of free BZ in solution. The decrease in SPR angle is proportional to the increase in the concentration of BZ in test samples. The SPR immunosensor exhibited excellent sensitivity for the detection of BZ in the concentration range from 0.1-80 ppb (ng ml-1). Detection limit of the present sensor is superior compared to various high-performance SPR and QCM sensors. Similarly, HPLC and GC techniques reported a low-detection-limit of only 10 ppb BZ, despite a set of sample pretreatments. In addition, enhancement of the SPR sensor signal and the sensitivity were investigated by introducing a single-step add-on strategy involving either Au nanoparticles or a simple biotinavidin coupling reaction, with which the detection limit has been improved dramatically.","PeriodicalId":150188,"journal":{"name":"2007 IEEE Sensors","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117053378","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2007 IEEE SensorsPub Date : 2007-12-17DOI: 10.1109/ICSENS.2007.4388513
Peitao Dong, Xuezhong Wu, Shengyi Li
{"title":"A High-Performance Monolithic Triaxial High-G Accelerometer","authors":"Peitao Dong, Xuezhong Wu, Shengyi Li","doi":"10.1109/ICSENS.2007.4388513","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.4388513","url":null,"abstract":"A high-performance monolithic triaxial piezoresistive accelerometer is developed for 50000-100000g measure range. An axial-stressed tiny-beam scheme is developed for the X and Y axial elements and a three-beam twin-mass structure is developed for Z-axis element. Both of these structures feature high sensitivity and high resonant frequency. The three sensing elements are monolithically integrated by micromachining techniques of double-sided deep etching combined with piezoresistive processes. A dropping-hammer calibration system is used to characterize the accelerometer. The sensitivity of the three elements is measured as 2.17, 2.25 and 2.64muV/g/5V respectively and the resonant frequency is 308, 303 and 164 kHz for each axial element. A novel time-domain separation method using a long and thin aluminum alloy bar is developed for the dropping test of cross-axis sensitivity. With this measurement technique, satisfactory cross-axis sensitivity is experimentally obtained for all the three axial elements, which contributes to the high-performance monolithic triaxial shock accelerometer.","PeriodicalId":150188,"journal":{"name":"2007 IEEE Sensors","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117352018","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2007 IEEE SensorsPub Date : 2007-12-17DOI: 10.1109/ICSENS.2007.4388407
M. Williams, B. Griffin, B. Homeijer, B. Sankar, M. Sheplak
{"title":"The Nonlinear Behavior of a Post-Buckled Circular Plate","authors":"M. Williams, B. Griffin, B. Homeijer, B. Sankar, M. Sheplak","doi":"10.1109/ICSENS.2007.4388407","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.4388407","url":null,"abstract":"The axisymmetric post-buckling behavior of a circular plate with initial in-plane compression loading is investigated. The von Karman plate equations are solved numerically for a clamped plate and solutions are presented for a range of transverse and in-plane loadings. These solutions can be used to predict the post-buckled behavior of microscale diaphragms. A tradeoff between sensitivity and linearity of post-buckled plates is also discussed.","PeriodicalId":150188,"journal":{"name":"2007 IEEE Sensors","volume":"312 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127145203","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2007 IEEE SensorsPub Date : 2007-12-17DOI: 10.1109/ICSENS.2007.4388597
Zhengchun Peng, P. Hesketh, Xiaoling Yang, Guigen Zhang
{"title":"Interdigitated Array Electrodes with Magnetic Function as a Particle-Based Biosensor","authors":"Zhengchun Peng, P. Hesketh, Xiaoling Yang, Guigen Zhang","doi":"10.1109/ICSENS.2007.4388597","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.4388597","url":null,"abstract":"A particle-based electrochemical biosensor was developed by integrating soft magnetic material, NiFe, with interdigitated array (IDA) electrodes. The NiFe strips were embedded beneath the IDA electrodes and acted as magnetic traps to collect the enzyme labeled paramagnetic particles from a microchannel flow of particle suspension. The IDA electrodes, which overlap on top of the NiFe strips, are designed to detect in close proximity the enzyme product that is produced from the particle surface. The sensors were fabricated in such a way that the particles were positioned among IDA electrodes without blocking the active electrode surface. The theoretical prediction of the sensor response is presented. It is expected that both sensitivity and limit of detection of the biosensor would be improved significantly.","PeriodicalId":150188,"journal":{"name":"2007 IEEE Sensors","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127493509","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2007 IEEE SensorsPub Date : 2007-12-17DOI: 10.1109/ICSENS.2007.4388466
M. Dandin, N. Nelson, V. Saveliev, Honghao Ji, P. Abshire, I. Weinberg
{"title":"Single Photon Avalanche Detectors in Standard CMOS","authors":"M. Dandin, N. Nelson, V. Saveliev, Honghao Ji, P. Abshire, I. Weinberg","doi":"10.1109/ICSENS.2007.4388466","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.4388466","url":null,"abstract":"We report an improved design and successful demonstration of single photon avalanche diode (SPAD) detectors fabricated in a standard nwell 0.5 mum CMOS technology. The detectors are implemented as circular junctions between p+ and nwell regions. Two techniques are used to suppress perimeter breakdown: guard rings at the edges of the junctions, formed using lateral diffusion of adjacent nwell regions, and a poly-silicon control gate over the diffused guard rings and surrounding regions. The detectors exhibit a breakdown voltage of -16.85 V, ~4 V higher than simple diode structures in the same technology. The detector exhibits a thermal event rate of 16000 counts/s at room temperature at an excess bias voltage of 1.15 V.","PeriodicalId":150188,"journal":{"name":"2007 IEEE Sensors","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127509548","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2007 IEEE SensorsPub Date : 2007-12-17DOI: 10.1109/ICSENS.2007.4388616
J. Martins-Filho, E. Fontana, J. Guimarães, D.F. Pizzato, I. Coêlho
{"title":"Fiber-optic-based Corrosion Sensor using OTDR","authors":"J. Martins-Filho, E. Fontana, J. Guimarães, D.F. Pizzato, I. Coêlho","doi":"10.1109/ICSENS.2007.4388616","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.4388616","url":null,"abstract":"We propose and demonstrate for the first time an optical sensor for the corrosion process in metal (Aluminum) using the optical time domain reflectometry (OTDR) technique. Our proposed sensor system consists of several sensor heads connected to a commercial OTDR by a single-mode optical fiber and fiber couplers. Each sensor head consists of an optical fiber having the cleaved end coated with an aluminum film. For laboratory measurements the corrosion action was simulated by controlled etching of the Al film on the sensor head. The OTDR detects the light reflected by each sensor head. As the aluminum is etched the reflection decreases. Our proposed sensor system is multipoint and can detect the corrosion rate for each head several kilometers away from the OTDR. This system may have applications in harsh environments such as in deepwater oil wells, for the evaluation of the corrosion process in the inner wall of the casing pipes.","PeriodicalId":150188,"journal":{"name":"2007 IEEE Sensors","volume":"83 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124733244","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}