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Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum最新文献

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Investigation of a high-current pulsed magnetron discharge initiated in the low-pressure diffuse arc plasma 低压漫射电弧等离子体中大电流脉冲磁控管放电的研究
Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum Pub Date : 1996-07-21 DOI: 10.1109/DEIV.1996.545530
S. Bugaev, N. Koval, N. Sochugov, A. N. Zakharov
{"title":"Investigation of a high-current pulsed magnetron discharge initiated in the low-pressure diffuse arc plasma","authors":"S. Bugaev, N. Koval, N. Sochugov, A. N. Zakharov","doi":"10.1109/DEIV.1996.545530","DOIUrl":"https://doi.org/10.1109/DEIV.1996.545530","url":null,"abstract":"The paper presents the results of a study of a pulsed high-current magnetron discharge used for deposition of thin metallic films. The current-voltage characteristic of this type of discharge and its range of occurence have been investigated in relation to the magnetic field induction, the cathode material and the preionization plasma density. High-frequency oscillations of the voltage across the magnetron sputtering system caused by the repetitive variation in the conductance of the cathode-anode gap have been discovered. The achieved pulsed deposition rate for copper is 11 /spl mu/m/min.","PeriodicalId":109221,"journal":{"name":"Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-07-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122567075","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 32
Modification of cathodic arc deposition profiles by magnetic multicusps 磁性多聚体修饰阴极电弧沉积剖面
Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum Pub Date : 1996-07-21 DOI: 10.1109/DEIV.1996.545496
S. Anders, R. MacGill, S. Raoux, I. Brown
{"title":"Modification of cathodic arc deposition profiles by magnetic multicusps","authors":"S. Anders, R. MacGill, S. Raoux, I. Brown","doi":"10.1109/DEIV.1996.545496","DOIUrl":"https://doi.org/10.1109/DEIV.1996.545496","url":null,"abstract":"The deposition profile of a cathodic arc plasma source with and without magnetic macroparticle filter has been measured using a deposition probe technique. It has been found that the profile is close to a Gaussian and that the width of the profile depends on the cathode material. It was found that the dependence on the cathode material leads to a considerable radial variation of the elemental composition of the film when an alloy cathode is used. A magnetic multicusp field (magnetic bucket) near the exit of the plasma source or the magnetic filter was applied to flatten and homogenize the deposition profile.","PeriodicalId":109221,"journal":{"name":"Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum","volume":"206 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-07-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122583746","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Intense ion beam on the quasibrillouin orbit in the magnetic field 强离子束在磁场中准布里渊轨道上的作用
Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum Pub Date : 1996-07-21 DOI: 10.1109/DEIV.1996.545426
A. Goncharov, I. Litovko, I. Protsenko
{"title":"Intense ion beam on the quasibrillouin orbit in the magnetic field","authors":"A. Goncharov, I. Litovko, I. Protsenko","doi":"10.1109/DEIV.1996.545426","DOIUrl":"https://doi.org/10.1109/DEIV.1996.545426","url":null,"abstract":"The possibility of introduction of the ampere-scale intense ion beam onto the longitudinal magnetic field quasibrillouin orbit is investigated both experimentally and theoretically. It is shown that under space charge control compensation of a repetitively pulsed ion beam by secondary ion-electron emission electrons, the optimum conditions for effective transporting of a beam on the equilibrium orbit in the region of homogeneous H-field can be found. The effect of different parameters (magnetic field strength, beam particles angle of entrance, compensation degree, etc.) on the equilibrium radius and beam profile are studied.","PeriodicalId":109221,"journal":{"name":"Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum","volume":"327 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-07-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122219615","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
On microwave discharge machining of ceramics 微波放电加工陶瓷的研究
Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum Pub Date : 1996-07-21 DOI: 10.1109/DEIV.1996.545527
S. P. Kozyrev, V. A. Nevrovsky, L. L. Sukhikh, V. A. Vasin, Y. Yashnov
