Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)最新文献

Novel MEMS Capacitive Sensor Excited at Electrical Resonance for Detecting Helium Based on Changes in Air Electrical Properties 基于空气电性能变化的新型电谐振激励MEMS电容式氦探测传感器

Volume 8: 16th International Conference on Micro- and Nanosystems (MNS) Pub Date : 2022-08-14 DOI: 10.1115/detc2022-90015

Sulaiman Mohaidat, F. Alsaleem

{"title":"Novel MEMS Capacitive Sensor Excited at Electrical Resonance for Detecting Helium Based on Changes in Air Electrical Properties","authors":"Sulaiman Mohaidat, F. Alsaleem","doi":"10.1115/detc2022-90015","DOIUrl":"https://doi.org/10.1115/detc2022-90015","url":null,"abstract":"\u0000 Dry cask storage (DCS) is increasingly used for extended long-term storage of spent nuclear fuel. The canister is vacuum dried and then pressurized with helium to ensure an inert atmosphere and efficient heat transfer. Thus, helium leakage detection plays an important part in ensuring the safety of nuclear waste storage facilities. However, as it is a noble light gas with no order or color, using conventional gas sensing techniques for detecting Helium is a challenge. To overcome this challenge, in this paper we present the working principle of a simple electrostatic MEMS structure to detect Helium in ambient air. The working principle of this novel sensor is based on the decrease in the air die-electric constant due to the presence of Helium. While this change is small, we show that activating the MEMS RLC circuit can significantly amplify the sensor response and hence increase its sensitivity. The sensor response is simulated at different Helium concentration levels using a finite element model. The simulations showed that an electrostatic MEMS sensor operating close to the electrical resonance frequency of an RLC circuit showed different deflection and as such a different capacitance at different levels of helium. A decrease up to 20% of the MEMS deflection was observed at 20% Helium concentration compared to near 0% concentration.","PeriodicalId":325425,"journal":{"name":"Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131865925","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Bistability Condition for Electrostatically Actuated Initially Curved Micro-Beams in the Presence of Curved Electrodes 弯曲电极存在下静电驱动初始弯曲微梁的双稳性条件

Volume 8: 16th International Conference on Micro- and Nanosystems (MNS) Pub Date : 2022-08-14 DOI: 10.1115/detc2022-89669

L. Medina

{"title":"Bistability Condition for Electrostatically Actuated Initially Curved Micro-Beams in the Presence of Curved Electrodes","authors":"L. Medina","doi":"10.1115/detc2022-89669","DOIUrl":"https://doi.org/10.1115/detc2022-89669","url":null,"abstract":"\u0000 Following increasing interest in electrostatic actuation of curved beams via curved electrodes. A rigorous limit point analysis is carried out to view how the beam reacts as a function of its geometry, as well as that of the electrode. The culmination of the study is in a bistability condition that describes what geometry both beam and electrode must have in order for bistability to be present. The study is based on a single-degree-of-freedom (DOF) reduced order (RO) model of a curved beam, derived from Galerkin’s decomposition. The extraction of a condition is based on the existence of a vanishing discriminant of a cubic equation, which formed a boundary in the parameters space of both beam and electrode geometries. The boundary describes a shift in behaviour, from mono- to bistability. Such a model and subsequent analysis have been used before for the study of curved beams, especially when it is on the verge of bistability, with high degree of fidelity. The condition shows that while actuation voltages will increase or decrease as a function of electrode curvature, as well as operational range, the curvature of an electrode plays a key role in determining the behaviour of the beam. Such results can serve researchers and engineers alike in designing curved beam-electrode configurations for usage in future studies, thus promoting their usage in micro-electro-mechanical (MEMS) based applications.","PeriodicalId":325425,"journal":{"name":"Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122698738","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Anisotropic Approach to Control Viscous Fingering Pattern Generated in Lifting Plate Hele-Shaw Cell 升降板Hele-Shaw单元中粘指纹的各向异性控制方法

Volume 8: 16th International Conference on Micro- and Nanosystems (MNS) Pub Date : 2022-08-14 DOI: 10.1115/detc2022-89600

