{"title":"Wide Bandwidth Piezoelectric Energy Harvester With Transverse Movable Mass","authors":"Luis A. Rodriguez, N. Jackson","doi":"10.1115/IMECE2020-24488","DOIUrl":"https://doi.org/10.1115/IMECE2020-24488","url":null,"abstract":"\u0000 High Q-Factor vibrational energy harvesters are ideal as they maximize power generation, but a narrow bandwidth limits the potential use in most commercial applications, and it is a major challenge that has not been resolved. Numerous designs have been investigated to solve this challenge but most of the attempts are based on frequency sweeping mechanism or require complex design/fabrication which are not practical especially for MEMS devices. This paper reports for the first time a transverse vertical moving mass inside the proof mass as a method to widen the bandwidth which is independent of frequency sweeping. The out-of-plane movable mass is achieved by fabricating a vertical cavity in the proof mass and partially filling the cavity with metallic spheres. Ultra-wide bandwidth was achieved for low (0.5g) and high (1g) accelerations with an increase in bandwidth from 3.9 Hz (control) to 56 Hz (movable mass). This transverse method of widening the bandwidth is potentially scalable to MEMS devices.","PeriodicalId":121852,"journal":{"name":"Volume 13: Micro- and Nano-Systems Engineering and Packaging","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134332551","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Qinqiang Zhang, Xiangyu Qiao, Masasuke Kobayashi, Ken Suzuki
{"title":"Theoretical Study of Heterojunction-Like Electronic Properties Between a Semiconductive Graphene Nanoribbon and a Metallic Graphene for Highly Sensitive Strain Sensors","authors":"Qinqiang Zhang, Xiangyu Qiao, Masasuke Kobayashi, Ken Suzuki","doi":"10.1115/IMECE2020-23782","DOIUrl":"https://doi.org/10.1115/IMECE2020-23782","url":null,"abstract":"\u0000 Graphene shows unique super-conductive properties and graphene nanoribbons (GNRs) with band gaps are the candidates for a sensing component of highly sensitive strain sensors. Usually, there is a large energy barrier between electrodes and semiconductors which is not suitable for electron transfer. Therefore, ohmic contact between them is indispensable for fabricating electronic applications. In order to achieve the ohmic contact between external electrodes and detective elements in the devices, the dumbbell-shaped structure of GNRs was proposed for the basic structure of the GNR-based strain sensors, dubbed as dumbbell-shape GNR (DS-GNR). It consists of a long narrow GNR at the center of the structure as the sensing element coalesced with two wider GNRs at both ends of the narrow GNR as the contact components to external electrodes. Both narrow and wide segments of DS-GNR consist of only carbon atoms. The effect of the interaction in the vicinity of the junction area between wide metallic and narrow semiconductive GNRs, however, has not been clearly demonstrated. In this study, first-principles calculations were implemented to the analysis of the electronic band structure of the DS-GNR. It was found that the localized distribution of the energy states of electrons exists in the wide segment of DS-GNR. The changes varied from wide to narrow segment is smooth and observable as strong functions of the length and the width of DS-GNRs. The current-voltage characteristics showed curved semiconductive-like electronic properties with a smooth-electron flow in DS-GNR. Therefore, the DS-GNR has great potential for the use of next-generation highly sensitive and deformable strain sensors.","PeriodicalId":121852,"journal":{"name":"Volume 13: Micro- and Nano-Systems Engineering and Packaging","volume":"52 14","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131471022","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Crystallinity Dependence of Grain and Grain Boundary Strength of a Bicrystal Structure of Copper","authors":"Ken Suzuki, Yiqing Fan, Yifan Luo","doi":"10.1115/IMECE2020-23757","DOIUrl":"https://doi.org/10.1115/IMECE2020-23757","url":null,"abstract":"Electroplated copper thin films often contain porous grain boundaries and the volume ratio of porous grain boundaries in the copper thin films is much larger than that in bulk copper. Thus, the lifetime of the interconnection components fabricated by electroplating is strongly dominated by the strength of grain boundaries because final fracture caused by the acceleration of atomic diffusion during electromigration (EM) occurs at grain boundaries in polycrystalline interconnections. It is important, therefore, to quantitatively evaluate the grain boundary strength of electroplated copper films for estimating the lifetime of the interconnection in order to assure the product reliability. In this study, relationship between the strength and crystallinity of electroplated copper thin films was investigated experimentally and theoretically. In order to investigate the relationship between the strength and grain boundary quality, molecular dynamics (MD) simulations were applied to analyze the deformation behavior of a bicrystal sample and its strength. The variation of the strength and deformation property were attributed to the higher defect density around grain boundaries.","PeriodicalId":121852,"journal":{"name":"Volume 13: Micro- and Nano-Systems Engineering and Packaging","volume":"797 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123006910","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Chefu Su, Xinrui Xiang, Jirui Wang, E. Fratto, M. Charmchi, Zhiyong Gu, Hongwei Sun
