2019 IEEE International Conference on Prognostics and Health Management (ICPHM)最新文献

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Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning 利用机器学习预测等离子体蚀刻设备的故障时间
2019 IEEE International Conference on Prognostics and Health Management (ICPHM) Pub Date : 2019-04-16 DOI: 10.1109/ICPHM.2019.8819404
Anahid N. Jalali, Clemens Heistracher, Alexander Schindler, Bernhard Haslhofer, Tanja Nemeth, Robert Glawar, W. Sihn, Peter De Boer
{"title":"Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning","authors":"Anahid N. Jalali, Clemens Heistracher, Alexander Schindler, Bernhard Haslhofer, Tanja Nemeth, Robert Glawar, W. Sihn, Peter De Boer","doi":"10.1109/ICPHM.2019.8819404","DOIUrl":"https://doi.org/10.1109/ICPHM.2019.8819404","url":null,"abstract":"Predicting unscheduled breakdowns of plasma etching equipment can reduce maintenance costs and production losses in the semiconductor industry. However, plasma etching is a complex procedure and it is hard to capture all relevant equipment properties and behaviors in a single physical model. Machine learning offers an alternative for predicting upcoming machine failures based on relevant data points. In this paper, we describe three different machine learning tasks that can be used for that purpose: (i) predicting Time-To-Failure (TTF), (ii) predicting health state, and (iii) predicting TTF intervals of an equipment. Our results show that trained machine learning models can outperform benchmarks resembling human judgments in all three tasks. This suggest that machine learning offers a viable alternative to currently deployed plasma etching equipment maintenance strategies and decision making processes.","PeriodicalId":113460,"journal":{"name":"2019 IEEE International Conference on Prognostics and Health Management (ICPHM)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125423608","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
Remaining Useful Life Estimation Using Functional Data Analysis 使用功能数据分析估算剩余使用寿命
2019 IEEE International Conference on Prognostics and Health Management (ICPHM) Pub Date : 2019-04-12 DOI: 10.1109/ICPHM.2019.8819420
Qiyao Wang, Shuai Zheng, Ahmed K. Farahat, Susumu Serita, Chetan Gupta
{"title":"Remaining Useful Life Estimation Using Functional Data Analysis","authors":"Qiyao Wang, Shuai Zheng, Ahmed K. Farahat, Susumu Serita, Chetan Gupta","doi":"10.1109/ICPHM.2019.8819420","DOIUrl":"https://doi.org/10.1109/ICPHM.2019.8819420","url":null,"abstract":"Remaining Useful Life (RUL) of an equipment or one of its components is defined as the time left until the equipment or component reaches its end of useful life. Accurate RUL estimation is exceptionally beneficial to Predictive Maintenance, and Prognostics and Health Management (PHM). Data driven approaches which leverage the power of algorithms for RUL estimation using sensor and operational time series data are gaining popularity. Existing algorithms, such as linear regression, Convolutional Neural Network (CNN), Hidden Markov Models (HMMs), and Long Short-Term Memory (LSTM), have their own limitations for the RUL estimation task. In this work, we propose a novel Functional Data Analysis (FDA) method called functional Multilayer Perceptron (functional MLP) for RUL estimation. Functional MLP treats time series data from multiple equipment as a sample of random continuous processes over time. FDA explicitly incorporates both the correlations within the same equipment and the random variations across different equipment’s sensor time series into the model. FDA also has the benefit of allowing the relationship between RUL and sensor variables to vary over time. We implement functional MLP on the benchmark NASA C-MAPSS data and evaluate the performance using two popularly-used metrics. Results show the superiority of our algorithm over all the other state-of-the-art methods.","PeriodicalId":113460,"journal":{"name":"2019 IEEE International Conference on Prognostics and Health Management (ICPHM)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130128071","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 41
A One-Class Support Vector Machine Calibration Method for Time Series Change Point Detection 一种用于时间序列变化点检测的一类支持向量机标定方法
2019 IEEE International Conference on Prognostics and Health Management (ICPHM) Pub Date : 2019-02-18 DOI: 10.1109/ICPHM.2019.8819385
Baihong Jin, Yuxin Chen, Dan Li, K. Poolla, A. Sangiovanni-Vincentelli