K. Bhole, B. Kale, S. Mastud, N. Raykar, C. Sharma, P. Deshmukh

{"title":"Anisotropic Approach to Control Viscous Fingering Pattern Generated in Lifting Plate Hele-Shaw Cell","authors":"K. Bhole, B. Kale, S. Mastud, N. Raykar, C. Sharma, P. Deshmukh","doi":"10.1115/detc2022-89600","DOIUrl":"https://doi.org/10.1115/detc2022-89600","url":null,"abstract":"\u0000 Stability is one of the important aspects of life, our everyday systems — the permanence of things. When this stability gets disturbed, instability is produced. Sometimes this instability is desirable, and sometimes not. In the crude oil extraction process, fluid instability is observed. Saffman and Taylor explored the concept of the Hele-Shaw cell to study these instabilities. The Hele-Shaw cell involves a high viscous fluid sandwiched between two parallel plates, and the low viscosity fluid enters from the periphery. Insertion of low viscous fluid into a high viscous fluid generates a pattern that is a resemblance to a finger. This phenomenon is called viscous fingering. In this paper, the authors control the instabilities and mimic patterns available in nature. These instabilities can be controlled by controlling one of the fluids in the cell. Here authors control the low viscous fluid (air) by providing anisotropies. Anisotropy means providing holes and slots on any plate of the cell. This anisotropy guides air to interact with high viscous fluid at some desired location. The authors further studied the effect of size, position, the orientation of these holes and slots on the viscous fingering exhaustively.","PeriodicalId":325425,"journal":{"name":"Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133227429","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Nuclear Batteries Enable Decades of Uninterrupted Life for Microelectronic Systems 核电池可为微电子系统提供数十年不间断的使用寿命

Volume 8: 16th International Conference on Micro- and Nanosystems (MNS) Pub Date : 2022-08-14 DOI: 10.1115/detc2022-89291

O. Barham

{"title":"Nuclear Batteries Enable Decades of Uninterrupted Life for Microelectronic Systems","authors":"O. Barham","doi":"10.1115/detc2022-89291","DOIUrl":"https://doi.org/10.1115/detc2022-89291","url":null,"abstract":"\u0000 Nuclear radioisotope batteries are a class of energy dense power sources that convert radioactive decay particle energy directly into electricity for powering sensors, electronics, and medical implants in applications where battery replacement is difficult or impossible. In order to show the potential benefits of integrating these types of power sources into microelectronic sensor systems, three recent examples from the literature are considered: a gas sensor; a communication component (radio frequency front-end); and a photoplethysmographic sensor. These were selected to represent three common microsystem components: environmental sensors; communication components; and biological sensors. In each case, system operational lifetime is computed when powered with a commercial Li-ion coin cell battery, followed by a comparison with three nuclear battery prototypes from the literature. In each case, the nuclear power sources allow potential continuous, unattended operational life to be extended by an order of magnitude or more, typically from less than one year to decades of continuous use. Advantages and disadvantages of nuclear batteries in general are also addressed.","PeriodicalId":325425,"journal":{"name":"Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127147335","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Design and Simulation of a MEMS Capacitive Pressure Sensor With Corrugated Membrane and Linear Capacitance-Pressure Response 具有线性电容-压力响应的波纹膜MEMS电容压力传感器的设计与仿真

Volume 8: 16th International Conference on Micro- and Nanosystems (MNS) Pub Date : 2022-08-14 DOI: 10.1115/detc2022-90093

M. Shavezipur

{"title":"Design and Simulation of a MEMS Capacitive Pressure Sensor With Corrugated Membrane and Linear Capacitance-Pressure Response","authors":"M. Shavezipur","doi":"10.1115/detc2022-90093","DOIUrl":"https://doi.org/10.1115/detc2022-90093","url":null,"abstract":"This paper presents a new design for MEMS capacitive pressure sensor that helps to linearize the capacitance-pressures response of the sensor. Capacitive pressure sensors have two electrodes, one often fixed and one is deformed as the ambient pressure changes. In general, the two electrodes are made of flat thin films. The proposed sensor design is based on a corrugated membrane, where circular ridges and grooves are made in the membrane altering its deformation as the pressure is applied. The sensor design is analyzed using finite element simulations, and ANSYS coupled-field multiphysics solver is used to model and obtain the response of a conventional and corrugated pressure sensor as the ambient pressure changes. The simulation results show that, as expected, the sensor displays high sensitivity at lower pressure and as the pressure increases and the contact area between the membrane and fixed electrode expands, the sensitivity of the capacitance-pressure (C-P) response decreases for both sensors. However, the sensor with corrugated membrane displays high linearity at lower pressures. The response for proposed design at this pressure range is nearly a perfect line, while the conventional design exhibits nonlinearity that is visually noticeable. To quantitatively evaluate the level of linearity of the C-P responses, a linearity factor as the coefficient of linear correlation between the capacitance and pressure is used. The simulation results show that at low pressure of 0.2–1.0 MPa, the sensor with corrugated membrane has high linearity of 0.999 compared to 0.987 for conventional sensor, where for pressure range 0–1.0 MPa these values are 0.997 and 0.983, respectively. The quantitative comparison of the linearity factors for the two design show a notable improvement in the linearity of the C-P response providing nearly a constant sensitivity over the pressure range of 0.2 to 1.0 MPa.","PeriodicalId":325425,"journal":{"name":"Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132463034","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A Three Degree of Freedom Model Approach to Enable a MEMS-Based Neural Computing Unit 一种实现mems神经计算单元的三自由度模型方法

