Investigation of low pressure discharge generated by magnetron plasma device

Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum Pub Date : 1996-07-21 DOI:10.1109/DEIV.1996.545979

N. Elistratov, K. A. Titov, A. Zimin

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Abstract

Results of experimental and theoretical analysis of plasma discharge in planar DC magnetron are considered in this report. The device was developed for modeling of plasma/wall interaction in International Thermonuclear Experimental Reactor (ITER). Experiments were performed using both hydrogen and argon as working medium in pressure range of 10/sup -3/-2.10/sup -2/ torr. Beryllium was material of sputtered cathode in order to phenomena on ITER beryllium first wall protection. Voltage-current contributions of the discharge were obtained for different hydrogen pressures and magnetic field induction near the cathode surface. The discharge voltage in case of hydrogen medium was about one half of that obtained for argon for equal total current. Apparently it is caused by beryllium using as a cathode material. Processes of beryllium erosion and following redeposition of sputtered beryllium atoms on surfaces of the target and vacuum chamber walls were observed and investigated. Some aspects of applying of such magnetrons for producing of thin beryllium coatings and films are also considered in the report.

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磁控管等离子体装置产生低压放电的研究

本文考虑了平面直流磁控管等离子体放电的实验和理论分析结果。该装置是为模拟国际热核实验反应堆(ITER)中等离子体/壁相互作用而研制的。在10/sup -3/-2.10/sup -2/ torr的压力范围内，以氢气和氩气为工作介质进行了实验。为了研究ITER中铍第一壁保护现象，采用铍作为溅射阴极材料。得到了不同氢气压力和阴极表面磁场感应强度下放电的电压-电流贡献。在总电流相等的情况下，氢气介质的放电电压约为氩气的放电电压的一半。显然，这是由于铍作为正极材料而引起的。观察和研究了铍在靶材和真空室壁面上的侵蚀和溅射铍原子的再沉积过程。本文还讨论了应用这种磁控管生产薄铍涂层和薄膜的一些方面。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum

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