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Research Progress on High Resolution Extreme Ultraviolet Photoresist 高分辨率极紫外光刻胶的研究进展
Chinese Journal of Applied Chemistry Pub Date : 2021-09-01 DOI: 10.19894/J.ISSN.1000-0518.210221
Gao Jia-xing, Chen Long, YU Jia-Ting, G. Xudong, Huo Rui, Wang Shuang-qing, Chen Jin-Ping, Li Yi, Yang Guo-qiang
{"title":"Research Progress on High Resolution Extreme Ultraviolet Photoresist","authors":"Gao Jia-xing, Chen Long, YU Jia-Ting, G. Xudong, Huo Rui, Wang Shuang-qing, Chen Jin-Ping, Li Yi, Yang Guo-qiang","doi":"10.19894/J.ISSN.1000-0518.210221","DOIUrl":"https://doi.org/10.19894/J.ISSN.1000-0518.210221","url":null,"abstract":"","PeriodicalId":9936,"journal":{"name":"Chinese Journal of Applied Chemistry","volume":"38 1","pages":"1138"},"PeriodicalIF":0.0,"publicationDate":"2021-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"42630204","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Optimization of Development Process for Carbon Dioxide-Based Poly(cyclohexene carbonate) Electron Beam Resist 二氧化碳基聚碳酸环己烯电子束抗蚀剂研制工艺的优化
Chinese Journal of Applied Chemistry Pub Date : 2021-09-01 DOI: 10.19894/J.ISSN.1000-0518.210149
Lu Xin-yu, MA Bin-Ze, L. Hao, Q. Huan, Li Qiang, WU Guang-Peng
{"title":"Optimization of Development Process for Carbon Dioxide-Based Poly(cyclohexene carbonate) Electron Beam Resist","authors":"Lu Xin-yu, MA Bin-Ze, L. Hao, Q. Huan, Li Qiang, WU Guang-Peng","doi":"10.19894/J.ISSN.1000-0518.210149","DOIUrl":"https://doi.org/10.19894/J.ISSN.1000-0518.210149","url":null,"abstract":"","PeriodicalId":9936,"journal":{"name":"Chinese Journal of Applied Chemistry","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"43736453","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Photoresist Film-Forming Agent: Development and Future 光刻胶成膜剂的发展与展望
Chinese Journal of Applied Chemistry Pub Date : 2021-09-01 DOI: 10.19894/J.ISSN.1000-0518.210152
Peng Xiao-Kang, Hu Xing-wen, Li Rong-tao, Zhang Yong-wen, Zhang Shi-Yang, Liu Yi-Dong, Min Yonggang
{"title":"Photoresist Film-Forming Agent: Development and Future","authors":"Peng Xiao-Kang, Hu Xing-wen, Li Rong-tao, Zhang Yong-wen, Zhang Shi-Yang, Liu Yi-Dong, Min Yonggang","doi":"10.19894/J.ISSN.1000-0518.210152","DOIUrl":"https://doi.org/10.19894/J.ISSN.1000-0518.210152","url":null,"abstract":"","PeriodicalId":9936,"journal":{"name":"Chinese Journal of Applied Chemistry","volume":"38 1","pages":"1079"},"PeriodicalIF":0.0,"publicationDate":"2021-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"47499706","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Advanced Lithography: Directed Self-Assembly 高级光刻:定向自组装
Chinese Journal of Applied Chemistry Pub Date : 2021-09-01 DOI: 10.19894/J.ISSN.1000-0518.210278
Huang Xiao-hua, Xiong Shi-Sheng
{"title":"Advanced Lithography: Directed Self-Assembly","authors":"Huang Xiao-hua, Xiong Shi-Sheng","doi":"10.19894/J.ISSN.1000-0518.210278","DOIUrl":"https://doi.org/10.19894/J.ISSN.1000-0518.210278","url":null,"abstract":"","PeriodicalId":9936,"journal":{"name":"Chinese Journal of Applied Chemistry","volume":"38 1","pages":"1029"},"PeriodicalIF":0.0,"publicationDate":"2021-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"48388464","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Towards Extreme Ultraviolet Lithography: Progress and Challenges of Photoresists 走向极紫外光刻:光刻胶的进展与挑战
Chinese Journal of Applied Chemistry Pub Date : 2021-09-01 DOI: 10.19894/J.ISSN.1000-0518.210189
Cui Hao, Wang Qian-qian, Wang Xiao-Lin, He Xiang-ming, Xu Hong
{"title":"Towards Extreme Ultraviolet Lithography: Progress and Challenges of Photoresists","authors":"Cui Hao, Wang Qian-qian, Wang Xiao-Lin, He Xiang-ming, Xu Hong","doi":"10.19894/J.ISSN.1000-0518.210189","DOIUrl":"https://doi.org/10.19894/J.ISSN.1000-0518.210189","url":null,"abstract":"","PeriodicalId":9936,"journal":{"name":"Chinese Journal of Applied Chemistry","volume":"38 1","pages":"1154"},"PeriodicalIF":0.0,"publicationDate":"2021-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"41459960","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Synthesis and Application of a Fluorescence Probe with Quinazolinone as the Core Block for Highly Selective and Sensitive Detection of Hypochlorite Ion 高选择性、高灵敏度检测次氯酸盐离子的喹唑啉酮荧光探针的合成及应用
