{"title":"厂外污染物测量","authors":"","doi":"10.1201/9781315214481-9","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":325915,"journal":{"name":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","volume":"14 4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Off-Wafer Measurement of Contaminants\",\"authors\":\"\",\"doi\":\"10.1201/9781315214481-9\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":325915,\"journal\":{\"name\":\"Contamination-Free Manufacturing for Semiconductors and Other Precision Products\",\"volume\":\"14 4 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-10-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Contamination-Free Manufacturing for Semiconductors and Other Precision Products\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1201/9781315214481-9\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1201/9781315214481-9","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}