Volume 8: 16th International Conference on Micro- and Nanosystems (MNS) Pub Date : 2022-08-14 DOI: 10.1115/detc2022-90498

Mohammad Megdadi, Hamed Nikfarjam, M. Okour, S. Pourkamali, F. Alsaleem

{"title":"A Three Degree of Freedom Model Approach to Enable a MEMS-Based Neural Computing Unit","authors":"Mohammad Megdadi, Hamed Nikfarjam, M. Okour, S. Pourkamali, F. Alsaleem","doi":"10.1115/detc2022-90498","DOIUrl":"https://doi.org/10.1115/detc2022-90498","url":null,"abstract":"\u0000 With enormous amounts of data being generated every day from countless sensors and sensor networks, the need for intelligent devices to process and make use of this data continues to grow and is only projected to increase. The advent of wearable technologies has exacerbated this problem, and with researchers struggling to process data locally with small power budgets, it is clear a solution is needed. Micro-electromechanical (MEMS)-based innovation will have high impact on these issues. MEMS devices can process computing taskes in the hardware level which consumes almost no power (nW). They are very small in size and do the classification without the need of storing the data which boosts up the power saving. Toward this goal, simulation results for a MEMS network to perform basic neural computing is shown in this paper. The network is made up of a mechanically connected network of three electrostatically controlled microstructures, two of which serve as input layers and the third as output (computing) layers. The mechanical coupling was achieved through stiffnesses connecting the masses of the MEMS. It has been demonstrated that such a device may be programmed to distinguish between a ramp (gradually growing) input signal and a step (abruptly rising) by applying suitable bias voltages to the electrostatic control electrodes. The findings serve as a proof of concept and founding to completing more sophisticated computational tasks using MEMS and opening a new direction for alternative efficient computing technologies compared to current digital computing.","PeriodicalId":325425,"journal":{"name":"Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131094223","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Development of a Novel Three-Dimensional Parallel-Plate Biochemical Sensor for Electrochemical Impedance Spectroscopy (EIS) 新型三维平行板电化学阻抗谱生化传感器的研制

Volume 8: 16th International Conference on Micro- and Nanosystems (MNS) Pub Date : 2022-08-14 DOI: 10.1115/detc2022-90378

Negar Rafiee, Brian S. Huffman, M. Shavezipur

{"title":"Development of a Novel Three-Dimensional Parallel-Plate Biochemical Sensor for Electrochemical Impedance Spectroscopy (EIS)","authors":"Negar Rafiee, Brian S. Huffman, M. Shavezipur","doi":"10.1115/detc2022-90378","DOIUrl":"https://doi.org/10.1115/detc2022-90378","url":null,"abstract":"\u0000 Miniaturized electrochemical impedance-based biochemical sensors have been extensively used for detection of chemical and biological agents at extremely low concentrations. The majority of the sensors presented in the literature have a two-dimensional (planar) geometry and use two interdigitated electrodes that are exposed to an aqueous solution for deteciotn. In this work, a novel three-dimensional sensor is presented that uses a parallel-plate geometry for sensor structure. The sensor has a digitated electrode patterned on the substrate and a planar and porous electrode suspended above the fixed electrode. The sensor is fabricated using PolyMUMPs and diethylhexyl phthalate (DEHP) is used to demonstrate the ability of the sensor for biochemical detection. The measurement results show that the sensor has distinct Nyquist responses for 0.02 ppm, 0.2 ppm, 2 ppm and 10 ppm concentrations of the DEHP. Different electrochemical phenomena such as double-layer capacitance formation and charge transport at high frequencies, and diffusion at low frequencies are detected using Nyquist plots. The experimental results show that, for 3D parallel-plate sensors, in contrast to interdigitated geometry, the electrostatic effect is noticeable, and the parallel-plate capacitance due to the dielectric effect of the solution notably affects the Nyquist response. This is an important effect, specially for biological detection.","PeriodicalId":325425,"journal":{"name":"Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133370415","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Experimental Analysis of Flexural-Torsional Forced Vibrations of A Piezoelectric Double-Cantilever 压电双悬臂梁弯扭强迫振动的实验分析

