Spectrochimica acta. Part A: Molecular spectroscopy最新文献_第8页

Infrared spectroscopic techniques for quantitative characterization of dielectric thin films on silicon wafers 硅片上介电薄膜的红外光谱定量表征技术

Spectrochimica acta. Part A: Molecular spectroscopy Pub Date : 1994-09-01 DOI: 10.1016/0584-8539(94)80177-0

James E Franke, Thomas M Niemczyk, David M Haaland

{"title":"Infrared spectroscopic techniques for quantitative characterization of dielectric thin films on silicon wafers","authors":"James E Franke, Thomas M Niemczyk, David M Haaland","doi":"10.1016/0584-8539(94)80177-0","DOIUrl":"10.1016/0584-8539(94)80177-0","url":null,"abstract":"<div>Dielectric thin films are critical components of microelectronic devices, and for proper device function their properties must be carefully controlled. Rapid and efficient quality control techniques are needed for characterizing these films. Infrared (IR) spectroscopy in the mid-IR region (400–4000 cm−1) has been widely used for qualitative characterization of solid, dielectric thin films in the microelectronics industry. The IR spectra of these films on silicon exhibit overlapping spectral bands, solid—solid molecular interactions, and nonlinear behavior of spectral bands arising from a variety of sources. Conventional univariate analysis of such spectra did not yield reliable quantitative predictions of the dielectric thin-film properties. The relatively recent appearance of quantitative IR studies of dielectric thin films has followed progress in chemistry toward multivariate analysis of IR spectral data. This article reviews some of the processing and non-IR characterization methods for dielectric thin films currently used in the production of integrated circuits, and it reviews univariate quantitative and semi-quantitative analyses that have used IR spectroscopy. It stresses recent developments in IR techniques and multivariate calibration that together permit rapid, precise, nondestructive, and quantitative determinations of various critical dielectric thin-film properties. Results from the application of quantitative IR techniques to the analysis of dielectric thin films are drawn from a review of the authors' work in the field.</div>","PeriodicalId":82782,"journal":{"name":"Spectrochimica acta. Part A: Molecular spectroscopy","volume":"50 10","pages":"Pages 1687-1723"},"PeriodicalIF":0.0,"publicationDate":"1994-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0584-8539(94)80177-0","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77041419","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 14

Spectroscopic studies of the interaction of C60 and C70 films with metal substrates C60和C70薄膜与金属衬底相互作用的光谱研究

Spectrochimica acta. Part A: Molecular spectroscopy Pub Date : 1994-09-01 DOI: 10.1016/0584-8539(94)80180-0

Wei Zhao , Li-Quan Chen , Yu-Xin Li , Tie-Nan Zhao , Yu-Zhen Huang , Zhan-Xiang Zhang , Hui-Tian Wang , Pei-Xian Ye , Zhong-Xian Zhao

{"title":"Spectroscopic studies of the interaction of C60 and C70 films with metal substrates","authors":"Wei Zhao , Li-Quan Chen , Yu-Xin Li , Tie-Nan Zhao , Yu-Zhen Huang , Zhan-Xiang Zhang , Hui-Tian Wang , Pei-Xian Ye , Zhong-Xian Zhao","doi":"10.1016/0584-8539(94)80180-0","DOIUrl":"10.1016/0584-8539(94)80180-0","url":null,"abstract":"<div>The interaction of fullerenes C60 and C70 films with metal substrates Au, Ag, In and Sn has been studied by UV-visible absorption spectra, IR, Raman, photoluminescence and second-order nonlinear optics. The absorption spectra show new bands for films on Au, Ag, In and Sn film substrates. For C60 on Au and Ag, new bands appear, peaking at 723 and 566 nm, respectively. For C60 film on Sn, several new bands are found at 975.4, 1218, 1557, 2000 and 3570 nm in the NIR and IR regions. Raman spectra reveal an additional peak at 350 cm−1 for C60 film on Au and five new peaks at 350, 532, 564, 1692 and 1850 cm−1 for the film on Sn. An enhancement of the Raman peak intensity is observed in the latter case. A peak blue shift of photoluminescence band from 749 to 735 nm for C60 on Sn has also been found. Moreover, a second-order nonlinear optics study at 1.06,μm yields a ten times greater secondary harmonic generation signal intensity for C60 films on Ag than that of Ag, while no signal is observed for C60 film on glass. For C70 on Sn, UV absorption bands broaden and new bands are found at 747, 984 and 1738 nm. The above results suggest a structural distortion of C60 and C70 molecules, induced by charge transfer from these metals to the molecules.</div>","PeriodicalId":82782,"journal":{"name":"Spectrochimica acta. Part A: Molecular spectroscopy","volume":"50 10","pages":"Pages 1759-1767"},"PeriodicalIF":0.0,"publicationDate":"1994-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0584-8539(94)80180-0","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78337582","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 6

Papers in press 正在出版的论文

Spectrochimica acta. Part A: Molecular spectroscopy Pub Date : 1994-09-01 DOI: 10.1016/0584-8539(94)80188-6