{"title":"Simulation of Large-Scale Magnetic Manipulation of Micro/Nano-Material Based on Monte Carlo Method","authors":"Chefu Su, Xinrui Xiang, Jirui Wang, E. Fratto, M. Charmchi, Zhiyong Gu, Hongwei Sun","doi":"10.1115/IMECE2020-24052","DOIUrl":"https://doi.org/10.1115/IMECE2020-24052","url":null,"abstract":"\u0000 Magnetic assembly of micro/nano materials are of great interest due to their unique properties. These nano-scale materials can be ensemble with other matrixes to prepare for new functional micro/nano composites with enhanced specific properties such as, thermal conductivity. In this study, we demonstrated the distribution and magnetic alignment of nickel (Ni) nanoparticle/nanowires inside of a non-magnetic matrix, (e.g., water or a molten wax), experimentally and computationally. A two-dimensional Monte Carlo simulation model is employed to investigate the aggregate structures of Ni nanoparticle/nanowires subjected to a one-directional static magnetic field. It is anticipated that the applied magnetic strength will influence the attractive forces between nanoparticle/nanowires that will produce chain-like cluster structures parallel to magnetic direction where the aligned chains will be separated by a range of distances that are also function of magnetic field strength.","PeriodicalId":121852,"journal":{"name":"Volume 13: Micro- and Nano-Systems Engineering and Packaging","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133229128","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Airfoil Deterministic Lateral Displacement for High-Throughput Particle Separation in Viscous Fluids","authors":"Brian Senf, Kawkab Ahasan, Jong-Hoon Kim","doi":"10.1115/IMECE2020-23398","DOIUrl":"https://doi.org/10.1115/IMECE2020-23398","url":null,"abstract":"\u0000 Deterministic Lateral Displacement (DLD) is an inertial size-based particle separation technique with great possibilities for use with biological sample preparation. Recently it has been shown that particle shift of a DLD is highly dependent on the Reynolds number. Additionally, particle trajectory has been characterized in a high throughput airfoil array DLD with varying Angle of Attack (AoA) in Deionized water. The AoA can be shifted negatively assisting in particle trajectory increases at low Reynolds numbers. With variations in fluid viscosity, particle trajectories compared to Reynolds value should theoretically have a constant and similar slope. In this work, various viscosities are tested in a DLD with a neutral and negative AoA to eventually characterize non-Newtonian fluids within a DLD. Due to higher viscosities increasing the internal pressure of the device, the negative AoA DLD shows promising results at higher range viscosities due to its ability to shift particles at lower Reynolds numbers.","PeriodicalId":121852,"journal":{"name":"Volume 13: Micro- and Nano-Systems Engineering and Packaging","volume":"83 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114586688","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Matthew Trapuzzano, N. Crane, R. Guldiken, A. Tejada-Martínez
{"title":"Driving Wetting Transitions on Textured Surfaces Using Ultrasonic Vibration","authors":"Matthew Trapuzzano, N. Crane, R. Guldiken, A. Tejada-Martínez","doi":"10.1115/IMECE2020-23467","DOIUrl":"https://doi.org/10.1115/IMECE2020-23467","url":null,"abstract":"\u0000 Adhesives, medical devices, and many cleaning products depend on the wetting of liquids on solid surfaces. The liquid/solid interaction depends on chemistry, surface topology, and external energy input. For instance, surfactants are commonly used in cleaning solutions to improve their effectiveness, and electrical fields are frequently used to control the contact angle of liquid droplets. Low frequency vibration has been used to spread, move, and manipulate droplets using the mode shape oscillations of the droplet to displace the contact line. Ultrasonic vibration (above 20 kHz) can also cause a liquid droplet to wet or spread out on a solid surface under the right circumstances. We have previously demonstrated that ultrasonic vibration can be used to control the wetting/spreading of liquid droplets on smooth hydrophobic surfaces and that the response is relatively insensitive to excitation frequency or fluid properties [1]. This paper reports on the use of ultrasonic vibration to initiate spreading on surfaces with etched pillars. Ultrasonic vibration successfully initiated a transition from Cassie to Wenzel states in all geometries with no apparent need to tune excitation frequencies to the geometry. However, the magnitude of the acceleration required to initiate the transition decreased with increased pillar spacing. For small pillar spacing, some smooth spreading in the Cassie wetting mode was observed before transition.","PeriodicalId":121852,"journal":{"name":"Volume 13: Micro- and Nano-Systems Engineering and Packaging","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127705476","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Passive Impedance-Loaded Surface Acoustic Wave (SAW) Sensor for Soil Condition Monitoring","authors":"Jian-yi Chu, I. Voiculescu, Z. Dong, Fang Li","doi":"10.1115/IMECE2020-23746","DOIUrl":"https://doi.org/10.1115/IMECE2020-23746","url":null,"abstract":"\u0000 This paper presents an innovative system to monitor the physical soil conditions needed for modern agriculture. The current technique to measure soil properties relies on taking samples from place to place and takes them for laboratory testing. To build up and monitor a data-based system for a large area, such a method is costly and time-consuming. This paper reported our recent work on the development of a passive impedance-loaded surface acoustic wave (SAW) sensor for a low-cost soil condition monitoring system. The SAW sensor will eventually be connected to an antenna and a impedance-based sensor for autonomous soil nutrient sensing. In this research, first, the coupling-of-modes (COM) analysis was performed to simulate the SAW device. The