Volume 8: 16th International Conference on Micro- and Nanosystems (MNS) Pub Date : 2022-08-14 DOI: 10.1115/detc2022-89969

A. Zargarani, John O'Donnell, S. Mahmoodi

{"title":"Experimental Analysis of Flexural-Torsional Forced Vibrations of A Piezoelectric Double-Cantilever","authors":"A. Zargarani, John O'Donnell, S. Mahmoodi","doi":"10.1115/detc2022-89969","DOIUrl":"https://doi.org/10.1115/detc2022-89969","url":null,"abstract":"\u0000 In this paper, the experimental flexural-torsional forced vibration of a piezoelectric double-cantilever structure is studied and compared with analytical results. The structure of interest consists of two uniform and identical Euler-Bernoulli cantilever beams that are connected by a rigid tip connection at their free ends. Each of the cantilever beams can be excited by a piezoelectric layer attached on its top surface. The time response to the forced vibrations of the structure induced by the piezoelectric actuators is found using the Galerkin approximation method. The effects of dimensional parameters, the length of the cantilever beams and the length of the tip connection, as well as the piezoelectric input voltage on the flexural-torsional amplitude of the vibrations of the structure are studied analytically and experimentally. The amplitude of the flexural-torsional vibrations of the structure is observed to be proportional to the piezoelectric input voltage. However, the slope of the curves defining this relationship depends on dimensional parameters. For a constant input voltage, the effect of either of the dimensional parameters on the amplitude of vibrations is dependent on the other dimensional parameter such that a turning point, whose location is dependent on the configuration of the structure, exists in all the curves.","PeriodicalId":325425,"journal":{"name":"Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124147584","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Alpha-Photovoltaics for Milliwatt Applications 毫瓦应用的α -光伏

Volume 8: 16th International Conference on Micro- and Nanosystems (MNS) Pub Date : 2022-08-14 DOI: 10.1115/detc2022-91306

M. Khan, M. Litz, J. Russo, R. Tompkins

{"title":"Alpha-Photovoltaics for Milliwatt Applications","authors":"M. Khan, M. Litz, J. Russo, R. Tompkins","doi":"10.1115/detc2022-91306","DOIUrl":"https://doi.org/10.1115/detc2022-91306","url":null,"abstract":"\u0000 Isotope power sources can serve applications for sensor or communication nodes that are required to last the lifetime of infrastructure because they possess at least 1000 times higher energy density, long operational lifetimes (> 10 years), and wider operational temperature range compared to chemical power sources. There are different methods of converting radiation energy into electrical energy at low power (nW – mW) levels, the most prevalent is betavoltaic devices which convert beta particles energy directly into electrical energy using a semiconductor junction. However, the current state-of-the art betavoltaics can only produce 10’s of micro-watts/cm2, and are not suitable for applications requiring mW output power. Alpha particle emitting isotopes have higher energies than beta isotopes and can be used to produce power in mW range, but require radiation tolerant ultra-wide-bandgap semiconductor junctions, which are not widely available yet. Therefore, it is necessary to look at alternate approaches to harvest energy from alpha decay using existing semiconductor technology. In this paper, we have validated one such approach to convert alpha particles energy into electrical energy by employing an intermediate phosphor layer placed between an alpha source and an InGaP PV cell. We simulated the average energy emission of Am-241 using a pelletron source accelerating He2+ ions and exposed the InGaP PV with phosphor film deposited on top while measuring the IV characteristics throughout the experiment. We measured an output power of 165 μW/cm2 at 4.5 MeV beam, representing a fluence of 3.75 × 1013 ions.","PeriodicalId":325425,"journal":{"name":"Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130974422","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A Novel Mass Sensor Based on Parametrically Excited Mode-Localized Resonators 一种基于参数激励模式局域谐振器的新型质量传感器

Volume 8: 16th International Conference on Micro- and Nanosystems (MNS) Pub Date : 2022-08-14 DOI: 10.1115/detc2022-90568

J. Song, Jian Zhao, N. Kacem, Ming Lyu, Rongjian Sun, Pengbo Liu

引用次数: 0