{"title":"Defect reduction with HQZ","authors":"Noriyuki Takamatsu","doi":"10.1117/12.3011894","DOIUrl":"https://doi.org/10.1117/12.3011894","url":null,"abstract":"","PeriodicalId":503356,"journal":{"name":"Bay Area Chrome Users Society Symposium 1985","volume":"13 28","pages":""},"PeriodicalIF":0.0,"publicationDate":"2023-12-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139168984","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Evaluation of EBR-9 resist","authors":"Naoya Hayashi","doi":"10.1117/12.3011899","DOIUrl":"https://doi.org/10.1117/12.3011899","url":null,"abstract":"","PeriodicalId":503356,"journal":{"name":"Bay Area Chrome Users Society Symposium 1985","volume":"5 3","pages":""},"PeriodicalIF":0.0,"publicationDate":"2023-12-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139169201","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Progress toward a total solution for mask shop data input","authors":"Norm Austin, Mike Clary","doi":"10.1117/12.3011904","DOIUrl":"https://doi.org/10.1117/12.3011904","url":null,"abstract":"","PeriodicalId":503356,"journal":{"name":"Bay Area Chrome Users Society Symposium 1985","volume":"911 ","pages":""},"PeriodicalIF":0.0,"publicationDate":"2023-12-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139169992","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Detection of particle defects on 5x reticle with pellicle","authors":"Barrie Skinner","doi":"10.1117/12.3011889","DOIUrl":"https://doi.org/10.1117/12.3011889","url":null,"abstract":"","PeriodicalId":503356,"journal":{"name":"Bay Area Chrome Users Society Symposium 1985","volume":"49 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2023-12-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139169199","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"X-ray mask patterning technologies","authors":"P. Mauger, A. Shimkunas","doi":"10.1117/12.3011901","DOIUrl":"https://doi.org/10.1117/12.3011901","url":null,"abstract":"","PeriodicalId":503356,"journal":{"name":"Bay Area Chrome Users Society Symposium 1985","volume":"51 5","pages":""},"PeriodicalIF":0.0,"publicationDate":"2023-12-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139169422","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Innovations in mask making and blank production: fluorescence technique in e-beam lithography and low defect photoplate manufacturing","authors":"Gilbert Hong","doi":"10.1117/12.3011896","DOIUrl":"https://doi.org/10.1117/12.3011896","url":null,"abstract":"","PeriodicalId":503356,"journal":{"name":"Bay Area Chrome Users Society Symposium 1985","volume":"291 ","pages":""},"PeriodicalIF":0.0,"publicationDate":"2023-12-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139170669","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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