{"title":"On microwave discharge machining of ceramics","authors":"S. P. Kozyrev, V. A. Nevrovsky, L. L. Sukhikh, V. A. Vasin, Y. Yashnov","doi":"10.1109/DEIV.1996.545527","DOIUrl":"https://doi.org/10.1109/DEIV.1996.545527","url":null,"abstract":"The combined action of a microwave electric field and focused laser radiation on dielectrics is studied with the purpose of developing a discharge technique for the machining of certain kinds of dielectrics, e.g. ceramics. The idea of the machining is based on the phenomenon of enhanced absorption of microwaves by dielectrics preheated locally by some additional heat source. Theoretical analysis shows that, due to this effect, the destroyed zone at the dielectric surface can be more narrow than the preheated region. The idea was tested on samples of pink alumina in a microwave cavity using an electric field with wavelength /spl Lambda/=12.5 cm. Experiments on laser beam heating of dielectrics simultaneously with microwave irradiation revealed a pronounced cooperative effect of material removal.","PeriodicalId":109221,"journal":{"name":"Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum","volume":"2308 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-07-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130327846","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Time and space resolved analysis of the visible radiation from a vacuum circuit breaker discharge 真空断路器放电可见辐射的时空分辨分析
Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum Pub Date : 1996-07-21 DOI: 10.1109/DEIV.1996.545372
V. Zoita, D. Pavelescu, G. Sandolache, N. Georgescu
{"title":"Time and space resolved analysis of the visible radiation from a vacuum circuit breaker discharge","authors":"V. Zoita, D. Pavelescu, G. Sandolache, N. Georgescu","doi":"10.1109/DEIV.1996.545372","DOIUrl":"https://doi.org/10.1109/DEIV.1996.545372","url":null,"abstract":"The object of the investigation was the visible radiation emitted by the metal plasma of a low-voltage, high current arc occurring in the interelectrode gap of a vacuum circuit breaker. The time evolution of the visible radiation was recorded by means of a fast multichannel light analysis system that provided sufficient space resolution to follow the vacuum arc development in experiments done at 1 kA, 2 kA and 10 kA arc peak currents. The correlated analysis of the voltage waveforms and radiation signals made possible the identification of processes related to strong localized current-electrode interactions.","PeriodicalId":109221,"journal":{"name":"Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum","volume":"100 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-07-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123529930","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Chosen phenomena in vacuum chamber at heavy direct current switching off in transverse magnetic field 选取了横向磁场下真空室直流大关断时的现象
Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum Pub Date : 1996-07-21 DOI: 10.1109/DEIV.1996.545381
M. Bartosik
{"title":"Chosen phenomena in vacuum chamber at heavy direct current switching off in transverse magnetic field","authors":"M. Bartosik","doi":"10.1109/DEIV.1996.545381","DOIUrl":"https://doi.org/10.1109/DEIV.1996.545381","url":null,"abstract":"Possibilities of heavy direct current switching off in vacuum with the transverse magnetic field have been described in this article. A description of basic switching phenomena has been given. The rules of determining the shortest distance between contacts necessary for DC switching off were given. The phenomenon of magnetic field shielding in the contact gap has been analyzed. The evaluation of the usability of vacuum chambers with different kinds of shields for constructing vacuum circuit breakers limiting direct current has been carried out.","PeriodicalId":109221,"journal":{"name":"Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-07-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126277172","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Influence of a strong pulsed magnetic field on the charge state distribution of ions in a vacuum arc plasma 强脉冲磁场对真空电弧等离子体中离子电荷态分布的影响
Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum Pub Date : 1996-07-21 DOI: 10.1109/DEIV.1996.545336
E. Oks, A. Anders, I. Brown, M. Dickinson, R. MacGill
{"title":"Influence of a strong pulsed magnetic field on the charge state distribution of ions in a vacuum arc plasma","authors":"E. Oks, A. Anders, I. Brown, M. Dickinson, R. MacGill","doi":"10.1109/DEIV.1996.545336","DOIUrl":"https://doi.org/10.1109/DEIV.1996.545336","url":null,"abstract":"Ion charge state distributions of vacuum arc plasma have been investigated using a time of flight method. It was found that the fraction of high charge components increased using an external strong magnetic field and high arc current. Compared with \"conventional\" low current arc parameters (zero magnetic field, arc current less then 300 A) in the parameters range investigated (magnetic field up to 10 kG, arc current up to 4 kA) the mean ion charge state increased by a factor 1.2-2.5 depending on the cathode materials and discharge external conditions. External magnetic field and a high arc current influence the charge state distribution in a similar way.","PeriodicalId":109221,"journal":{"name":"Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum","volume":"496 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-07-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115886065","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Investigation of low pressure discharge generated by magnetron plasma device 磁控管等离子体装置产生低压放电的研究
Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum Pub Date : 1996-07-21 DOI: 10.1109/DEIV.1996.545979
N. Elistratov, K. A. Titov, A. Zimin
{"title":"Investigation of low pressure discharge generated by magnetron plasma device","authors":"N. Elistratov, K. A. Titov, A. Zimin","doi":"10.1109/DEIV.1996.545979","DOIUrl":"https://doi.org/10.1109/DEIV.1996.545979","url":null,"abstract":"Results of experimental and theoretical analysis of plasma discharge in planar DC magnetron are considered in this report. The device was developed for modeling of plasma/wall interaction in International Thermonuclear Experimental Reactor (ITER). Experiments were performed using both hydrogen and argon as working medium in pressure range of 10/sup -3/-2.10/sup -2/ torr. Beryllium was material of sputtered cathode in order to phenomena on ITER beryllium first wall protection. Voltage-current contributions of the discharge were obtained for different hydrogen pressures and magnetic field induction near the cathode surface. The discharge voltage in case of hydrogen medium was about one half of that obtained for argon for equal total current. Apparently it is caused by beryllium using as a cathode material. Processes of beryllium erosion and following redeposition of sputtered beryllium atoms on surfaces of the target and vacuum chamber walls were observed and investigated. Some aspects of applying of such magnetrons for producing of thin beryllium coatings and films are also considered in the report.","PeriodicalId":109221,"journal":{"name":"Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum","volume":"271 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-07-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132074239","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Plasma diagnosis with Langmuir probe in the process of vacuum arc deposition Langmuir探针在真空电弧沉积过程中的等离子诊断
Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum Pub Date : 1996-07-21 DOI: 10.1109/DEIV.1996.545484
Zhongyuan Cheng, J. Zou, Lei Yang
{"title":"Plasma diagnosis with Langmuir probe in the process of vacuum arc deposition","authors":"Zhongyuan Cheng, J. Zou, Lei Yang","doi":"10.1109/DEIV.1996.545484","DOIUrl":"https://doi.org/10.1109/DEIV.1996.545484","url":null,"abstract":"This paper introduces some efforts to use the Langmuir probe as an in situ diagnostic tool in the process of VAD (vacuum arc deposition), i.e., to minimize the contamination on the probe and to discuss the validity of the probe theories. The characteristic curves are dealt with by Langmuir's thick-sheath model, and the plasma parameters (electron temperature kT/sub e/ and electron density n/sub 0/) are calculated from the combination of the I/sub e//sup 2//spl sim/V curves and LnI/sub e//spl sim/V curves. Plasma diagnoses are performed in the process of TiN film deposition, with different partial pressures of nitrogen, arc current and distances from the cathode. Nonelastic collisions in the VAD plasma are evaluated with the diagnostic results.","PeriodicalId":109221,"journal":{"name":"Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum","volume":"66 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-07-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132295006","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Motion of magnetized vacuum arc plasma beam in a quarter-torus 磁化真空电弧等离子体束在四分之一环面的运动
Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum Pub Date : 1996-07-21 DOI: 10.1109/DEIV.1996.545482
B. Alterkop, E. Gidalevich, S. Goldsmith, R. Boxman
{"title":"Motion of magnetized vacuum arc plasma beam in a quarter-torus","authors":"B. Alterkop, E. Gidalevich, S. Goldsmith, R. Boxman","doi":"10.1109/DEIV.1996.545482","DOIUrl":"https://doi.org/10.1109/DEIV.1996.545482","url":null,"abstract":"An analytical solution is obtained that describes the distribution of plasma density, the electron and ion velocities, the electric field and the current in the magnetized plasma beam in a toroidal magnetic filter. Analytical expressions for the filter efficiency as function of the toroidal magnetic field are also derived. The effect of the centrifugal and diamagnetic ion drifts on the polarization electric field is studied. It is shown that the efficiency /spl eta//sub c/ increases exponentially when this field decreases. When the polarization electric field is absent, the filter efficiency increases with the magnetic field as /spl eta//sub c/=(1+B/sub c//sup 2//B/sup 2/)/sup -1/, where B/sub c//sup 2//spl cong/m/sub i//spl Gamma//sub 0//(Z/spl sigma//sub /spl perp//RR/sup t2/), m/sub i/ and Z are the ion mass and charge state, /spl Gamma//sub 0/ is the input ion flux, /spl sigma//sub /spl perp// is the plasma transverse conductivity, and R, R' are the major and minor radii of the torus, respectively.","PeriodicalId":109221,"journal":{"name":"Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-07-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130239787","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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