Chinese Journal of Applied Chemistry Pub Date : 2021-08-01 DOI: 10.19894/J.ISSN.1000-0518.210151
Zhang Chenglu, Bao Jin-Di, Yue Feng-ming, Dong Wen-jing, Zhang Yang, Gong Rongqing, Zhang Yan-peng, Zhangwu Lu
{"title":"Synthesis and Application of a Fluorescence Probe with Quinazolinone as the Core Block for Highly Selective and Sensitive Detection of Hypochlorite Ion","authors":"Zhang Chenglu, Bao Jin-Di, Yue Feng-ming, Dong Wen-jing, Zhang Yang, Gong Rongqing, Zhang Yan-peng, Zhangwu Lu","doi":"10.19894/J.ISSN.1000-0518.210151","DOIUrl":"https://doi.org/10.19894/J.ISSN.1000-0518.210151","url":null,"abstract":"","PeriodicalId":9936,"journal":{"name":"Chinese Journal of Applied Chemistry","volume":"38 1","pages":"986"},"PeriodicalIF":0.0,"publicationDate":"2021-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"41600222","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Research Progress on Detection of Ascorbic Acid by Nanomaterial-Based Spectral Analysis Method 纳米材料光谱分析法检测抗坏血酸的研究进展
Chinese Journal of Applied Chemistry Pub Date : 2021-08-01 DOI: 10.19894/J.ISSN.1000-0518.200300
Huang Xiao-tong, Cheng Ying-xin, Zhu Ze-bin, Z. Lihua
{"title":"Research Progress on Detection of Ascorbic Acid by Nanomaterial-Based Spectral Analysis Method","authors":"Huang Xiao-tong, Cheng Ying-xin, Zhu Ze-bin, Z. Lihua","doi":"10.19894/J.ISSN.1000-0518.200300","DOIUrl":"https://doi.org/10.19894/J.ISSN.1000-0518.200300","url":null,"abstract":"","PeriodicalId":9936,"journal":{"name":"Chinese Journal of Applied Chemistry","volume":"38 1","pages":"637"},"PeriodicalIF":0.0,"publicationDate":"2021-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"44728739","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Research Progress on Ammonia Synthesis Using Low Temperature Plasma 低温等离子体合成氨的研究进展
Chinese Journal of Applied Chemistry Pub Date : 2021-08-01 DOI: 10.19894/J.ISSN.1000-0518.200297
Liu Yang, Zhang Hai-bao, Chen Qiang
{"title":"Research Progress on Ammonia Synthesis Using Low Temperature Plasma","authors":"Liu Yang, Zhang Hai-bao, Chen Qiang","doi":"10.19894/J.ISSN.1000-0518.200297","DOIUrl":"https://doi.org/10.19894/J.ISSN.1000-0518.200297","url":null,"abstract":"","PeriodicalId":9936,"journal":{"name":"Chinese Journal of Applied Chemistry","volume":"38 1","pages":"622"},"PeriodicalIF":0.0,"publicationDate":"2021-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"46894269","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Research Progress on the Molecular Designs of Building Blocks for Supramolecular Aggregates and Self-Assemblies 超分子聚集体和自组装体构建块的分子设计研究进展
Chinese Journal of Applied Chemistry Pub Date : 2021-08-01 DOI: 10.19894/J.ISSN.1000-0518.200298
Wang Hou-Chen, Zhou Li, Liu Yang, Cheng Ming-yue, Shi Tie-Sheng
{"title":"Research Progress on the Molecular Designs of Building Blocks for Supramolecular Aggregates and Self-Assemblies","authors":"Wang Hou-Chen, Zhou Li, Liu Yang, Cheng Ming-yue, Shi Tie-Sheng","doi":"10.19894/J.ISSN.1000-0518.200298","DOIUrl":"https://doi.org/10.19894/J.ISSN.1000-0518.200298","url":null,"abstract":"","PeriodicalId":9936,"journal":{"name":"Chinese Journal of Applied Chemistry","volume":"38 1","pages":"615"},"PeriodicalIF":0.0,"publicationDate":"2021-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"49179314","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Preparation and Characterization of Graphite Oxide with High Cation Exchange Capacity by a Potassium Persulfate Intercalation Expansion-Oxidation Method 过硫酸钾插层膨胀氧化法制备高阳离子交换容量氧化石墨及其表征
Chinese Journal of Applied Chemistry Pub Date : 2021-07-01 DOI: 10.19894/J.ISSN.1000-0518.200333
Zhang Xi-yue, Sun Hongjuan, Peng Tongjiang, Wang Ya
{"title":"Preparation and Characterization of Graphite Oxide with High Cation Exchange Capacity by a Potassium Persulfate Intercalation Expansion-Oxidation Method","authors":"Zhang Xi-yue, Sun Hongjuan, Peng Tongjiang, Wang Ya","doi":"10.19894/J.ISSN.1000-0518.200333","DOIUrl":"https://doi.org/10.19894/J.ISSN.1000-0518.200333","url":null,"abstract":"","PeriodicalId":9936,"journal":{"name":"Chinese Journal of Applied Chemistry","volume":"38 1","pages":"816"},"PeriodicalIF":0.0,"publicationDate":"2021-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"45309312","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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