{"title":"A One-Class Support Vector Machine Calibration Method for Time Series Change Point Detection","authors":"Baihong Jin, Yuxin Chen, Dan Li, K. Poolla, A. Sangiovanni-Vincentelli","doi":"10.1109/ICPHM.2019.8819385","DOIUrl":"https://doi.org/10.1109/ICPHM.2019.8819385","url":null,"abstract":"Identifying the change point of a system’s health status is important. Indeed, a change point usually signifies an incipient fault under development. The One-Class Support Vector Machine (OC-SVM) is a popular machine learning model for anomaly detection that could be used for identifying change points; however, it is sometimes difficult to obtain a good OC-SVM model that can be used on sensor measurement time series to identify the change points in system health status. In this paper, we propose a novel approach for calibrating OC-SVM models. Our approach uses a heuristic search method to find a good set of input data and hyperparameters that yield a well-performing model. Our results on the C-MAPSS dataset demonstrate that OC-SVM can achieve satisfactory accuracy in detecting change point in time series with fewer training data, compared to state-of-the-art deep learning approaches. In our case study, the OC-SVM calibrated by the proposed model is shown to be useful especially in scenarios with limited amount of training data.","PeriodicalId":113460,"journal":{"name":"2019 IEEE International Conference on Prognostics and Health Management (ICPHM)","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-02-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114882367","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 22
Detecting and Diagnosing Incipient Building Faults Using Uncertainty Information from Deep Neural Networks 基于深度神经网络不确定性信息的早期建筑故障检测与诊断
2019 IEEE International Conference on Prognostics and Health Management (ICPHM) Pub Date : 2019-02-18 DOI: 10.1109/ICPHM.2019.8819438
Baihong Jin, Dan Li, S. Srinivasan, See-Kiong Ng, K. Poolla, A. Sangiovanni-Vincentelli
{"title":"Detecting and Diagnosing Incipient Building Faults Using Uncertainty Information from Deep Neural Networks","authors":"Baihong Jin, Dan Li, S. Srinivasan, See-Kiong Ng, K. Poolla, A. Sangiovanni-Vincentelli","doi":"10.1109/ICPHM.2019.8819438","DOIUrl":"https://doi.org/10.1109/ICPHM.2019.8819438","url":null,"abstract":"Early detection of incipient faults is of vital importance to reducing maintenance costs, saving energy, and enhancing occupant comfort in buildings. Popular supervised learning models such as deep neural networks are considered promising due to their ability to directly learn from labeled fault data; however, it is known that the performance of supervised learning approaches highly relies on the availability and quality of labeled training data. In Fault Detection and Diagnosis (FDD) applications, the lack of labeled incipient fault data has posed a major challenge to applying these supervised learning techniques to commercial buildings. To overcome this challenge, this paper proposes using Monte Carlo dropout (MC-dropout) to enhance the supervised learning pipeline, so that the resulting neural network is able to detect and diagnose unseen incipient fault examples. We also examine the proposed MC-dropout method on the RP-1043 dataset to demonstrate its effectiveness in indicating the most likely incipient fault types.","PeriodicalId":113460,"journal":{"name":"2019 IEEE International Conference on Prognostics and Health Management (ICPHM)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-02-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121520347","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 23
Diagnosis of Membrane Chemical Degradation For Health Management of Polymer Electrolyte Fuel Cells 膜化学降解诊断用于聚合物电解质燃料电池的健康管理
2019 IEEE International Conference on Prognostics and Health Management (ICPHM) Pub Date : 2019-01-11 DOI: 10.1109/ICPHM.2019.8819441
Derek Low, L. Jackson, S. Dunnett
{"title":"Diagnosis of Membrane Chemical Degradation For Health Management of Polymer Electrolyte Fuel Cells","authors":"Derek Low, L. Jackson, S. Dunnett","doi":"10.1109/ICPHM.2019.8819441","DOIUrl":"https://doi.org/10.1109/ICPHM.2019.8819441","url":null,"abstract":"Diagnostics and health management of fuel cells are key aspects for improvement of reliability and durability. To achieve performance and lifetime targets it is necessary for fuel cell operating conditions to be optimally managed. An improved fuzzy inference system, utilizing multiple high priority health sensors, for diagnostics and health management of polymer electrolyte fuel cells is presented in this paper. Due to membrane chemical degradation having a critical impact on fuel cell health; the investigation focuses on diagnosing this degradation. The fuzzy inference system enables connections between the intricate relationships of fuel cell operating conditions and consequential degradation modes. A database of inference rules for diagnostics is developed through the literature and experimental testing. Experimental testing was conducted on two fuel cells with differing cell areas. Results support the diagnosis of membrane chemical degradation and therefore support the validation of the fuzzy inference system. The approach has shown the capability of providing diagnostics for different fuel cell designs. The diagnostic fuzzy inference system enables proactive decision making as part of an improved health management system to increase availability and lifetime of fuel cells.","PeriodicalId":113460,"journal":{"name":"2019 IEEE International Conference on Prognostics and Health Management (ICPHM)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-01-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124931749","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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