发布求助
文献互助 智能选刊 最新文献

Contamination-Free Manufacturing for Semiconductors and Other Precision Products最新文献

筛选
英文 中文
Particulate Deposition in Liquid Systems 液体系统中的微粒沉积
Contamination-Free Manufacturing for Semiconductors and Other Precision Products Pub Date : 2018-10-08 DOI: 10.1201/9781315214481-13
{"title":"Particulate Deposition in Liquid Systems","authors":"","doi":"10.1201/9781315214481-13","DOIUrl":"https://doi.org/10.1201/9781315214481-13","url":null,"abstract":"","PeriodicalId":325915,"journal":{"name":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","volume":"116 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124257402","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
On-Wafer Measurement of Molecular Contaminants 分子污染物的晶片测量
Contamination-Free Manufacturing for Semiconductors and Other Precision Products Pub Date : 2018-10-08 DOI: 10.1201/9781315214481-11
V. Chia, M. Edgell
{"title":"On-Wafer Measurement of Molecular Contaminants","authors":"V. Chia, M. Edgell","doi":"10.1201/9781315214481-11","DOIUrl":"https://doi.org/10.1201/9781315214481-11","url":null,"abstract":"","PeriodicalId":325915,"journal":{"name":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","volume":"38 3","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131686575","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Deposition of Metallic Contaminants from Liquids and Their Removal 液体中金属污染物的沉积及其去除
Contamination-Free Manufacturing for Semiconductors and Other Precision Products Pub Date : 2018-10-08 DOI: 10.1201/9781315214481-16
R. Donovan
{"title":"Deposition of Metallic Contaminants from Liquids and Their Removal","authors":"R. Donovan","doi":"10.1201/9781315214481-16","DOIUrl":"https://doi.org/10.1201/9781315214481-16","url":null,"abstract":"","PeriodicalId":325915,"journal":{"name":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115154943","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Off-Wafer Measurement of Contaminants 厂外污染物测量
Contamination-Free Manufacturing for Semiconductors and Other Precision Products Pub Date : 2018-10-08 DOI: 10.1201/9781315214481-9
{"title":"Off-Wafer Measurement of Contaminants","authors":"","doi":"10.1201/9781315214481-9","DOIUrl":"https://doi.org/10.1201/9781315214481-9","url":null,"abstract":"","PeriodicalId":325915,"journal":{"name":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","volume":"14 4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129404621","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Transport and Deposition of Aerosol Particles 气溶胶粒子的输送和沉积
Contamination-Free Manufacturing for Semiconductors and Other Precision Products Pub Date : 2018-10-08 DOI: 10.1016/B978-081551555-5.50005-8
D. Rader, A. S. Geller
{"title":"Transport and Deposition of Aerosol Particles","authors":"D. Rader, A. S. Geller","doi":"10.1016/B978-081551555-5.50005-8","DOIUrl":"https://doi.org/10.1016/B978-081551555-5.50005-8","url":null,"abstract":"","PeriodicalId":325915,"journal":{"name":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114379759","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Organic Contamination Removal 去除有机污染
Contamination-Free Manufacturing for Semiconductors and Other Precision Products Pub Date : 2018-10-08 DOI: 10.1201/9781315214481-15
{"title":"Organic Contamination Removal","authors":"","doi":"10.1201/9781315214481-15","DOIUrl":"https://doi.org/10.1201/9781315214481-15","url":null,"abstract":"","PeriodicalId":325915,"journal":{"name":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130339894","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
On-Wafer Measurement of Particles 颗粒的片上测量
Contamination-Free Manufacturing for Semiconductors and Other Precision Products Pub Date : 2018-10-08 DOI: 10.1201/9781315214481-10
R. Diaz, B. M. Nebeker, E. Hirleman
{"title":"On-Wafer Measurement of Particles","authors":"R. Diaz, B. M. Nebeker, E. Hirleman","doi":"10.1201/9781315214481-10","DOIUrl":"https://doi.org/10.1201/9781315214481-10","url":null,"abstract":"","PeriodicalId":325915,"journal":{"name":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","volume":"269 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123050459","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
National Technology Roadmap for Semiconductors: Basis and Alignment 国家半导体技术路线图:基础与校准
Contamination-Free Manufacturing for Semiconductors and Other Precision Products Pub Date : 2018-10-08 DOI: 10.1201/9781315214481-8
{"title":"National Technology Roadmap for Semiconductors: Basis and Alignment","authors":"","doi":"10.1201/9781315214481-8","DOIUrl":"https://doi.org/10.1201/9781315214481-8","url":null,"abstract":"","PeriodicalId":325915,"journal":{"name":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132222510","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Sources of Contamination and Their Control 污染源及其控制
Contamination-Free Manufacturing for Semiconductors and Other Precision Products Pub Date : 2018-10-08 DOI: 10.1201/9781315214481-17
{"title":"Sources of Contamination and Their Control","authors":"","doi":"10.1201/9781315214481-17","DOIUrl":"https://doi.org/10.1201/9781315214481-17","url":null,"abstract":"","PeriodicalId":325915,"journal":{"name":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","volume":"109 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125874491","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Deposition of Molecular Contaminants in Gaseous Environments 分子污染物在气体环境中的沉积
Contamination-Free Manufacturing for Semiconductors and Other Precision Products Pub Date : 2018-10-08 DOI: 10.1201/9781315214481-14
R. Donovan
{"title":"Deposition of Molecular Contaminants in Gaseous Environments","authors":"R. Donovan","doi":"10.1201/9781315214481-14","DOIUrl":"https://doi.org/10.1201/9781315214481-14","url":null,"abstract":"","PeriodicalId":325915,"journal":{"name":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124421554","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整，为了账户安全，请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
请完成安全验证×
相关产品
×
本文献相关产品
联系我们：info@booksci.cn Book学术提供免费学术资源搜索服务，方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号：481959085
Book学术官方微信