Volume 13: Micro- and Nano-Systems Engineering and Packaging最新文献

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Microtexture Dependence of Mechanical and Electrical Properties of Gold Thin Films Used for Micro Bumps of 3D Stacking Structures 用于三维堆积结构微凸起的金薄膜机电性能的微观纹理依赖性

Volume 13: Micro- and Nano-Systems Engineering and Packaging Pub Date : 2020-11-16 DOI: 10.1115/IMECE2020-23441

Genta Nakauchi, Shota Akasaki, H. Miura

{"title":"Microtexture Dependence of Mechanical and Electrical Properties of Gold Thin Films Used for Micro Bumps of 3D Stacking Structures","authors":"Genta Nakauchi, Shota Akasaki, H. Miura","doi":"10.1115/IMECE2020-23441","DOIUrl":"https://doi.org/10.1115/IMECE2020-23441","url":null,"abstract":"\u0000 The variation of their crystallinity, in other words, the order of atom arrangement of grain boundaries in electroplated gold thin films was investigated by changing their manufacturing conditions. Then, the effect of the crystallinity on both their mechanical and electrical properties was measured by using nano-indentation test and electromigration test. The crystallinity of the gold thin films was varied by changing the under-layer material used for electroplating. Also, the micro texture of gold thin films was evaluated by EBSD (Electron Back-Scatter Diffraction) and XRD (X-Ray Diffraction). It was clarified that the crystallinity of the electroplated gold thin films changed drastically depending on the crystallinity of the under-layer materials and electroplating conditions such as current density and temperature. This variation of the crystallinity should have caused wide variation of mechanical properties of the films. In addition, their mechanical properties such as Young’s modulus and hardness showed wide variation by about 3 times comparing with those of bulk gold. Similarly, the EM resistance of the electroplated gold bumps varied drastically depending on the ratio of porous grain boundaries and their crystallinity. Both the ratio and crystallinity also varied depending on the crystallinity of the under layer and electroplating conditions. The effective lifetime of the gold bumps was successfully predicted by considering both the crystallinity and residual stress of fine gold bumps. The lifetime varied more than 10 times as a strong function of the crystallinity of grain boundaries in the fine bumps. Therefore, it is very important to control the crystallinity of the under-layer for electroplating in order to control the distribution of the mechanical properties and reliability of the electroplated gold thin films.","PeriodicalId":121852,"journal":{"name":"Volume 13: Micro- and Nano-Systems Engineering and Packaging","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132640187","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Separation of Non-Viable Chinese Hamster Ovary (CHO) Cells Using Dielectrophoresis in a Deterministic Lateral Displacement Ratchet 用确定侧移棘轮电泳分离非活鼠卵巢细胞

Volume 13: Micro- and Nano-Systems Engineering and Packaging Pub Date : 2020-11-16 DOI: 10.1115/IMECE2020-23520

Mohammed Khan, Xiaolin Chen, Jie Xu

{"title":"Separation of Non-Viable Chinese Hamster Ovary (CHO) Cells Using Dielectrophoresis in a Deterministic Lateral Displacement Ratchet","authors":"Mohammed Khan, Xiaolin Chen, Jie Xu","doi":"10.1115/IMECE2020-23520","DOIUrl":"https://doi.org/10.1115/IMECE2020-23520","url":null,"abstract":"\u0000 Chinese hamster ovary (CHO) cell is the most widely used mammalian cell line for commercial production of therapeutic protein. Any presence of non-viable cells in culture medium may adversely affect subsequent functionality of these proteins. Therefore, separation of non-viable cells from suspending medium is critical in biopharmaceutical and biomedical sectors. One such method termed Deterministic Lateral Displacement has already shown promising capabilities in separating cells based on the cell size difference by taking advantage of the predictable flow laminae. However, in cases where size overlaps between viable and non-viable cells are present, separation based solely on size suffers and high-resolution separation techniques are required. Dielectrophoresis, one of the most widely used nonlinear electro-kinetic mechanism, has the potential to manipulate the same size cells depending on the dielectric properties of individual cells. In this work, we demonstrated that a DLD device can be combined with a frequency-based AC electric field to perform high resolution continuous separation of non-viable CHO cells from the viable or productive cells. The behavior of the coupled DLD-DEP device is further investigated by employing numerical simulation to check the effect of geometrical parameters of the DLD arrays, velocities of the flow field and required applied voltages. A moderate row shift fraction with velocity 700μm/s provided a good separation behavior without any trapping. The cell viability was also ensured by maintaining proper electric field which otherwise may cause cell loss due to ion leakage. Our developed numerical model and presented results lay the groundwork for design and fabrication of high resolution DLD-DEP microchips for enhanced separation of viable and nonviable cells.","PeriodicalId":121852,"journal":{"name":"Volume 13: Micro- and Nano-Systems Engineering and Packaging","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115609810","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Conductive Polymer-Based Sensor for Soil Nutrient Detection 基于导电聚合物的土壤养分检测传感器

Volume 13: Micro- and Nano-Systems Engineering and Packaging Pub Date : 2020-11-16 DOI: 10.1115/IMECE2020-24217

Yue He, Shenglong Zhang, Z. Dong, Fang Li

{"title":"Conductive Polymer-Based Sensor for Soil Nutrient Detection","authors":"Yue He, Shenglong Zhang, Z. Dong, Fang Li","doi":"10.1115/IMECE2020-24217","DOIUrl":"https://doi.org/10.1115/IMECE2020-24217","url":null,"abstract":"\u0000 To increase the production of crops, chemical fertilizers are used in crop fields. However, underuse or overuse cannot increase crop yields but even decrease them and cause severe environmental problems. Thus, the detection and monitoring of chemical concentration are increasingly important. To build up and monitor a data-based system for a large area, such a method is costly and time-consuming. In this research, we developed a conductive polymer-based sensor to detect nitrate concentrations in soil water. Conducting polymer poly(3,4-ethylenedioxythiophene) (PEDOT) was used as our sensing material. To increase its conductivity, we used the vacuum phase polymerization method to achieve a high conductive and stable polymer film. The conductivity of the polymer film is 500 S/cm. Our results have demonstrated that the conductive polymer-based sensors have high sensitivity to nitrate solution. The response to 1000 ppm nitrate solution is 47.2% (Response = (Initrate - IDIwate) / IDIwater). The sensors can detect nitrate range from 1ppm to 1000 ppm. The response time is less than 1 minute. This impedance-based sensor will eventually be integrated with the surface acoustic wave sensors, combined with an antenna and a GPR unit for low maintenance, autonomous, and in-situ soil nutrient sensing.","PeriodicalId":121852,"journal":{"name":"Volume 13: Micro- and Nano-Systems Engineering and Packaging","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125006525","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

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