IEEE Sensors, 2005.最新文献

Batch fabrication of micro-coils for MR spectroscopy on silicon 硅基磁共振光谱微线圈的批量制备

IEEE Sensors, 2005. Pub Date : 2005-12-31 DOI: 10.1109/ICSENS.2005.1597677

R. Syms, M.M. Ahmad, I. Young, D. Gilderdale, D. Collins, M. Leach

引用次数: 5

Emissions sensors for high temperature fuel cell applications 用于高温燃料电池的排放传感器

IEEE Sensors, 2005. Pub Date : 2005-12-01 DOI: 10.1109/ICSENS.2005.1597865

Y. Yi, V. McDonell, J. Brouwer, M. Fujiwara, M. Adachi

引用次数: 1

Iridium oxide reference electrodes for neurochemical sensing with MEMS microelectrode arrays 用于MEMS微电极阵列神经化学传感的氧化铱参考电极

IEEE Sensors, 2005. Pub Date : 2005-12-01 DOI: 10.1109/ICSENS.2005.1597971

R. K. Franklin, Matthew D. Johnson, Katharine A. Scott, J. Shim, H. Nam, D. Kipke, Richard B. Brown

引用次数: 15

Device level vacuum packaged micromachined infrared detectors on flexible substrates 柔性基板上的器件级真空封装微机械红外探测器

IEEE Sensors, 2005. Pub Date : 2005-12-01 DOI: 10.1109/ICSENS.2005.1597909

A. Mahmood, D. Butler, Z. Çelik-Butler

{"title":"Device level vacuum packaged micromachined infrared detectors on flexible substrates","authors":"A. Mahmood, D. Butler, Z. Çelik-Butler","doi":"10.1109/ICSENS.2005.1597909","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597909","url":null,"abstract":"This paper presents progress made in making device-level vacuum-packaged microbolometers as infrared detectors on flexible substrates. Polyimide PI5878G serves as the flexible substrate and semiconducting yttrium barium copper oxide (YBCO) is used as the bolometric material. Finite element analysis is used to design a vacuum cavity housing a microbolometer. Suitable materials are selected for the microcavity fabrication based on results of the computer simulations. During fabrication, sacrificial polyimide around the detector facilitates the formation of a vacuum microcavity with an optical window. Micromachining is carried out through trenches in the microcavity wall. After isolating the microbolometer from the ambient, the trenches are sealed shut by sputtering in vacuum. The fabricated devices are characterized for responsivity and detectivity. At a bias voltage of 10 V, 40-40mu m2 devices exhibited a current responsivity of 6.13 timesl0-5 A/W to a broad-band infrared radiation modulated at 5 Hz. A maximum detectivity of 1.76times105 cm-Hz1/2/W was measured. A relatively low thermal conductance of 3.36times10-6 W/K was measured implying good thermal isolation of the bolometers and therefore an intact vacuum cavity","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128407090","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

A novel optical fiber accelerometer system for monitoring civil infrastructure 一种用于民用基础设施监测的新型光纤加速度计系统

IEEE Sensors, 2005. Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597898

Dae-Hyun Kim, M. Feng

引用次数: 5

Charge-storage-type optoelectronic sensor with DOG-function characteristics 具有dog功能特性的电荷存储型光电传感器

IEEE Sensors, 2005. Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597839

Y. Matsui, Y. Miyoshi

引用次数: 1

Optical MEMS pressure and vibration sensors using integrated optical ring resonators 采用集成光环谐振器的光学MEMS压力和振动传感器

IEEE Sensors, 2005. Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597779

P. Pattnaik, B. Vijayaaditya, Talabattula Srinivas, A. Selvarajan

{"title":"Optical MEMS pressure and vibration sensors using integrated optical ring resonators","authors":"P. Pattnaik, B. Vijayaaditya, Talabattula Srinivas, A. Selvarajan","doi":"10.1109/ICSENS.2005.1597779","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597779","url":null,"abstract":"In this paper we propose and analyse novel optical MEMS based pressure and vibration sensors utilising integrated optical ring resonators. The wavelength shift of light propagating in the resonator, located over the micro-mechanical structure, due to stress induced refractive change because of applied pressure or vibration, provides the desired sensor output. In the case of pressure sensor, as the circular diaphragm deflects due to the differential pressure, stress induced refractive index change in the waveguide lead to change in the wavelength shift providing the measure of pressure. For 1mm radius circular diaphragm with 65mum thickness, wavelength shift of 0.78 pm/kPa is obtained with a pressure range of 300 kPa. In the case of vibration sensor, the straight portion a race track resonator is located at the foot of a cantilever beam with proof mass. As the beam deflects due to vibration, stress induced refractive change in the waveguide located over the beam lead to the wavelength shift providing the measure of vibration. A wavelength shift of 3.19 pm/g in the range of 280 g for a cantilever beam of 1750 mum times 450 mum times 20 mum has been obtained. Since the wavelength of operation is around 1.55 mum, hybrid integration of source and detector is possible on the same substrate Also it is less amenable to noise as wavelength shift provides the sensor signal. This type of sensors can be used for precession instrumentation, aerospace application and other harsh environments with suitable design","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124285927","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 18

Two types of micromachined vibratory gyroscopes 两种微机械振动陀螺仪

IEEE Sensors, 2005. Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597753

A. Shkel, C. Acar, C. Painter

引用次数: 48

Hybrid electrostatic actuator for micromirror tilting 用于微镜倾斜的混合静电致动器

IEEE Sensors, 2005. Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597641

W.G. Wu, Q. Chen, G. Yan, Y. Hao, D. Yin, Z.Y. Chen, A. Xu

引用次数: 0

A Wireless Pressure Measurement System Based on TiO2 Interdigitated Sensors 基于TiO2交叉数字传感器的无线压力测量系统

IEEE Sensors, 2005. Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597625

K. Arshak, A. Arshak, D. Morris, O. Korostynska, E. Jafer

引用次数: 5