引用次数: 0

Cyclodextrin induced room temperature phosphorescence of some polyaromatic hydrocarbons and nitrogen heterocycles in the presence of cyclohexane 环糊精在环己烷存在下诱导了一些多芳烃和氮杂环的室温磷光

Spectrochimica acta. Part A: Molecular spectroscopy Pub Date : 1994-09-01 DOI: 10.1016/0584-8539(94)80181-9

Weijun Jin, Yansheng Wei, Aiwu Xu, Changsong Liu, Sushe Zhang

引用次数: 28

Mass spectroscopy of some tin(IV) organometallic compounds 某些锡(IV)有机金属化合物的质谱分析

Spectrochimica acta. Part A: Molecular spectroscopy Pub Date : 1994-09-01 DOI: 10.1016/0584-8539(94)80185-1

Raja H Abu-Samn

引用次数: 0

Integrated absorption coefficients of CHClF2 (HCFC-22) and CH3Br in the atmospheric infrared window region CHClF2 (HCFC-22)和CH3Br在大气红外窗口区的综合吸收系数

Spectrochimica acta. Part A: Molecular spectroscopy Pub Date : 1994-09-01 DOI: 10.1016/0584-8539(94)00132-4

C. Anastasi, A.E. Heathfield, G.P. Knight, F. Nicolaisen

引用次数: 8

The synthesis, spectral and magnetic properties of complexes of some transition mend chlorosulphates with thiazoles and thiocarbamate 噻唑类和硫代氨基甲酸酯类过渡型氯硫酸盐配合物的合成、光谱和磁性能

Spectrochimica acta. Part A: Molecular spectroscopy Pub Date : 1994-09-01 DOI: 10.1016/0584-8539(94)80186-X

Jameel Ahmad, Ali Mohammad

引用次数: 0

Evaluation of ε for p-dinitrobenzene—aniline complexes by the Scott equation. Failure of the Benesi—Hildebrand equation 用Scott方程评价对二硝基苯-苯胺配合物的ε。Benesi-Hildebrand方程失效

Spectrochimica acta. Part A: Molecular spectroscopy Pub Date : 1994-09-01 DOI: 10.1016/0584-8539(94)80184-3

Pushkin M. Qureshi, Rishi K. Varshney, Sant Bahadur Singh

引用次数: 10

A Spectroscopic characterization and Langmuir—Blodgett films of N,N'-dialkyl-3,4:9,10-perylenebis(dicarboximide) N,N'-二烷基-3,4:9,10-苝酰二(二碳酰亚胺)的光谱表征及Langmuir-Blodgett膜

Spectrochimica acta. Part A: Molecular spectroscopy Pub Date : 1994-09-01 DOI: 10.1016/0584-8539(94)80179-7

R. Aroca, A.K. Maiti

{"title":"A Spectroscopic characterization and Langmuir—Blodgett films of N,N'-dialkyl-3,4:9,10-perylenebis(dicarboximide)","authors":"R. Aroca, A.K. Maiti","doi":"10.1016/0584-8539(94)80179-7","DOIUrl":"10.1016/0584-8539(94)80179-7","url":null,"abstract":"<div>The absorption and emission electronic spectra, and the fundamental vibrational frequencies of N-butyl-N'-R-3,4:9,10-perylenebis(dicarboximide) [R = H3(BPTCDM), 2H5(BPTCDE), 3H7(BPTCDPr), (CH3)3(BPTCDI) and 5H11(BPTCDP)] are discussed. The π-A isotherms for Langmuir layers were obtained and limiting areas are given. Langmuir—Blodgett (LB) films of these dye materials were deposited on glass, AgCl and Ag surfaces. Vibrational frequencies from LB films on metal surfaces were observed using surface enhanced resonance Raman Scattering (SERRS), reflection—absorption FTIR spectroscopy (RAIRS). Transmission FTIR spectra of KBr pellets and LB films on AgCl were obtained. The average molecular orientation in LB films was calculated from the transmission and RAIRS data for LB films. The formation of aggregates in the ground and excited state (excimer formation) and the effect of NO2 and NH3 gases on the fluorescence signal was also examined.</div>","PeriodicalId":82782,"journal":{"name":"Spectrochimica acta. Part A: Molecular spectroscopy","volume":"50 10","pages":"Pages 1749-1757"},"PeriodicalIF":0.0,"publicationDate":"1994-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0584-8539(94)80179-7","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76642612","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Electronic absorption and circular dichroism spectra of Δ-[Os(bipy)2(bipy−)]+, Δ-[Os(bipy)(bipy−)2]0 and Δ-[Os(bipy−)3]− Δ-[Os(bipy)2(bipy−)]+、Δ-[Os(bipy)(bipy−)2]0和Δ-[Os(bipy−)3]−的电子吸收和圆二色光谱

Spectrochimica acta. Part A: Molecular spectroscopy Pub Date : 1994-09-01 DOI: 10.1016/0584-8539(94)80182-7

Brian C Noble, Robert D Peacock

引用次数: 0