sensors were fabricated with E-beam lithography techniques and tested with different external load resistances. We investigated how the sensor signal changed with the external resistance loading. The experimental results were verified by comparing them with simulation results.","PeriodicalId":121852,"journal":{"name":"Volume 13: Micro- and Nano-Systems Engineering and Packaging","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123679174","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Towards Deep Learning Approaches for Quantitative Analysis of High-Throughput DLD","authors":"Eric Gioe, Xiaolin Chen, Jong-Hoon Kim","doi":"10.1115/IMECE2020-24269","DOIUrl":"https://doi.org/10.1115/IMECE2020-24269","url":null,"abstract":"\u0000 Microfluidics has shown great promise for the sorting or separation of biological cells such as circulating tumor cells since the first studies came out a few decades ago. With recent advances in high-throughput microfluidics, analysis of massive amounts of data needs to be completed in an iterative, timely manner. However, the majority of analysis is either performed manually or through the use of superimposing multiple images to define the flow of the particles, taking a significant amount of time to complete. The objective of the work is to increase the efficiency and repeatability of particle detection in a high-throughput deterministic lateral displacement (DLD) device.\u0000 The program proposed is in the early stages of development, but shows promise. The average time it takes to analyze over a gigabyte of video is 24.21 seconds. The average percent error of the total particle detection was 21.42%. The assumptions made for the initial version of the program affect the accuracy of the particle in wall detection, so new techniques that do not follow the assumptions will need to be investigated. More work will be completed to implement machine learning or deep learning to assist in the development of DLD devices.","PeriodicalId":121852,"journal":{"name":"Volume 13: Micro- and Nano-Systems Engineering and Packaging","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116155865","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Application of Deep Neural Network in the Design of Microresonators Subject to Microfabrication Constraints","authors":"S. Alaie","doi":"10.1115/IMECE2020-24408","DOIUrl":"https://doi.org/10.1115/IMECE2020-24408","url":null,"abstract":"\u0000 Deep Neural Networks (DNNs) have transformed various fields, yet their application in design of microsystem has been limited. Here, we demonstrate a framework for application of adversarial generative networks in design of microresonators targeting for operation in MHz frequencies. The topology of the microresonators are constrained based on the critical dimension common in the photolithography process. The design-space includes a free standing window of Si film on an SOI wafer that is supported on its four sides. The film is etched through a mask with an arbitrary 2D layout. We employ DNNs in finding 2D layouts that result in a membrane with desirable natural frequencies. For this purpose, deep generative networks (generators) and deep neural networks (discriminators) are employed. Two datasets representing desirable and undesirable layouts are created using finite element analysis. Subsequently, the discriminator is trained to classify desirable and undesirable layouts as well as those generated by the generator. Simultaneously, the generator is trained to sample layouts that are more likely to be classified as desirable by the discriminator. The results show that this framework is capable of producing designs with desirable vibrational features, encouraging further research in this topic.","PeriodicalId":121852,"journal":{"name":"Volume 13: Micro- and Nano-Systems Engineering and Packaging","volume":"60 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131753892","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A Multiband RF Energy Harvesting System for Efficient Power Conversion","authors":"M. S. Rahman, U. Chakravarty","doi":"10.1115/IMECE2020-23673","DOIUrl":"https://doi.org/10.1115/IMECE2020-23673","url":null,"abstract":"This paper presents a radio frequency (RF) energy harvesting (RFEH) system with a multiband antenna configuration that can simultaneously harvest energy from the sub-6 GHz and 5G millimeter-wave (mm-Wave) frequency bands. The performance of the RFEH system is studied from −25 dBm to 5 dBm input power levels underlying the maximization of the overall efficiency and possible optimization strategies. The maximum achievable power conversion efficiency (PCE) is formulated as a mathematical programming problem and solved by optimizing the design factors including antenna geometry, operational frequencies, rectifier topologies, and rectifier parameters. An array of broadband high gain patch antennas with reconfigurable rectifiers, an impedance matching network, and a voltage-multiplier circuit are employed in the system to maximize the PCE. The voltage standing wave ratio (VSWR) and reflection coefficient (S11) of the antenna are estimated and optimized by numerical method. Simulations are conducted to evaluate the performances of the rectenna and the voltage-multiplier circuit. Results for radiation pattern, wave absorption, input impedance, voltage, and power across the load resistance as a function of frequency are obtained for the optimized configuration. The overall efficiency of the optimized RFEH system is measured at various power inputs and load resistances.","PeriodicalId":121852,"journal":{"name":"Volume 13: Micro- and Nano-Systems Engineering and Packaging","volume":"157 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114168790","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}