{"title":"Detection of particle defects on 5x reticle with pellicle","authors":"Barrie Skinner","doi":"10.1117/12.3011889","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":503356,"journal":{"name":"Bay Area Chrome Users Society Symposium 1985","volume":"49 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2023-12-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Bay Area Chrome Users Society Symposium 1985","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.3011889","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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