A Multi-Layer Parylene Electrode Array for Use in an Implantable Microsystem for Treatment of Neurological Disorders

Abstract

This paper presents a multi-layer parylene electrode array for neural recording and stimulation. The immediate targeted use is for cerebral surface recordings of patients suffering from epileptic seizures. Ultimately, it will serve as the neural interface portion of a larger, fully implantable system to be used in the treatment of neurological disorders such as Parkinson's disease, essential tremor and epilepsy. The probe array consists of a parylene-Ti-parylene structure with sites and pads formed by Ti/Au deposition. The use of Parylene-C provides flexibility and improved electrical and mechanical properties compared to conventional polymers. The probes were characterized in-vitro, exhibiting sufficiently low impedance, suitable for neural stimulation and recording.