Nanofabrication最新文献_第8页

Graphene crystal growth by thermal precipitation of focused ion beam induced deposition of carbon precursor via patterned-iron thin layers 石墨烯晶体生长的焦点离子束诱导沉积碳前驱体通过图像化铁薄层

IF 2.9

Nanofabrication Pub Date : 2014-01-01 DOI: 10.2478/nanofab-2014-0001

G. Rius, F. Pérez-Murano, M. Yoshimura

{"title":"Graphene crystal growth by thermal precipitation of focused ion beam induced deposition of carbon precursor via patterned-iron thin layers","authors":"G. Rius, F. Pérez-Murano, M. Yoshimura","doi":"10.2478/nanofab-2014-0001","DOIUrl":"https://doi.org/10.2478/nanofab-2014-0001","url":null,"abstract":"Abstract Recently, relevant advances on graphene as a building block of integrated circuits (ICs) have been demonstrated. Graphene growth and device fabrication related processing has been steadily and intensively powered due to commercial interest; however, there are many challenges associated with the incorporation of graphene into commercial applications which includes challenges associated with the synthesis of this material. Specifically, the controlled deposition of single layer large single crystal graphene on arbitrary supports, is particularly challenging. Previously, we have reported the first demonstration of the transformation of focused ion beam induced deposition of carbon (FIBID-C) into patterned graphitic layers by metal-assisted thermal treatment (Ni foils). In this present work, we continue exploiting the FIBID-C approach as a route for graphene deposition. Here, thin patterned Fe layers are used for the catalysis of graphenization and graphitization. We demonstrate the formation of high quality single and few layer graphene, which evidences, the possibility of using Fe as a catalyst for graphene deposition. The mechanism is understood as the minute precipitation of atomic carbon after supersaturation of some iron carbides formed under a high temperature treatment. As a consequence of the complete wetting of FIBID-C and patterned Fe layers, which enable graphene growth, the as-deposited patterns do not preserve their original shape after the thermal treatment","PeriodicalId":51992,"journal":{"name":"Nanofabrication","volume":"1 1","pages":""},"PeriodicalIF":2.9,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.2478/nanofab-2014-0001","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"69237527","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Focused Ion Beam nano-patterning from traditional applications to single ion implantation perspectives 聚焦离子束纳米图像化从传统应用到单离子注入的观点

IF 2.9

Nanofabrication Pub Date : 2014-01-01 DOI: 10.2478/nanofab-2014-0004

J. Giérak

引用次数: 17

Nitrogen as a carrier gas for regime control in focused electron beam induced deposition 氮作为载气用于聚焦电子束诱导沉积的状态控制

IF 2.9

Nanofabrication Pub Date : 2014-01-01 DOI: 10.2478/nanofab-2014-0002

S. Wachter, M. Gavagnin, H. Wanzenboeck, Mostafa M. Shawrav, D. Belić, E. Bertagnolli

{"title":"Nitrogen as a carrier gas for regime control in focused electron beam induced deposition","authors":"S. Wachter, M. Gavagnin, H. Wanzenboeck, Mostafa M. Shawrav, D. Belić, E. Bertagnolli","doi":"10.2478/nanofab-2014-0002","DOIUrl":"https://doi.org/10.2478/nanofab-2014-0002","url":null,"abstract":"Abstract This work reports on focused electron beam induced deposition (FEBID) using a custom built gas injection system (GIS) equipped with nitrogen as a gas carrier. We have deposited cobalt from Co2(CO)8, which is usually achieved by a heated GIS. In contrast to a heated GIS, our strategy allows avoiding problems caused by eventual temperature gradients along the GIS. Moreover, the use of the gas carrier enables a high control over process conditions and consequently the properties of the synthesized nanostructures. Chemical composition and growth rate are investigated by energy dispersive X-ray spectroscopy (EDX) and atomic force microscopy (AFM), respectively. We demonstrate that the N2 flux is strongly affecting the deposit growth rate without the need of heating the precursor in order to increase its vapour pressure. Particularly, AFM volume estimation of the deposited structures showed that increasing the nitrogen resulted in an enhanced deposition rate. The wide range of achievable precursor fluxes allowed to clearly distinguish between precursor- and electron-limited regime. With the carrier-based GIS an optimized deposition procedure with regards to the desired deposition regime has been enabled","PeriodicalId":51992,"journal":{"name":"Nanofabrication","volume":"1 1","pages":""},"PeriodicalIF":2.9,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.2478/nanofab-2014-0002","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"69237540","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 10

Electroless selective deposition of gold nano-array for silicon nanowires growth 用于硅纳米线生长的金纳米阵列的化学选择性沉积

IF 2.9

Nanofabrication Pub Date : 2013-09-10 DOI: 10.2478/NANOFAB-2013-0001

E. Ruiz-Gomes, C. Herrier, A. Gouyé, A. Benkouider, P. Sudraud, A. Delobbe, A. Ronda, I. Berbezier

引用次数: 1

Nanofabrication: Techniques and Principles 纳米制造:技术与原理

IF 2.9

Nanofabrication Pub Date : 2012-01-01 DOI: 10.1007/978-3-7091-0424-8

引用次数: 33